US5378312A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for fabricating a semiconductor structure having sidewalls
Assignee: GlobalFoundries Inc
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Filing: 1993-12-07
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Granted: 1995-01-03
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Expires: 2013-12-07
Abstract
Abstract A method of fabricating a semiconductor structure includes the steps of providing a semiconductor substrate having a material disposed thereon, masking the material with a mask having an appropriate pattern for forming a semiconductor structure, etching unmasked portions of the material so as to form the semiconductor structure, wherein the etching produces a film which attaches onto the semiconductor structure and/or on the semiconductor substrate, and removing the film from the semiconductor structure according to the steps of producing a cryogenic jet stream having cryogenic particles therein, and directing the cryogenic jet stream at the film such that the crogenic jet stream impinges on and causes the film to decrease in temperature so that a high temperature gradient develops between the film and the semiconductor structure, the film detaching from the semiconductor structure and fracturing due to contraction caused by the decrease in temperature and high temperature gradient.
Inventors
- 👤 George G. Gifford
- 👤 Yeong-Jyh T. Lii
- 👤 Jin J. Wu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 17:49
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/27; H10P70/273; B; B08; B08B; B08B7/00; B08B7/0064; B08B7/0092; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; Y; Y10; Y10S; Y10S438/00; Y10S438/963
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
148 words
A method of fabricating a semiconductor structure, comprising the steps of: providing a semiconductor substrate having a material disposed thereon; masking said material with a mask having an appropriate pattern for forming a semiconductor structure; etching unmasked portions of said material so as to form said semiconductor structure, wherein said etching produces a film which attaches onto said semiconductor structure and/or on said semiconductor substrate; and removing said film from said semiconductor structure according to the steps of producing a cryogenic jet stream having cryogenic particles therein; and directing said cryogenic jet stream at said film such that said crogenic jet stream impinges on and causes said film to decrease in temperature so that a high temperature gradient develops between said film and said semiconductor structure, said film detaching from said semiconductor structure and fracturing due to contraction caused by the decrease in temperature and high temperature gradient.
Claim 2
Independent Claim
148 words
A method of fabricating a semiconductor structure, comprising the steps of: providing a semiconductor substrate having a material disposed thereon; masking said material with a mask having an appropriate pattern for forming a semiconductor structure; etching unmasked portions of said material so as to form said semiconductor structure, wherein said etching produces a film which attaches onto said semiconductor structure and/or on said semiconductor substrate; and removing said film from said semiconductor structure according to the steps of producing a cryogenic jet stream having cryogenic particles therein; and directing said cryogenic jet stream at said film such that said crogenic jet stream impinges on and causes said film to decrease in temperature so that a high temperature gradient develops between said film and said semiconductor structure, said film detaching from said semiconductor structure and fracturing due to contraction caused by the decrease in temperature and high temperature gradient.
Claim 3
Dependent Claim
24 words
A method according to claim 1, wherein said cryogenic particles are carried within said cryogenic jet stream at a velocity of approximately sonic velocity.
Claim 4
Dependent Claim
20 words
A method according to claim 2, wherein the mean diameter of said cryogenic particles is less than approximately 1 micron.
Claim 5
Dependent Claim
28 words
A method according to claim 1, wherein said cryogenic jet stream is directed at an angle of between approximately 20 degrees and 90 degrees relative to said substrate.
Claim 6
Dependent Claim
21 words
A method according to claim 1, wherein said cryogenic particles impact said film with mechanical energy of below approximately 100 eV.
Claim 7
Dependent Claim
27 words
A method according to claim 1, further comprising the step of directing said detached and fractured film away from said semiconductor structure with said cryogenic jet stream.
Claim 8
Dependent Claim
57 words
A process according to claim 1, wherein said semiconductor structure comprises at least one sidewall and said film produced during said step of etching attaches onto said at least one sidewall of said semiconductor structure for passivating said at least one sidewall of said semiconductor structure for preventing undercutting of said semiconductor during said step of etching.
Claim 9
Dependent Claim
42 words
A process according to claim 7, wherein said at least one sidewall of said semiconductor structure defines a boundary of a trench, and said film produced during said step of etching attaches onto said at least one sidewall of said semiconductor structure.
Claim 10
Dependent Claim
55 words
A process according to claim 8, wherein said step of removing further includes a step of controlling size of said cryogenic particles in said cryogenic jet stream such that said cryogenic particles penetrate into said trench and contact said film attached on said at least one sidewall of said semiconductor structure which defines said trench.
Claim 11
Dependent Claim
27 words
A method according to claim 9, further comprising the step of directing said detached and fractured film away from said semiconductor structure with said cryogenic jet stream.
Claim 12
Dependent Claim
22 words
A method according to claim 1, wherein said cryogenic jet stream is produced by expanding a vapor liquid mixture through an orifice.
Claim 13
Dependent Claim
34 words
A method according to claim 11, wherein said vapor liquid mixture is mixed with a diluent gas prior to expansion, said diluent gas having a lower condensation temperature than the temperature of the expansion.
Claim 14
Dependent Claim
47 words
A method according to claim 11, wherein said vapor liquid mixture comprises nitrogen having a pressure of between approximately 11 psia and 150 psia and a temperature of between approximately -341 F. and -270 F., and said orifice has a diameter of between approximately 0.005" and 0.05".
Claim 15
Dependent Claim
47 words
A method according to claim 11, wherein said vapor liquid mixture comprises argon having a pressure of between approximately 10 psia and 300 psia and a temperature of between approximately -308 F. and -225 F., and said orifice has a diameter of between approximately 0.005" and 0.05".
Claim 16
Dependent Claim
27 words
A method according to claim 1, further comprising the step of removing said mask subsequent to said step of etching and prior to said step of removing.
Claim 17
Dependent Claim
14 words
A method according to claim 1, wherein said step of etching comprises dry etching.
Claim 18
Dependent Claim
14 words
A method according to claim 16, wherein said dry etching comprises reactive ion etching.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-01-02 | 1998-07-04 | 1999-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-02 | 2002-07-04 | 2003-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-02 | 2006-07-04 | 2007-01-03 | $7700.00 | Window Closed / Lapsed |