US5378927A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin-film wiring layout for a non-planar thin-film structure
Assignee: International Business Machines Corp
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Filing: 1993-05-24
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Granted: 1995-01-03
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Expires: 2013-05-24
Abstract
Abstract A thin-film arrangement for a non-planar structure is described. The structure includes a substrate and a plurality of thin-film layers stacked on top of each other above the substrate. The layers contain conductive patterns and vias that provide connections between the conductive pattern in one of the layers to the conductive pattern in another layer. Vias that provide a connection between the conductive pattern of one layer to the conductive pattern in another remotely located layer are offset and in contact with respect to each other and are positioned in a non-linear arrangement, preferably in the form of a helix or a multiple helix.
Inventors
- 👤 Michael F. McAllister
- 👤 James A. McDonald
- 👤 Keshav Prasad
- 👤 Gordon J. Robbins
- 👤 Madhavan Swaminathan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 14:56
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/611; H10W70/62; H10W70/63; H10W70/635; H10W70/65
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
106 words
An arrangement of vias in a thin-film structure, comprising: a substrate; a plurality of thin-film layers stacked on top of each other placed above said substrate, each of said layers having a conductive pattern and a plurality of vias, said vias providing a connection between the conductive pattern in one of said layers to the conductive pattern in another of said layers; at least one of said vias in one of said layers being offset from and in electrical contact with at least a via in another layer, and wherein a plurality of said connecting vias are stacked in a non-linear, non-planar arrangement forming a helix.
Claim 2
Dependent Claim
106 words
An arrangement of vias in a thin-film structure, comprising: a substrate; a plurality of thin-film layers stacked on top of each other placed above said substrate, each of said layers having a conductive pattern and a plurality of vias, said vias providing a connection between the conductive pattern in one of said layers to the conductive pattern in another of said layers; at least one of said vias in one of said layers being offset from and in electrical contact with at least a via in another layer, and wherein a plurality of said connecting vias are stacked in a non-linear, non-planar arrangement forming a helix.
Claim 3
Dependent Claim
37 words
The arrangement of vias as recited in claim 1, wherein said plurality of contacting vias forms a multiple spiral providing a multiple path for each of said contacting vias to achieve current sharing between said contacting vias.
Claim 4
Dependent Claim
125 words
An arrangement of vias in a non-planar thin-film structure comprising: a substrate; a plurality of thin-film layers stacked on top of each other placed above said substrate, each of said layers having a conductive pattern and a plurality of vias, said vias providing a connection between the conductive pattern in one of said layers to the conductive pattern in another of said layers, a plurality of said vias having a dimple on one surface, thereby creating a non-planar environment, and at least one of said plurality of vias in one of said layers being offset from and in electrical contact with at least a via in another layer, and wherein said plurality of offset contacting vias are stacked in a non-linear arrangement forming a helix.
Claim 5
Dependent Claim
125 words
An arrangement of vias in a non-planar thin-film structure comprising: a substrate; a plurality of thin-film layers stacked on top of each other placed above said substrate, each of said layers having a conductive pattern and a plurality of vias, said vias providing a connection between the conductive pattern in one of said layers to the conductive pattern in another of said layers, a plurality of said vias having a dimple on one surface, thereby creating a non-planar environment, and at least one of said plurality of vias in one of said layers being offset from and in electrical contact with at least a via in another layer, and wherein said plurality of offset contacting vias are stacked in a non-linear arrangement forming a helix.
Claim 6
Dependent Claim
37 words
The arrangement of vias as recited in claim 3, wherein said plurality of contacting vias forms a multiple spiral providing a multiple path for each of said contacting vias to achieve current sharing between said contacting vias.
Claim 7
Dependent Claim
37 words
The arrangement of vias as recited in claim 3, wherein said plurality of contacting vias forms a multiple spiral providing a multiple path for each of said contacting vias to achieve current sharing between said contacting vias.
