Method of producing diffraction grating

Claim 1

A method of producing a λ/4-shifted diffraction grating utilizing a two-luminous-flux interference exposure method comprising: applying a positive type photoresist to a substrate in a thickness such that the surface of the photoresist is positioned in the vicinity of the node of the nodes of a standing wave light intensity distribution in the thickness direction of the photoresist that is nearest the substrate, the standing wave light intensity distribution being produced by interference between light incident on the photoresist and light within the photoresist that is reflected by the substrate; exposing said positive type photoresist, with an interference pattern produced by two interfering light beams; developing said positive type photoresist to form a pattern of said photoresist comprising a plurality of photoresist film regions each region having an over-hanging portion wherein the substrate is exposed between the regions; depositing an insulating film on the photoresist pattern and on the exposed substrate; forming a first protective resist on a portion of the photoresist pattern; removing the portion of said insulating film that is not covered by the first protective resist; etching a portion of the substrate using the portion of the photoresist pattern that is not covered by the first protective resist as a mask to form a periodic pattern of grooves in a first portion of the substrate; removing the photoresist pattern together with the first protective resist and the insulating film on the photoresist pattern by lift-off, leaving the insulating film on the substrate; selectively forming a second protective resist on the etched portion of the substrate; and etching a portion of the substrate using the insulating film on the substrate as a mask, thereby forming a periodic pattern of grooves in a second portion of the substrate having a phase that is reversed with respect to the periodic pattern of grooves in the first portion of the substrate, the first portion being covered by the second protective resist.

Claim 2

A method of producing a λ/4-shifted diffraction grating utilizing a two-luminous-flux interference exposure method comprising: applying a positive type photoresist to a substrate in a thickness such that the surface of the photoresist is positioned in the vicinity of the node of the nodes of a standing wave light intensity distribution in the thickness direction of the photoresist that is nearest the substrate, the standing wave light intensity distribution being produced by interference between light incident on the photoresist and light within the photoresist that is reflected by the substrate; exposing said positive type photoresist, with an interference pattern produced by two interfering light beams; developing said positive type photoresist to form a pattern of said photoresist comprising a plurality of photoresist film regions each region having an over-hanging portion wherein the substrate is exposed between the regions; depositing an insulating film on the photoresist pattern and on the exposed substrate; forming a first protective resist on a portion of the photoresist pattern; removing the portion of said insulating film that is not covered by the first protective resist; etching a portion of the substrate using the portion of the photoresist pattern that is not covered by the first protective resist as a mask to form a periodic pattern of grooves in a first portion of the substrate; removing the photoresist pattern together with the first protective resist and the insulating film on the photoresist pattern by lift-off, leaving the insulating film on the substrate; selectively forming a second protective resist on the etched portion of the substrate; and etching a portion of the substrate using the insulating film on the substrate as a mask, thereby forming a periodic pattern of grooves in a second portion of the substrate having a phase that is reversed with respect to the periodic pattern of grooves in the first portion of the substrate, the first portion being covered by the second protective resist.

Claim 3

A method of producing a λ/4-shifted diffraction grating utilizing a two-luminous-flux interference exposure method comprising: applying a positive type photoresist to a substrate in a thickness such that the surface of the photoresist is positioned in the vicinity of the node of the nodes of a standing wave light intensity distribution in the thickness direction of the photoresist that is nearest the substrate, the standing wave light intensity distribution being produced by interference between light incident on the photoresist and light within the photoresist that is reflected by the substrate; exposing said positive type photoresist, with an interference pattern produced by two interfering light beams; developing said positive type photoresist to form a pattern of said photoresist comprising a plurality of photoresist film regions each region having an over-hanging portion wherein the substrate is exposed between the regions; depositing an insulating film on a first portion of the photoresist pattern and on the exposed substrate at the first portion of the photoresist pattern while a second portion of the photoresist pattern is masked; forming a first protective resist on the photoresist pattern and the substrate on which the insulating film is present; etching the second portion of the substrate using the photoresist pattern not covered by the first protective resist as a mask to form a periodic pattern of grooves in the second portion of the substrate; removing the photoresist pattern together with the first protective resist and the insulating film on the photoresist pattern by lift-off, leaving the insulating film on the first portion of substrate; selectively forming a second protective resist on the etched, second portion of the substrate; and etching the first portion of the substrate using the insulating film remaining on the substrate as a mask, thereby forming a periodic pattern of grooves in the first portion of the substrate having a phase that is reversed with respect to the periodic pattern of grooves in the second portion of the substrate, the second portion being covered with the second protective resist.

