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US5371373A
Expired / Lapsed
US
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Electron beam lithography method and apparatus separating repetitive and non-repetitive pattern data
Assignee: Hitachi Ltd
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Filing: 1993-11-16
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Granted: 1994-12-06
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Expires: 2013-11-16
Abstract
Abstract Not only for a memory device having a high repeatabitlity but also for a device having a low repeatability, there can be realized an electron beam lithography method which can carry out high speed processing of the device with a less number of lithography shots as well as an apparatus therefor. An input pattern is classified into repetitive and non-repetitive patterns. The classified non-repetitive pattern is further classified into unit areas, i.e., repetitive and no-repetitive unit patterns. Next, the non-repetitive unit patterns are converted into lithography data, while the repetitive unit patterns and repetitive patterns are composed on the lithography data of the non-repetitive unit patterns. A result of composing the repetitive unit patterns and repetitive patterns and the lithography data of the non-repetitive unit patterns is sorted according to a lithography sequence and output as the lithography data. Thus, the repetitive unit areas are extracted from the non-repetitive patterns and processed in the same manner as the repetitive patterns to thereby reduce the number of lithography shots.
Inventors
- 👤 Yukinobu Shibata
- 👤 Akira Hirakawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:48
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; H01J37/3026; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31761; H01J2237/31764
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
113 words
An electron beam lithography method for irradiating an electron beam onto a lithography object to delineate patterns thereon, comprising the steps of: classifying input data of patterns to be delineated into repetitive and non-repetitive patterns; selecting one of pre-registered unit patterns corresponding to said classified repetitive pattern; dividing said classified non-repetitive pattern into predetermined unit areas; classifying said divided unit areas into repetitive and non-repetitive unit areas; selecting one of pre-registered unit area patterns corresponding to said classified repetitive unit area; composing said selected unit patterns, said unit area patterns and said non-repetitive unit areas to form lithography data; and delineating patterns on said lithography object on the basis of said lithography data.
Claim 2
Dependent Claim
113 words
An electron beam lithography method for irradiating an electron beam onto a lithography object to delineate patterns thereon, comprising the steps of: classifying input data of patterns to be delineated into repetitive and non-repetitive patterns; selecting one of pre-registered unit patterns corresponding to said classified repetitive pattern; dividing said classified non-repetitive pattern into predetermined unit areas; classifying said divided unit areas into repetitive and non-repetitive unit areas; selecting one of pre-registered unit area patterns corresponding to said classified repetitive unit area; composing said selected unit patterns, said unit area patterns and said non-repetitive unit areas to form lithography data; and delineating patterns on said lithography object on the basis of said lithography data.
Claim 3
Dependent Claim
64 words
An electron beam lithography method according to claim 1, further comprising the steps of, judging whether or not the number of said classified repetitive patterns is larger than or equal to a predetermined repetition number, and further classifying said classified repetitive patterns as non-repetitive patterns when it is judged that the number of said classified repetitive patterns is smaller than said predetermined repetition number.
Claim 4
Dependent Claim
30 words
An electron beam lithography method according to claim 1, wherein said repetitive unit area corresponds to a linear part of a wiring pattern, said linear part having a predetermined length.
Claim 5
Dependent Claim
23 words
An electron beam lithography method according to claim 1, wherein said repetitive unit area corresponds to a corner part of a wiring pattern.
Claim 6
Dependent Claim
128 words
An electron beam lithography apparatus for irradiating an electron beam onto a lithography object to delineate patterns thereon, comprising: lithography data preparation means for classifying input data of patterns to be delineated into repetitive and non-repetitive patterns, selecting one of pre-registered unit patterns corresponding to said classified repetitive pattern, dividing said classified non-repetitive pattern into predetermined unit areas, classifying said divided unit areas into repetitive and non-repetitive unit areas, selecting one of pre-registered unit area patterns corresponding to said classified repetitive unit area; means for composing said selected unit patterns, said unit area patterns and said non-repetitive unit areas to form said lithography data; and electron beam control means for controlling said electron beam to be irradiated onto said lithography object on the basis of said lithography data.
Claim 7
Dependent Claim
128 words
An electron beam lithography apparatus for irradiating an electron beam onto a lithography object to delineate patterns thereon, comprising: lithography data preparation means for classifying input data of patterns to be delineated into repetitive and non-repetitive patterns, selecting one of pre-registered unit patterns corresponding to said classified repetitive pattern, dividing said classified non-repetitive pattern into predetermined unit areas, classifying said divided unit areas into repetitive and non-repetitive unit areas, selecting one of pre-registered unit area patterns corresponding to said classified repetitive unit area; means for composing said selected unit patterns, said unit area patterns and said non-repetitive unit areas to form said lithography data; and electron beam control means for controlling said electron beam to be irradiated onto said lithography object on the basis of said lithography data.
Claim 8
Dependent Claim
64 words
An electron beam lithography apparatus according to claim 5, wherein said lithography data preparation means judges whether or not the number of said classified repetitive patterns is larger than or equal to a predetermined repetition number, further classifying said classified repetitive patterns as non-repetitive patterns when it is judged that the number of said classified repetitive patterns is smaller than said predetermined repetition number.
Claim 9
Dependent Claim
128 words
An electron beam lithography apparatus for irradiating an electron beam onto a lithography object to delineate patterns thereon, comprising: a pattern selector for sorting input data of patterns to be delineated into repetitive and non-repetitive patterns, choosing one of pre-registered unit patterns corresponding to said repetitive pattern, dividing said non-repetitive pattern into predetermined unit areas, sorting said divided unit areas into repetitive and non-repetitive unit areas, choosing one of pre-registered unit area patterns corresponding to said sorted repetitive unit area; a lithography data generator for combining said chosen unit patterns, said unit area patterns and said non-repetitive unit areas to generate said lithography data; and an electron beam controller for controlling said electron beam to be irradiated onto said lithography object on the basis of said lithography data.
Claim 10
Dependent Claim
128 words
An electron beam lithography apparatus for irradiating an electron beam onto a lithography object to delineate patterns thereon, comprising: a pattern selector for sorting input data of patterns to be delineated into repetitive and non-repetitive patterns, choosing one of pre-registered unit patterns corresponding to said repetitive pattern, dividing said non-repetitive pattern into predetermined unit areas, sorting said divided unit areas into repetitive and non-repetitive unit areas, choosing one of pre-registered unit area patterns corresponding to said sorted repetitive unit area; a lithography data generator for combining said chosen unit patterns, said unit area patterns and said non-repetitive unit areas to generate said lithography data; and an electron beam controller for controlling said electron beam to be irradiated onto said lithography object on the basis of said lithography data.
Claim 11
Dependent Claim
30 words
An electron beam lithography method according to claim 2, wherein said repetitive unit area corresponds to a linear part of a wiring pattern, said linear part having a predetermined length.
Claim 12
Dependent Claim
23 words
An electron beam lithography method according to claim 2, wherein said repetitive unit area corresponds to a corner part of a wiring pattern.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-05 | 1998-06-06 | 1998-12-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-05 | 2002-06-06 | 2002-12-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-05 | 2006-06-06 | 2006-12-06 | $7700.00 | Window Closed / Lapsed |