Liquid crystal spatial light modulator with electrically isolated reflecting films connected to electrically isolated pixel portions of photo conductor

Claim 2

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portions and an upper surface of the inter-pixel portion being at a level lower than a level of upper surfaces of the pixel portions; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a rectifying function between the reflecting film connected thereto and the first electrode, and the spatial light modulator further includes an input light blocking film for preventing writing light from being incident on the inter-pixel portion of the photoconductive layer.

Claim 3

A spatial light modulator according to claim 1, wherein the pixel portions of the photoconductive layer each have a diode structure, to be provided with the rectifying function.

Claim 4

A spatial light modulator according to claim 2, wherein the pixel portions of the photoconductive layer each include a p-type semiconductor layer, an i-type semiconductor layer provided on the p-type semiconductor layer, and an n-type semiconductor layer provided on the i-type semiconductor layer, to be provided with the rectifying function.

Claim 5

A spatial light modulator according to claim 3, wherein the inter-pixel portion includes an i-type semiconductor layer for substantially preventing electrical carriers generated in each pixel portion of the photoconductive layer from being diffused into the other pixel portions.

Claim 6

A spatial light modulator according to claim 4, further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer, for preventing reading light from being incident on the inter-pixel portion.

Claim 7

A spatial light modulator according to claim 3, further comprising an outer light blocking film provided on the inter-pixel portion of the photoconductive layer, for preventing reading light from being incident on the inter-pixel portion.

Claim 8

A spatial light modulator according to claim 2, further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer, for preventing reading light from being incident on the inter-pixel portion.

Claim 9

A spatial light modulator according to claim 1, further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer, for preventing reading light from being incident on the inter-pixel portion.

Claim 10

A spatial light modulator according to claim 1, further comprising a first transparent insulating substrate and a second transparent insulating substrate, wherein the first transparent insulating substrate supports the first electrode and the second transparent insulating substrate supports the second electrode.

Claim 11

A spatial light modulator according to claim 1, wherein the first electrode and the second electrode are transparent conductive electrodes.

Claim 12

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated form one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a diode structure and a rectifying function between the reflecting film connected thereto and the first electrode, wherein the pixel portions of the photoconductive layer each include a p-type semiconductor layer, an i-type semiconductor layer provided on the p-type semiconductor layer, and an n-type semiconductor layer provided on the i-type semiconductor layer, to be provided with the rectifying function, wherein the inter-pixel portion includes an i-type semiconductor layer for substantially preventing electrical carriers generated in each pixel portion of the photoconductive layer form being diffused into the other pixel portions, and wherein an upper surface of the inter-pixel portion of the photoconductive layer is at a level lower than a level of upper surfaces of the pixel portions of the photoconductive layer, and the i-type semiconductor layer is exposed at the upper surface of the inter-pixel portion, and the spatial light modulator further includes an input light blocking film for preventing writing light from being incident on the inter-pixel portion of the photoconductive layer.

Claim 13

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated form one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a diode structure and a rectifying function between the reflecting film connected thereto and the first electrode, wherein the pixel portions of the photoconductive layer each include a p-type semiconductor layer, an i-type semiconductor layer provided on the p-type semiconductor layer, and an n-type semiconductor layer provided on the i-type semiconductor layer, to be provided with the rectifying function, wherein the inter-pixel portion includes an i-type semiconductor layer for substantially preventing electrical carriers generated in each pixel portion of the photoconductive layer form being diffused into the other pixel portions, and wherein an upper surface of the inter-pixel portion of the photoconductive layer is at a level lower than a level of upper surfaces of the pixel portions of the photoconductive layer, and the i-type semiconductor layer is exposed at the upper surface of the inter-pixel portion, and the spatial light modulator further includes an input light blocking film for preventing writing light from being incident on the inter-pixel portion of the photoconductive layer.

Claim 14

A spatial light modulator according to claim 11, further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer, for preventing reading light from being incident on the inter-pixel portion.

Claim 15

A spatial light modulator according to claim 12, further comprising an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 16

A spatial light modulator according to claim 13, wherein the insulting layer is formed of an organic polymer containing a material absorbing light having a wavelength in a specified range.

