US5375136A
Expired / Lapsed
US
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Semiconductor laser of patterned-substrate type and structure thereof
Assignee: Fujitsu Ltd
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Filing: 1994-04-11
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Granted: 1994-12-20
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Expires: 2014-04-11
Abstract
Abstract A semiconductor laser of a patterned-substrate type comprises the patterned-substrate having a sloped portion and a planar portion, and a plurality of semiconductor layers formed on the patterned-substrate including a heterostructure. By controlling condition for growing a specific semiconductor layer, a preferably ratio of a sloped portion thickness to a planar portion thickness of the semiconductor layer can be obtained, which enables a lasing current of the laser to be confined in a restricted region, and this results in obtaining a high efficiency and a high power output of the semiconductor laser.
Inventors
- 👤 Chikashi Anayama
- 👤 Toshiyuki Tanahashi
- 👤 Makoto Kondo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 15:52
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H01; H01S; H01S5/00; H01S5/20; H01S5/22; H01S5/223; H01S5/2232; H01S5/2238; H01S5/30; H01S5/32; H01S5/323; H01S5/32308; H01S5/32325; H10P14/24; H10P14/27; H10P14/271; H10P14/2924; H10P14/2925; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3218; H10P14/3221; H10P14/3242; H10P14/3244; H10P14/3251; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H01S5/2201; H01S5/2234; H01S5/2235; H01S5/2237; H01S5/3202; Y; Y10; Y10S; Y10S148/00; Y10S148/095
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
191 words
A semiconductor laser comprising: a patterned-substrate having first and second planar portions in a parallel and spaced relationship and a sloped portion extending between the first and second planar portions; an active layer on the patterned-substrate; a clad layer on the active layer, the clad layer comprising first and second current-blocking regions corresponding, respectively, to the first and second planar portions of the patterned-substrate, and a current channel region corresponding to the sloped portion of the patterned-substrate and extending between the first and second current-blocking regions, the current channel having a thickness tp1 and the current-blocking regions each having a thickness tp2; wherein a thickness ratio R=(tp1/tp2) satisfies the following relationship: R=sin φ{(cos θ/sin θ)+(cos φ/sin φ)} where θ and φ are selected within a range specified by the following condition: tan.sup.-1 (2p1/W)≦θ+φ≦90° where φ is defined as an inclination angle of the current channel region with respect to the first planar portion of the patterned-substrate, and θ is defined as an angle between the growth direction of the clad layer and the first planar portion of the patterned-substrate, and W is defined as the width of the current channel region.
Claim 2
Dependent Claim
191 words
A semiconductor laser comprising: a patterned-substrate having first and second planar portions in a parallel and spaced relationship and a sloped portion extending between the first and second planar portions; an active layer on the patterned-substrate; a clad layer on the active layer, the clad layer comprising first and second current-blocking regions corresponding, respectively, to the first and second planar portions of the patterned-substrate, and a current channel region corresponding to the sloped portion of the patterned-substrate and extending between the first and second current-blocking regions, the current channel having a thickness tp1 and the current-blocking regions each having a thickness tp2; wherein a thickness ratio R=(tp1/tp2) satisfies the following relationship: R=sin φ{(cos θ/sin θ)+(cos φ/sin φ)} where θ and φ are selected within a range specified by the following condition: tan.sup.-1 (2p1/W)≦θ+φ≦90° where φ is defined as an inclination angle of the current channel region with respect to the first planar portion of the patterned-substrate, and θ is defined as an angle between the growth direction of the clad layer and the first planar portion of the patterned-substrate, and W is defined as the width of the current channel region.
Claim 3
Dependent Claim
36 words
A semiconductor laser as recited in claim 1, wherein the first and second planar portions of the patterned-substrate each have a surface index (100) and the sloped portion of the patterned-substrate extends in the direction <011>.
Claim 4
Dependent Claim
20 words
A semiconductor laser as recited in claim 1, wherein the sloped portion of the patterned-substrate has a surface index (411)A.
Claim 5
Dependent Claim
15 words
A semiconductor laser as recited in claim 1, wherein the active layer is of GaInP.
Claim 6
Dependent Claim
35 words
A semiconductor laser as recited in claim 1, in which the clad layer represents an upper clad layer, the semiconductor laser further comprising a lower clad layer positioned between the active layer and the patterned-substrate.
Claim 7
Dependent Claim
266 words
A semiconductor laser comprising: a patterned-substrate having a planar surface with a mesa-stripe formed on a portion of the planar surface to define an exposed planar surface, the mesa-stripe having a top portion and side surfaces extending from the top portion to the exposed planar surface, each side surface having a first inclination angle with respect to the exposed planar surface; a current blocking layer on the side surfaces of the mesa-stripe and the exposed planar surface of the patterned-substrate, the current blocking layer having sloped portions corresponding to the side surfaces of the mesa-stripe, the sloped portions having a lower surface which defines an interface with the side surfaces of the mesa-stripe and an upper surface which forms a second inclination angle with respect to the exposed planar surface of the patterned-substrate, the second inclination angle being less than the first inclination angle; a plurality of layers formed on the sloped portions of the current-blocking layer and the top portion of the mesa-stripe, the plurality of layers comprising; a buffer layer having a thickness of tp1 on the sloped portion of the current-blocking layer and a thickness tp2 on the top portion of the mesa-stripe, a thickness ratio tp1/tp2 being less than 1, a lower clad layer formed on the buffer layer and having a thickness tp1' on the sloped portion of the current-blocking layer and a thickness tp2' on the top portion of the mesa-stripe, a thickness ratio tp1'/tp2' ranging approximately between 1 and 2, an active layer formed on the lower clad layer, and an upper clad layer formed on the active layer.
Claim 8
Dependent Claim
266 words
A semiconductor laser comprising: a patterned-substrate having a planar surface with a mesa-stripe formed on a portion of the planar surface to define an exposed planar surface, the mesa-stripe having a top portion and side surfaces extending from the top portion to the exposed planar surface, each side surface having a first inclination angle with respect to the exposed planar surface; a current blocking layer on the side surfaces of the mesa-stripe and the exposed planar surface of the patterned-substrate, the current blocking layer having sloped portions corresponding to the side surfaces of the mesa-stripe, the sloped portions having a lower surface which defines an interface with the side surfaces of the mesa-stripe and an upper surface which forms a second inclination angle with respect to the exposed planar surface of the patterned-substrate, the second inclination angle being less than the first inclination angle; a plurality of layers formed on the sloped portions of the current-blocking layer and the top portion of the mesa-stripe, the plurality of layers comprising; a buffer layer having a thickness of tp1 on the sloped portion of the current-blocking layer and a thickness tp2 on the top portion of the mesa-stripe, a thickness ratio tp1/tp2 being less than 1, a lower clad layer formed on the buffer layer and having a thickness tp1' on the sloped portion of the current-blocking layer and a thickness tp2' on the top portion of the mesa-stripe, a thickness ratio tp1'/tp2' ranging approximately between 1 and 2, an active layer formed on the lower clad layer, and an upper clad layer formed on the active layer.
References Cited (Backward Citations)
JPS5636182A
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JPS57132384A
Cited
JPS601879A
Cited
JPS62258986A
Cited
JPS62258991A
Cited
EP0454476A2
Cited
US5255281A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-19 | 1998-06-20 | 1998-12-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-19 | 2002-06-20 | 2002-12-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-19 | 2006-06-20 | 2006-12-20 | $7700.00 | Window Closed / Lapsed |