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Semiconductor laser of patterned-substrate type and structure thereof

Assignee: Fujitsu Ltd
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Filing: 1994-04-11
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Granted: 1994-12-20
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Expires: 2014-04-11
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Abstract

Abstract A semiconductor laser of a patterned-substrate type comprises the patterned-substrate having a sloped portion and a planar portion, and a plurality of semiconductor layers formed on the patterned-substrate including a heterostructure. By controlling condition for growing a specific semiconductor layer, a preferably ratio of a sloped portion thickness to a planar portion thickness of the semiconductor layer can be obtained, which enables a lasing current of the laser to be confined in a restricted region, and this results in obtaining a high efficiency and a high power output of the semiconductor laser.

Inventors

  • 👤 Chikashi Anayama
  • 👤 Toshiyuki Tanahashi
  • 👤 Makoto Kondo

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 17:38
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H01; H01S; H01S5/00; H01S5/20; H01S5/22; H01S5/223; H01S5/2232; H01S5/2238; H01S5/30; H01S5/32; H01S5/323; H01S5/32308; H01S5/32325; H10P14/24; H10P14/27; H10P14/271; H10P14/2924; H10P14/2925; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3218; H10P14/3221; H10P14/3242; H10P14/3244; H10P14/3251; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H01S5/2201; H01S5/2234; H01S5/2235; H01S5/2237; H01S5/3202; Y; Y10; Y10S; Y10S148/00; Y10S148/095

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 191 words
A semiconductor laser comprising: a patterned-substrate having first and second planar portions in a parallel and spaced relationship and a sloped portion extending between the first and second planar portions; an active layer on the patterned-substrate; a clad layer on the active layer, the clad layer comprising first and second current-blocking regions corresponding, respectively, to the first and second planar portions of the patterned-substrate, and a current channel region corresponding to the sloped portion of the patterned-substrate and extending between the first and second current-blocking regions, the current channel having a thickness tp1 and the current-blocking regions each having a thickness tp2; wherein a thickness ratio R=(tp1/tp2) satisfies the following relationship: R=sin φ{(cos θ/sin θ)+(cos φ/sin φ)} where θ and φ are selected within a range specified by the following condition: tan.sup.-1 (2p1/W)≦θ+φ≦90° where φ is defined as an inclination angle of the current channel region with respect to the first planar portion of the patterned-substrate, and θ is defined as an angle between the growth direction of the clad layer and the first planar portion of the patterned-substrate, and W is defined as the width of the current channel region.
Claim 2
Dependent Claim 191 words
A semiconductor laser comprising: a patterned-substrate having first and second planar portions in a parallel and spaced relationship and a sloped portion extending between the first and second planar portions; an active layer on the patterned-substrate; a clad layer on the active layer, the clad layer comprising first and second current-blocking regions corresponding, respectively, to the first and second planar portions of the patterned-substrate, and a current channel region corresponding to the sloped portion of the patterned-substrate and extending between the first and second current-blocking regions, the current channel having a thickness tp1 and the current-blocking regions each having a thickness tp2; wherein a thickness ratio R=(tp1/tp2) satisfies the following relationship: R=sin φ{(cos θ/sin θ)+(cos φ/sin φ)} where θ and φ are selected within a range specified by the following condition: tan.sup.-1 (2p1/W)≦θ+φ≦90° where φ is defined as an inclination angle of the current channel region with respect to the first planar portion of the patterned-substrate, and θ is defined as an angle between the growth direction of the clad layer and the first planar portion of the patterned-substrate, and W is defined as the width of the current channel region.
Claim 3
Dependent Claim 36 words
A semiconductor laser as recited in claim 1, wherein the first and second planar portions of the patterned-substrate each have a surface index (100) and the sloped portion of the patterned-substrate extends in the direction <011>.
Claim 4
Dependent Claim 20 words
A semiconductor laser as recited in claim 1, wherein the sloped portion of the patterned-substrate has a surface index (411)A.
Claim 5
Dependent Claim 15 words
A semiconductor laser as recited in claim 1, wherein the active layer is of GaInP.
Claim 6
Dependent Claim 35 words
A semiconductor laser as recited in claim 1, in which the clad layer represents an upper clad layer, the semiconductor laser further comprising a lower clad layer positioned between the active layer and the patterned-substrate.
Claim 7
Dependent Claim 266 words
A semiconductor laser comprising: a patterned-substrate having a planar surface with a mesa-stripe formed on a portion of the planar surface to define an exposed planar surface, the mesa-stripe having a top portion and side surfaces extending from the top portion to the exposed planar surface, each side surface having a first inclination angle with respect to the exposed planar surface; a current blocking layer on the side surfaces of the mesa-stripe and the exposed planar surface of the patterned-substrate, the current blocking layer having sloped portions corresponding to the side surfaces of the mesa-stripe, the sloped portions having a lower surface which defines an interface with the side surfaces of the mesa-stripe and an upper surface which forms a second inclination angle with respect to the exposed planar surface of the patterned-substrate, the second inclination angle being less than the first inclination angle; a plurality of layers formed on the sloped portions of the current-blocking layer and the top portion of the mesa-stripe, the plurality of layers comprising; a buffer layer having a thickness of tp1 on the sloped portion of the current-blocking layer and a thickness tp2 on the top portion of the mesa-stripe, a thickness ratio tp1/tp2 being less than 1, a lower clad layer formed on the buffer layer and having a thickness tp1' on the sloped portion of the current-blocking layer and a thickness tp2' on the top portion of the mesa-stripe, a thickness ratio tp1'/tp2' ranging approximately between 1 and 2, an active layer formed on the lower clad layer, and an upper clad layer formed on the active layer.
Claim 8
Dependent Claim 266 words
A semiconductor laser comprising: a patterned-substrate having a planar surface with a mesa-stripe formed on a portion of the planar surface to define an exposed planar surface, the mesa-stripe having a top portion and side surfaces extending from the top portion to the exposed planar surface, each side surface having a first inclination angle with respect to the exposed planar surface; a current blocking layer on the side surfaces of the mesa-stripe and the exposed planar surface of the patterned-substrate, the current blocking layer having sloped portions corresponding to the side surfaces of the mesa-stripe, the sloped portions having a lower surface which defines an interface with the side surfaces of the mesa-stripe and an upper surface which forms a second inclination angle with respect to the exposed planar surface of the patterned-substrate, the second inclination angle being less than the first inclination angle; a plurality of layers formed on the sloped portions of the current-blocking layer and the top portion of the mesa-stripe, the plurality of layers comprising; a buffer layer having a thickness of tp1 on the sloped portion of the current-blocking layer and a thickness tp2 on the top portion of the mesa-stripe, a thickness ratio tp1/tp2 being less than 1, a lower clad layer formed on the buffer layer and having a thickness tp1' on the sloped portion of the current-blocking layer and a thickness tp2' on the top portion of the mesa-stripe, a thickness ratio tp1'/tp2' ranging approximately between 1 and 2, an active layer formed on the lower clad layer, and an upper clad layer formed on the active layer.

References Cited (Backward Citations)

JPS5636182A Cited
JPS57132384A Cited
JPS601879A Cited
JPS62258986A Cited
JPS62258991A Cited
EP0454476A2 Cited
US5255281A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-12-19 1998-06-20 1998-12-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-12-19 2002-06-20 2002-12-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-12-19 2006-06-20 2006-12-20 $7700.00 Window Closed / Lapsed

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