Thin film continuous dynodes for electron multiplication

Claim 2

A continuous thin firm dynode for replicating the function of reduced lead silicate glass (RLSG) dynodes in an electron multiplier comprising: a substrate formed with at least one capillary channel therein having a channel wall; an isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer; said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said current carrying portion having a resistance capable of carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, and said emissive portion having a secondary electron yield capable of resulting in electron multiplication, said electron emissive portion being essentially free of a material which is silica-rich, alkali-rich and lead-poor, and said current carrying portion being essentially free of a material which is lead-rich so as to exhibit resistance to radiolytic damage caused by electron bombardment greater than RLSG, for extending the operational lifetime of said dynode.

Claim 3

The continuous dynode of claim 1 wherein the substrate comprises a material selected from the group consisting of Si 3 N 4 , AlN, Al 2 O 3 , SiO 2 glass, R 2 O--Al 2 O 3 --SiO 2 (R=Li, Na, K) glasses, R 2 O--BaO--Bi 2 O 3 --PbO--SiO 2 (R=Na, K, Rb, Cs) glasses, AlAs, GaAs, InP, GaP, and Si.

Claim 4

The dynode of claim 1 wherein the emissive portion comprises a thin film of one or more materials selected from the group consisting of SiO 2 , Al 2 O 3 , MgO, SnO 2 , Si 3 N 4 , Si x O y N z , C (Diamond), and BN.

Claim 5

The dynode of claim 1 wherein the electron multiplier comprises a microchannel plate having a plurality of capillary channels each having a major transverse dimension on the order of less than about 10 μm and being closely spaced on the order of less than about 10 μm.

Claim 6

The dynode of claim 1 wherein the current carrying portion comprises a thin film of a material selected from the group consisting of As-, B-, or P-doped Si, Ge (undoped), S (undoped), SiO x (SIPOS), Si x N y , Al x Ga 1-x As, and SnO x .

Claim 7

The dynode of claim 1 wherein the at least one thin film comprises a laminar composite of an electron emissive film overlying a current carrying film.

Claim 8

The dynode of claim 1 wherein the isolation layer comprises a dielectric thin film for electrically isolating the at least one thin film from the substrate.

Claim 9

The dynode of claim 7 wherein the isolation layer is formed of material selected from the group consisting of SiO 2 and Si 3 N 4 .

Claim 10

The dynode of claim 7 wherein the at least one thin film comprises a laminar composite of an electron emissive film overlying a current carrying film, overlying the dielectric isolation layer, overlying the substrate, and wherein said substrate is electrically conductive.

Claim 11

A continuous thin-film dynode for replicating the function of reduced lead silicate glass (RLSG) dynodes in an electron multiplier comprising: a substrate formed with at least on capillary channel therein having a channel wall; an isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer, said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said current carrying portion having a resistance capable carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, and said emissive portion having a secondary electron yield capable of resulting in electron multiplication, said electron emissive portion being essentially free of a material which is silica-rich, alkali-rich and lead-poor, and said current carrying portion being essentially free of a material which is lead-rich material so as to exhibit a susceptibility to out gassing in vacuum less than RLSG, for providing a corresponding improvement in gain stability to said dynode.

Claim 12

A continuous thin-film dynode for replicating the function of reduced lead silicate glass (RLSG) dynodes in an electron multiplier comprising: a substrate formed with at least on capillary channel therein having a channel wall; an isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer, said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said current carrying portion having a resistance capable carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, and said emissive portion having a secondary electron yield capable of resulting in electron multiplication, said electron emissive portion being essentially free of a material which is silica-rich, alkali-rich and lead-poor, and said current carrying portion being essentially free of a material which is lead-rich material so as to exhibit a susceptibility to out gassing in vacuum less than RLSG, for providing a corresponding improvement in gain stability to said dynode.

Claim 13

The continuous dynode of claim 10 wherein the substrate comprises a material selected from the group consisting of Si 3 N 4 , AlN, Al 2 O 3 , SiO 2 glass, R 2 O--Al 2 O 3 --SiO 2 (R=Li, Na, K) glasses, R 2 O-- BaO--Bi 2 O 3 --PbO--SiO 2 (R=Na, K, Rb, Cs) glasses, AlAs, GaAs, InP, GaP, and Si.