Claim 4

A method of producing a λ/4-shifted diffraction grating utilizing a two-luminous-flux interference exposure method comprising: applying a positive type photoresist to a substrate in a thickness such that the surface of the photoresist is positioned in the vicinity of the node of the nodes of a standing wave light intensity distribution in the thickness direction of the photoresist that is nearest the substrate, the standing wave light intensity distribution being produced by interference between light incident on the photoresist and light within the photoresist that is reflected by the substrate; exposing said positive type photoresist, with an interference pattern produced by two interfering light beams; developing said positive type photoresist to form a pattern of said photoresist comprising a plurality of photoresist film regions each region having an over-hanging portion wherein the substrate is exposed between the regions; depositing an insulating film on a first portion of the photoresist pattern and on the exposed substrate at the first portion of the photoresist pattern while a second portion of the photoresist pattern is masked; forming a first protective resist on the photoresist pattern and the substrate on which the insulating film is present; etching the second portion of the substrate using the photoresist pattern not covered by the first protective resist as a mask to form a periodic pattern of grooves in the second portion of the substrate; removing the photoresist pattern together with the first protective resist and the insulating film on the photoresist pattern by lift-off, leaving the insulating film on the first portion of substrate; selectively forming a second protective resist on the etched, second portion of the substrate; and etching the first portion of the substrate using the insulating film remaining on the substrate as a mask, thereby forming a periodic pattern of grooves in the first portion of the substrate having a phase that is reversed with respect to the periodic pattern of grooves in the second portion of the substrate, the second portion being covered with the second protective resist.

Claim 5

A method of producing a λ/4-shifted diffraction grating utilizing a two-luminous-flux interference exposure method comprising: applying a negative type photoresist to a substrate in a thickness such that the surface of the photoresist is positioned in the vicinity of the antinode of the antinodes of a standing wave light intensity distribution in the thickness direction of the photoresist that is nearest the substrate, the standing wave light intensity distribution being produced by interference between light incident on the photoresist and light within the photoresist reflected by the substrate; exposing said negative type photoresist, with an interference pattern produced by two interfering light beams; developing said negative type photoresist to form a pattern of said photoresist comprising a plurality of photoresist film regions each region having an over-hanging portion wherein the substrate is exposed between the regions; depositing an insulating film on the photoresist pattern and on the exposed substrate; forming a first protective resist on a portion of the photoresist pattern; removing the portion of said insulating film that is not covered by the first protective resist; etching a portion of the substrate using the portion of the photoresist pattern that is not covered by the first protective resist as a mask to form a periodic pattern of grooves in a first portion of the substrate; removing the photoresist pattern together with the first protective resist and the insulating film on the photoresist pattern by lift-off, leaving the insulating film on the substrate; selectively forming a second protective resist on the etched portion of the substrate; and etching a portion of the substrate using the insulating film on the substrate as a mask, thereby forming a periodic pattern of grooves in a second portion of the substrate having a phase that is reversed with respect to the periodic pattern of grooves in the first portion of the substrate, the first portion being covered by the second protective resist.

