US5082762A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Charged particle beam exposure method
Assignee: Fujitsu Semiconductor Ltd
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Filing: 1989-10-23
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Granted: 1992-01-21
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Expires: 2009-10-23
Abstract
Abstract A method for selectively exposing a resist layer using a charged particle beam to form a desired pattern. The method includes the steps of repeatedly exposing a basic pattern segment using a charged particle beam so as to expose a pattern within a first predetermined region of the resist layer by a main exposure. The pattern within the first predetermined region is a multiple repetition of the basic pattern segment. A second predetermined region of the layer is exposed by auxiliary exposure at an intensity level lower than that of the main exposure. The second predetermined region excludes the central portions of the first predetermined region and includes a region in which a proximity effect occurs due to the main exposure.
Inventors
- 👤 Yasushi Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 18:37
CPC Classifications
B; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F7/00; G03F7/20; G03F7/2022; H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31769; H01J2237/31771; Y; Y10; Y10S; Y10S430/00; Y10S430/167; Y10S430/168
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
131 words
A charged particle beam exposure method for selectively exposing a resist layer by use of a charged particle beam to form a desired pattern, said charged particle beam exposure method comprising the steps of: repeatedly projecting a basic pattern segment using a charged particle beam so as to expose a pattern within a first predetermined region of the resist layer by a main exposure, said pattern within said first predetermined region being a multiple repetition of the basic pattern segment; and exposing a second predetermined region of the layer using an auxiliary exposure at a lower intensity level than that of said main exposure, said second predetermined region excluding the central portions of said first predetermined region and including marginal portions wherein the proximity effect occurs due to said main exposure.
Claim 2
Dependent Claim
131 words
A charged particle beam exposure method for selectively exposing a resist layer by use of a charged particle beam to form a desired pattern, said charged particle beam exposure method comprising the steps of: repeatedly projecting a basic pattern segment using a charged particle beam so as to expose a pattern within a first predetermined region of the resist layer by a main exposure, said pattern within said first predetermined region being a multiple repetition of the basic pattern segment; and exposing a second predetermined region of the layer using an auxiliary exposure at a lower intensity level than that of said main exposure, said second predetermined region excluding the central portions of said first predetermined region and including marginal portions wherein the proximity effect occurs due to said main exposure.
Claim 3
Dependent Claim
40 words
The charged particle beam exposure method as claimed in claim 1 wherein said step of exposing the second region to auxiliary exposure includes exposing the second predetermined region to an electromagnetic wave beam transmitted through a photo or optical mask.
Claim 4
Dependent Claim
20 words
The charged particle beam exposure method as claimed in claim 1 wherein said first predetermined region has a rectangular shape.
Claim 5
Dependent Claim
62 words
The charged particle beam exposure method as claimed in claim 3 wherein said second predetermined region comprises a first portion which is located at a first side of said first predetermined region and a second portion which is located at a second side of said first predetermined region, said first and second sides being mutually confronting sides of said first predetermined region.
Claim 6
Dependent Claim
38 words
The charged particle beam exposure method as claimed in claim 3 wherein said second predetermined region has a hollow rectangular shape presenting an inner peripheral portion that partially overlaps an outer peripheral portion of said first predetermined region.
Claim 7
Dependent Claim
39 words
The charged particle beam exposure method as claimed in claim 5 wherein the width of said second predetermined region between the outer and inner peripheral edges thereof is selected in correspondence with the pattern within said first predetermined region.
Claim 8
Dependent Claim
31 words
The charged particle beam exposure method as claimed in claim 5 wherein the outer peripheral edge of said second predetermined region coincides with the outer peripheral edge of a semiconductor chip.
Claim 9
Dependent Claim
35 words
The charged particle beam exposure method as claimed in claim 1 wherein said second predetermined region has a peripheral edge which coincides with an outer peripheral edge of the pattern within said first predetermined region.
Claim 10
Dependent Claim
24 words
The charged particle beam exposure method as claimed in claim 8 wherein said second predetermined region excludes the pattern within said first predetermined region.
Claim 11
Dependent Claim
25 words
The charged particle beam exposure method as claimed in claim 8 wherein said second predetermined region partially overlaps the pattern within said first predetermined region.
Claim 12
Dependent Claim
36 words
The charged particle beam exposure method as claimed in claim 1 wherein said second predetermined region has a peripheral edge which approximately coincides with an outer peripheral edge of the pattern within said first predetermined region.
Claim 13
Dependent Claim
24 words
The charged particle beam exposure method as claimed in claim 11 wherein said second predetermined region excludes the pattern within said first predetermined region.
Claim 14
Dependent Claim
25 words
The charged particle beam exposure method as claimed in claim 11 wherein said second predetermined region partially overlaps the pattern within said first predetermined region.
Claim 15
Dependent Claim
46 words
The charged particle beam exposure method as claimed in claim 1 wherein said second predetermined region has an inner peripheral edge which is positioned to present a predetermined gap between said inner edge and an outer peripheral edge of the pattern within said first predetermined region.
Claim 16
Dependent Claim
24 words
The charged particle beam exposure method as claimed in claim 14 wherein said second predetermined region excludes the pattern within said first predetermined region.
Claim 17
Dependent Claim
25 words
The charged particle beam exposure method as claimed in claim 14 wherein said second predetermined region partially overlaps the pattern within said first predetermined region.
Claim 18
Dependent Claim
32 words
The charged particle beam exposure method as claimed in claim 1 wherein the intensity level of the auxiliary exposure decreases in a direction toward said control portions of said first predetermined region.
Claim 19
Dependent Claim
53 words
The charged particle beam exposure method as claimed in claim 1 wherein said step of repeatedly exposing the basic pattern segment includes the step of exposing the basic pattern segment onto a substrate which has a resist layer formed thereon, said substrate being adapted for use in the production of a semiconductor device.
Claim 20
Dependent Claim
50 words
The charged particle beam exposure method as claimed in claim 1 wherein said step of repeatedly exposing the basic pattern segment includes the step of exposing the basic pattern segment onto a substrate which has the resist layer formed thereon, said substrate being adapted for use in producing a reticle.
Claim 21
Dependent Claim
50 words
The charged particle beam exposure method as claimed in claim 1 wherein said step of repeatedly exposing the basic pattern segment includes the step of exposing the basic pattern segment onto a substrate which has the resist layer formed thereon, said substrate being adapted for use in producing a mask.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-20 | 1995-07-22 | 1996-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-20 | 1999-07-22 | 2000-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-20 | 2003-07-22 | 2004-01-21 | $7700.00 | Window Closed / Lapsed |