Claim 14

The dynode of claim 10 wherein the emissive portion comprises a thin film of one or more materials selected from the group consisting of SiO 2 , Al 2 O 3 , MgO, SnO 2 , Si 3 N 4 , Si x O y N z , C (Diamond), and BN.

Claim 15

The dynode of claim 10 wherein the current carrying portion comprises a thin film of a material selected from the group consisting of As-, B-, or P-doped Si, Ge (undoped), Si (undoped), SiO x (SIPOS), Si x N y , Al x Ga 1-x As, and SnO x .

Claim 16

The dynode of claim 10 wherein the at least one thin film comprises a laminar composite of an electron emissive film overlying a current carrying film.

Claim 17

The dynode of claim 10 wherein the isolation layer comprises a dielectric thin film for electrically isolating the at least one thin film from the substrate.

Claim 18

The dynode of claim 15 wherein the isolation layer is formed of material selected from the group consisting of SiO 2 and Si 3 N 4 .

Claim 19

The dynode of claim 15 wherein the at least one thin film comprises a laminar composite of an electron emissive film overlying a current carrying film, overlying the dielectric isolation layer, overlying the substrate, and wherein said substrate is electrically conductive.

Claim 20

A continuous thin-film dynode for replicating the function of reduced lead silicate glass (RLSG) dynodes in an electron multiplier comprising: a substrate formed with at least one capillary channel therein having a channel wall; an isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer; said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said current carrying portion having a resistance capable of carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, said electron emissive portion having a secondary electron yield capable of resulting in electron multiplication, and said electron emissive portion being essentially free of a material which is silica-rich, alkali-rich and lead-poor material and said current carrying portion being essentially free of a material which is lead-rich so as to produce a hermetic seal that is more protective than RLSG, for proving a corresponding increase environmental stability to said dynode.

Claim 21

A continuous thin-film dynode for replicating the function of reduced lead silicate glass (RLSG) dynodes in an electron multiplier comprising: a substrate formed with at least one capillary channel therein having a channel wall; an isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer; said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said current carrying portion having a resistance capable of carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, said electron emissive portion having a secondary electron yield capable of resulting in electron multiplication, and said electron emissive portion being essentially free of a material which is silica-rich, alkali-rich and lead-poor material and said current carrying portion being essentially free of a material which is lead-rich so as to produce a hermetic seal that is more protective than RLSG, for proving a corresponding increase environmental stability to said dynode.

Claim 22

The continuous dynode of claim 10 wherein the substrate comprises a material selected from the group consisting of Si 3 N 4 , AlN, Al 2 O 3 , SiO 2 glass, R 2 O--Al 2 O 3 --SiO 2 (R=Li, Na, K) glasses, R 2 O--BaO--Bi 2 O 3 --PbO--SiO 2 (R=Na, K, Rb, Cs) glasses, AlAs, GaAs, InP, GaP, and Si.

Claim 23

The dynode of claim 18 wherein the emissive portion comprises a thin film of one or more materials selected from the group consisting of SiO 2 , Al 2 O 3 , MgO, SnO 2 , Si 3 N 4 , Si x O y N z , C (Diamond), and BN.

Claim 24

The dynode of claim 18 wherein the current carrying portion comprises a thin film of a material selected from the group consisting of As-, B-, or P-doped Si, Ge (undoped), Si (undoped), SiO x (SIPOS), Si x N y , Al x Ga 1-x As, and SnO x .

Claim 25

The dynode of claim 18 wherein the at least one thin film comprises a laminar composite of an electron emissive film overlying a current carrying film.

Claim 26

The dynode of claim 18 wherein the isolation layer comprises a dielectric thin film for electrically isolating the at least one thin film from the substrate.

Claim 27

The dynode of claim 23 wherein the isolation layer is formed of material selected from the group consisting of SiO 2 and Si 3 N 4 .

Claim 28

The dynode of claim 23 wherein the at least one thin film comprises a laminar composite of an electron emissive film overlying a current carrying film, overlying the dielectric isolation layer, overlying the substrate, and wherein said substrate is electrically conductive.

