Patent US5383482A successfully refreshed from Google Patents.
US5383482A
Expired / Lapsed
US
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Semiconductor processing apparatus and module
Assignee: Renesas Electronics Corp
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Filing: 1992-11-02
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Granted: 1995-01-24
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Expires: 2012-11-02
Abstract
Abstract Semiconductor processing equipment includes an ID-card removing robot, an ID-card stocking device, and an ID-card attaching robot so that the management of ID cards is performed inside the equipment. Thus, the present invention makes it possible to reduce equipment size and achieve highly efficient factory automation. Furthermore, in a semiconductor processing equipment module according to the present invention, each item of semiconductor processing equipment has its own ID-card stocking device. As a result, the number of case carriers can be reduced and a space reduction with increased factory automation can be easily realized.
Inventors
- 👤 Yoshiaki Yamada
- 👤 Junji Iwasaki
- 👤 Masashi Ohmori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 14:22
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0456; H10P72/0468; H10P72/06; H10P72/0612; H10P72/0618; H10P72/30; H10P72/34; H10P72/3411; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
105 words
Semiconductor processing equipment comprising: ID-card removing means for removing an ID card attached to a case containing semiconductor wafers; ID-card holding means for holding the removed ID card; processing means for processing the semiconductor wafers in the case; a loader for taking the semiconductor wafers out of the case and placing the semiconductor wafers in said processing means; an unloader for taking processed semiconductor wafers out of said processing means and placing the semiconductor wafers into a case; and ID-card attaching means for taking the ID card corresponding to semiconductor wafers processed from said ID-card holding means and attaching the ID card to the case.
Claim 2
Dependent Claim
105 words
Semiconductor processing equipment comprising: ID-card removing means for removing an ID card attached to a case containing semiconductor wafers; ID-card holding means for holding the removed ID card; processing means for processing the semiconductor wafers in the case; a loader for taking the semiconductor wafers out of the case and placing the semiconductor wafers in said processing means; an unloader for taking processed semiconductor wafers out of said processing means and placing the semiconductor wafers into a case; and ID-card attaching means for taking the ID card corresponding to semiconductor wafers processed from said ID-card holding means and attaching the ID card to the case.
Claim 3
Dependent Claim
37 words
The semiconductor processing equipment as defined in claim 1 having opposed sides and including a carrying-in/carrying-out place on one side of said semiconductor processing equipment where cases are carried into and out of said semiconductor processing equipment.
Claim 4
Dependent Claim
13 words
The semiconductor processing equipment as defined in claim 1 including a vacant-cassette stocker.
Claim 5
Dependent Claim
140 words
A semiconductor processing equipment module comprising: plural pieces of semiconductor processing equipment including ID-card removing means for removing an attached ID card from a case containing semiconductor wafers; ID-card holding means for holding said removed ID card; processing means for processing the semiconductor wafers in the case; a loader for removing semiconductor wafers to be processed from said case and placing said semiconductor wafers in said processing means; ID-card attaching means for retrieving an ID card corresponding to processed semiconductor wafers from said ID-card holding means and attaching said ID card to said case; and an unloader for taking processed semiconductor wafers from said processing means and placing said semiconductor wafers into said case; case stocking means for stocking cases; and case carrying means for carrying cases between said plural pieces of semiconductor processing equipment and said case stocking means.
Claim 6
Dependent Claim
140 words
A semiconductor processing equipment module comprising: plural pieces of semiconductor processing equipment including ID-card removing means for removing an attached ID card from a case containing semiconductor wafers; ID-card holding means for holding said removed ID card; processing means for processing the semiconductor wafers in the case; a loader for removing semiconductor wafers to be processed from said case and placing said semiconductor wafers in said processing means; ID-card attaching means for retrieving an ID card corresponding to processed semiconductor wafers from said ID-card holding means and attaching said ID card to said case; and an unloader for taking processed semiconductor wafers from said processing means and placing said semiconductor wafers into said case; case stocking means for stocking cases; and case carrying means for carrying cases between said plural pieces of semiconductor processing equipment and said case stocking means.
Claim 7
Dependent Claim
40 words
The semiconductor processing module as defined in claim 4 including case cleaning means for cleaning cases wherein said case carrying means carries cases between said plural pieces of semiconductor processing equipment, said case stocking means, and said case cleaning means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-23 | 1998-07-25 | 1999-01-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-23 | 2002-07-25 | 2003-01-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-23 | 2006-07-25 | 2007-01-24 | $7700.00 | Window Closed / Lapsed |