US4619501A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Charge isolation in a spatial light modulator
Assignee: Lockheed Martin Corp
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Filing: 1985-01-08
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Granted: 1986-10-28
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Expires: 2005-01-08
Abstract
Abstract A spatial light modulator having a lattice of microgrooves formed on the surface of the silicon photodiode nearest the electro-optic cyrstal to prevent lateral charge transfer at this surface.
Inventors
- 👤 David Armitage
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 05:12
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/03; G02F1/0305; G02F1/0338; G02F1/13; G02F1/133; G02F1/135; G02F1/1354
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
179 words
A spatial light modulator which comprises: a silicon substrate having a first surface and an opposed second surface, and having p-type silicon material diffused in the first surface thereof to form a photodiode; a dielectric mirror having a first surface and an opposed second surface, the first surface thereof being adjacent the second surface of said silicon substrate; an electro-optic crystal having a first surface and an opposed second surface, the first surface thereof being adjacent the second surface of said dielectric mirror; a transparent electrode having a first surface and an opposed second surface, the first surface thereof being adjacent the second surface of said electro-optic crystal; a transparent supporting substrate having a first surface and an opposed second surface, the first surface thereof being adjacent the second surface of said transparent electrode; means for applying a voltage between said p-type material and said transparent electrode; and a lattice configuration of microgrooves formed in the second surface of said silicon substrate to form a matrix of charge storage regions therein and prevent lateral charge transfer between said regions.
Claim 2
Dependent Claim
179 words
A spatial light modulator which comprises: a silicon substrate having a first surface and an opposed second surface, and having p-type silicon material diffused in the first surface thereof to form a photodiode; a dielectric mirror having a first surface and an opposed second surface, the first surface thereof being adjacent the second surface of said silicon substrate; an electro-optic crystal having a first surface and an opposed second surface, the first surface thereof being adjacent the second surface of said dielectric mirror; a transparent electrode having a first surface and an opposed second surface, the first surface thereof being adjacent the second surface of said electro-optic crystal; a transparent supporting substrate having a first surface and an opposed second surface, the first surface thereof being adjacent the second surface of said transparent electrode; means for applying a voltage between said p-type material and said transparent electrode; and a lattice configuration of microgrooves formed in the second surface of said silicon substrate to form a matrix of charge storage regions therein and prevent lateral charge transfer between said regions.
Claim 3
Dependent Claim
25 words
Apparatus as defined in claim 1 wherein said microgrooves have a depth of at least one micron and a width of at least one micron.
Claim 4
Dependent Claim
21 words
Apparatus as defined in claim 2 wherein the separation between the microgrooves in said lattice configuration is at least thirty microns.
Claim 5
Dependent Claim
22 words
Apparatus as defined in claim 1 and further comprising: a light blocking layer interposed between said silicon substrate and said dielectric mirror.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-27 | 1990-04-28 | 1990-10-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-27 | 1994-04-28 | 1994-10-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-27 | 1998-04-28 | 1998-10-28 | $7700.00 | Window Closed / Lapsed |