Claim 8
Dependent Claim
27 words
The arrangement of vias in a non-planar thin-film structure as recited in claim 3, further comprising a dielectric layer placed above the topmost of said stacked layers.
Claim 9
Dependent Claim
120 words
The arrangement of vias in a non-planar thin-film structure as recited in claim 6, further comprising: a second plurality of thin-film layers placed above said dielectric layer, each of said second plurality of Layers having a conductive pattern and a plurality of vias, said vias providing a connection between the conductive pattern in one of said second plurality of layers to the conductive pattern in another of said second plurality of layers, wherein at least one of said vias in one of said second plurality of layers is offset from and in electrical contact with at least a vias in another layer, and wherein a plurality of said contacting vias are stacked in a non-linear, non-planar arrangement forming a helix.
Claim 10
Dependent Claim
158 words
An arrangement of vias in a non-planar thin-film structure comprising: a substrate; at least one wiring layer on top of said substrate having electrical connecting lines, at least one reference layer adjacent to said at least one thin-film layers for supplying power and for converting said connecting lines into transmission lines by providing a return electrical path to the transmission lines; a plurality of vias in each of said layers for providing an electrical path between said connecting lines in one of said layers to said lines in another of said layers and for providing an electrical path from one of said reference layers to terminal metal placed on top of the structure, wherein at least one of said vias in one of said layers being offset from and in electrical contact with at least a via in another layer, and wherein a plurality of said contacting vias are positioned in a non-linear, non-planar arrangement forming a helix.
Claim 11
Dependent Claim
158 words
An arrangement of vias in a non-planar thin-film structure comprising: a substrate; at least one wiring layer on top of said substrate having electrical connecting lines, at least one reference layer adjacent to said at least one thin-film layers for supplying power and for converting said connecting lines into transmission lines by providing a return electrical path to the transmission lines; a plurality of vias in each of said layers for providing an electrical path between said connecting lines in one of said layers to said lines in another of said layers and for providing an electrical path from one of said reference layers to terminal metal placed on top of the structure, wherein at least one of said vias in one of said layers being offset from and in electrical contact with at least a via in another layer, and wherein a plurality of said contacting vias are positioned in a non-linear, non-planar arrangement forming a helix.
Claim 12
Dependent Claim
26 words
The arrangement of vias in a non-planar thin-film structure as recited in claim 8, wherein a plurality of said vias have a dimple on a surface.
Claim 13
Dependent Claim
26 words
The arrangement of vias as recited in claim 8, wherein said at least one reference layer is further comprised of conductors arranged in an orthogonal arrangement.
Claim 14
Dependent Claim
65 words
The arrangement of vias as recited in claim 8, wherein said connecting lines in said at least one wiring layer are vertically above a corresponding one of said conducting lines in said reference layer to provide electrical shielding and maintain a uniform separation between said connecting lines in said at least one wiring layer and said connecting lines in said at least one reference plane.
Claim 15
Dependent Claim
36 words
The arrangement of vias as recited in claim 8, wherein said plurality of interconnected vias provides an electrical path from said at least one reference layer to chips attached to the top surface of the structure.
Claim 16
Dependent Claim
19 words
The arrangement of vias as recited in claim 8, wherein said interconnecting lines provide intrachip and interchip electrical connections.
Claim 17
Dependent Claim
37 words
The arrangement of vias as recited in claim 8, wherein said plurality of contacting vias forms a multiple spiral providing a multiple path for each of said contacting vias to achieve current sharing between said contacting vias.
Claim 18
Dependent Claim
61 words
The arrangement of vias in a non-planar thin-film structure as recited in claim 9, wherein said plurality of vias provide an electrical path between said connecting lines in one of said layers to said lines in one of said layers and for providing an electrical path from one of said reference layers to terminal metal placed on top of the structure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-02 | 1998-07-04 | 1999-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-02 | 2002-07-04 | 2003-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-02 | 2006-07-04 | 2007-01-03 | $7700.00 | Window Closed / Lapsed |