Claim 17

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a rectifying function between the reflecting film connected thereto and the first electrode; and further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer for preventing reading light from being incident on the inter-pixel portion and an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 18

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a rectifying function between the reflecting film connected thereto and the first electrode; and further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer for preventing reading light from being incident on the inter-pixel portion and an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 19

A spatial light modulator according to claim 15, wherein the insulting layer is formed of an organic polymer containing a material absorbing light having a wavelength in a specified range.

Claim 20

A spatial light modulator comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a diode structure and a rectifying function between the reflecting film connected thereto and the first electrode; and further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer for preventing reading light from being incident on the inter-pixel portion and an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 21

A spatial light modulator comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a diode structure and a rectifying function between the reflecting film connected thereto and the first electrode; and further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer for preventing reading light from being incident on the inter-pixel portion and an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 22

A spatial light modulator according to claim 17, wherein the insulting layer is formed of an organic polymer containing a material absorbing light having a wavelength in a specified range.

Claim 23

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a diode structure and a rectifying function between the reflecting film connected thereto and the first electrode, wherein the pixel portions of the photoconductive layer each include a p-type semiconductor layer, an i-type semiconductor layer provided on the p-type semiconductor layer, and an n-type semiconductor layer provided on the i-type semiconductor layer, to be provided with the rectifying function; and p1 further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer for preventing reading light from being incident on the inter-pixel portion and an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 24

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode, wherein the pixel portions each have a diode structure and a rectifying function between the reflecting film connected thereto and the first electrode, wherein the pixel portions of the photoconductive layer each include a p-type semiconductor layer, an i-type semiconductor layer provided on the p-type semiconductor layer, and an n-type semiconductor layer provided on the i-type semiconductor layer, to be provided with the rectifying function; and p1 further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer for preventing reading light from being incident on the inter-pixel portion and an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 25

A spatial light modulator according to claim 19, wherein the insulting layer is formed of an organic polymer containing a material absorbing light having a wavelength in a specified range.

Claim 26

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode. wherein the pixel portions each have a diode structure and a rectifying function between the reflecting film connected thereto and the first electrode, wherein the pixel portions of the photoconductive layer each include a p-type semiconductor layer, an i-type semiconductor layer provided on the p-type semiconductor layer, and an n-type semiconductor layer provided on the i-type semiconductor layer, to be provided with the rectifying function, and wherein the inter-pixel portion includes an i-type semiconductor layer for substantially preventing electrical carriers generated in each pixel portion of the photoconductive layer from being diffused into the other pixel portions; and further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer for preventing reading light from being incident on the inter-pixel portion and an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 27

A spatial light modulator, comprising: a first electrode; a second electrode opposed to the first electrode; a photoconductive layer electrically connected to the first electrode and including a plurality of pixel portions and an inter-pixel portion between the pixel portions, the pixel portions being electrically isolated from one another by the inter-pixel portion; a plurality of reflecting films electrically connected to the pixel portions of the photoconductive layer respectively, the reflecting films being electrically isolated from one another; and a liquid crystal layer interposed between the reflecting films and the second electrode. wherein the pixel portions each have a diode structure and a rectifying function between the reflecting film connected thereto and the first electrode, wherein the pixel portions of the photoconductive layer each include a p-type semiconductor layer, an i-type semiconductor layer provided on the p-type semiconductor layer, and an n-type semiconductor layer provided on the i-type semiconductor layer, to be provided with the rectifying function, and wherein the inter-pixel portion includes an i-type semiconductor layer for substantially preventing electrical carriers generated in each pixel portion of the photoconductive layer from being diffused into the other pixel portions; and further comprising an output light blocking film provided on the inter-pixel portion of the photoconductive layer for preventing reading light from being incident on the inter-pixel portion and an insulating layer for covering the output light blocking film and for electrically isolating the output light blocking film from the reflecting films.

Claim 28

A spatial light modulator according to claim 21, wherein the insulting layer is formed of an organic polymer containing a material absorbing light having a wavelength in a specified range.

Claim 31

A method for producing a spatial light modulator according to claim 23, wherein a plurality of reflecting films are formed on the photoconductive layer, and the step of etching is performed using the reflecting films as masks.

Claim 34

A method for producing a spatial light modulator according to claim 25, further comprising the step of, after the step of forming the output light blocking film, further etching side walls of the photoconductive layer using the output light blocking film as a mask.

Claim 35

A method for producing a spatial light modulator according to claim 25, further comprising the step of, after the step of forming the output light blocking films, forming an insulating layer for covering the output light blocking film.