Claim 29

A continuous thin-film dynode for replicating the function of reduced lead silicate glass (RLSG) dynodes in an electron multiplier comprising: a substrate formed with at least one capillary channel therein having a channel wall; an isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer, said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said current carrying portion having a resistance capable of carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, and said emissive portion having a secondary electron yield capable of resulting in electron multiplication, said at least one thin film being substantially free of radioactive materials and said electron emissive portion being essentially free of a material which is silica-rich, alkali-rich and lead-poor, and said current carrying portion being essentially free of a material which is lead-rich and having a corresponding dynamic range greater than RLSG dynodes.

Claim 30

A continuous thin-film dynode for replicating the function of reduced lead silicate glass (RLSG) dynodes in an electron multiplier comprising: a substrate formed with at least one capillary channel therein having a channel wall; an isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer, said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said current carrying portion having a resistance capable of carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, and said emissive portion having a secondary electron yield capable of resulting in electron multiplication, said at least one thin film being substantially free of radioactive materials and said electron emissive portion being essentially free of a material which is silica-rich, alkali-rich and lead-poor, and said current carrying portion being essentially free of a material which is lead-rich and having a corresponding dynamic range greater than RLSG dynodes.

Claim 31

A continuous dynode for an electron multiplier comprising: an electrically semiconductive substrate formed with at least one capillary channel therein having a channel wail; a dielectric isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer, said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said dielectric isolation layer for electrically isolating the at least one thin film from the substrate, said current carrying portion having a resonance capable of carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, and said emissive portion having a secondary electron yield capable of resulting in electron multiplication.

Claim 32

A continuous dynode for an electron multiplier comprising: an electrically semiconductive substrate formed with at least one capillary channel therein having a channel wail; a dielectric isolation layer overlying the channel wall; and at least one thin film overlying the isolation layer, said at least one thin film having a current carrying portion and an electron emissive portion overlying the current carrying portion, said dielectric isolation layer for electrically isolating the at least one thin film from the substrate, said current carrying portion having a resonance capable of carrying a current adequate to replace emitted electrons and establishing an accelerating electric field for said emitted electrons, and said emissive portion having a secondary electron yield capable of resulting in electron multiplication.

Claim 33

The dynode of claim 27 wherein the isolation layer is formed of material selected from the group consisting of SiO 2 and Si 3 N 4 .

Claim 34

The dynode of claim 27 wherein the at least one thin film comprises a laminar composite of an electron emissive film overlying a current carrying film, overlying the dielectric isolation layer, overlying the substrate.

Claim 35

The dynode of claim 27 wherein the electron multiplier comprises a microchannel plate having a plurality of capillary channels each channel having a major transverse dimension on the order of less than about 4 μm and being closely spaced on the order of less than about 6 μm.

Claim 36

The dynode of 27 wherein the electron multiplier comprises a microchannel plate having a plurality of capillary channels each having a major transverse dimension on the order of less than about 10 μm and being closely spaced on the order of less than about 10 μm.

Claim 37

The dynode of 27 wherein the electron multiplier comprises a microchannel plate having a plurality of capillary channels each having a major transverse dimension on the order of less than about 10 μm and being closely spaced on the order of less than about 10 μm.

Claim 38

The dynode of claim 27 wherein the emissive portion comprises a thin film of one or more materials selected from the group consisting of SiO 2 , Al 2 O 3 , MgO, SnO 2 , Si 3 N 4 , Si x O y N z , C (Diamond), and BN.

Claim 39

The dynode of claim 27 wherein the current carrying portion comprises a thin film of a material selected from the group consisting of As-, B- or P-doped Si, Ge (undoped), Si (undoped), SiO x (SIPOS), Si x N y , Al x Ga 1-x As, and SnO x .

Claim 40

The dynode of claim 27, wherein the substrate comprises a material selected from the group consisting of GaAs, InP and Si.

Claim 41

The dynode of claim 27, wherein the isolation layer is a thin film having a thickness in a range of about 2 μm and about 5 μm.

Claim 42

The dynode of claims 27 wherein the emissive portion is a thin film having a thickness of 2-20 nm.

Claim 43

The dynode of claim 27 wherein the current carrion portion comprises a thin film having a thickness of about 10-1000 nm.