Claim 6

A method of producing a λ/4-shifted diffraction grating utilizing a two-luminous-flux interference exposure method comprising: applying a negative type photoresist to a substrate in a thickness such that the surface of the photoresist is positioned in the vicinity of the antinode of the antinodes of a standing wave light intensity distribution in the thickness direction of the photoresist that is nearest the substrate, the standing wave light intensity distribution being produced by interference between light incident on the photoresist and light within the photoresist reflected by the substrate; exposing said negative type photoresist, with an interference pattern produced by two interfering light beams; developing said negative type photoresist to form a pattern of said photoresist comprising a plurality of photoresist film regions each region having an over-hanging portion wherein the substrate is exposed between the regions; depositing an insulating film on the photoresist pattern and on the exposed substrate; forming a first protective resist on a portion of the photoresist pattern; removing the portion of said insulating film that is not covered by the first protective resist; etching a portion of the substrate using the portion of the photoresist pattern that is not covered by the first protective resist as a mask to form a periodic pattern of grooves in a first portion of the substrate; removing the photoresist pattern together with the first protective resist and the insulating film on the photoresist pattern by lift-off, leaving the insulating film on the substrate; selectively forming a second protective resist on the etched portion of the substrate; and etching a portion of the substrate using the insulating film on the substrate as a mask, thereby forming a periodic pattern of grooves in a second portion of the substrate having a phase that is reversed with respect to the periodic pattern of grooves in the first portion of the substrate, the first portion being covered by the second protective resist.

Claim 7

A method of producing a λ/4-shifted diffraction grating utilizing a two-luminous-flux interference exposure method comprising: applying a negative type photoresist to a substrate in a thickness such that the surface of the photoresist is positioned in the vicinity of the antinode of the antinodes of a standing wave light intensity distribution in the thickness direction of the photoresist that is nearest the substrate, the standing wave light intensity distribution being produced by interference between light incident on the photoresist and light within the photoresist reflected by the substrate; exposing said negative type photoresist, with an interference pattern produced by two interfering light beams; developing said negative type photoresist to form a pattern of said photoresist comprising a plurality of photoresist film regions each region having an over-hanging portion wherein the substrate is exposed between the regions; depositing an insulating film on a first portion of the photoresist pattern and on the exposed substrate at the first portion of the photoresist pattern while a second portion of the photoresist pattern is masked; forming a first protective resist on the photoresist pattern and the substrate on which the insulating film is present; etching the second portion of the substrate using the photoresist pattern not covered by the first protective resist as a mask to form a periodic pattern of grooves in the second portion of the substrate; removing the photoresist pattern together with the first protective resist and the insulating film on the photoresist pattern by lift-off, leaving the insulating film on the first portion of substrate; selectively forming a second protective resist on the etched, second portion of the substrate; and etching the first portion of the substrate using the insulating film remaining on the substrate as a mask, thereby forming a periodic pattern of grooves in the first portion of the substrate having a phase that is reversed with respect to the periodic pattern of grooves in the second portion of the substrate, the second portion being covered with the second protective resist.

Claim 8

A method of producing a λ/4-shifted diffraction grating utilizing a two-luminous-flux interference exposure method comprising: applying a negative type photoresist to a substrate in a thickness such that the surface of the photoresist is positioned in the vicinity of the antinode of the antinodes of a standing wave light intensity distribution in the thickness direction of the photoresist that is nearest the substrate, the standing wave light intensity distribution being produced by interference between light incident on the photoresist and light within the photoresist reflected by the substrate; exposing said negative type photoresist, with an interference pattern produced by two interfering light beams; developing said negative type photoresist to form a pattern of said photoresist comprising a plurality of photoresist film regions each region having an over-hanging portion wherein the substrate is exposed between the regions; depositing an insulating film on a first portion of the photoresist pattern and on the exposed substrate at the first portion of the photoresist pattern while a second portion of the photoresist pattern is masked; forming a first protective resist on the photoresist pattern and the substrate on which the insulating film is present; etching the second portion of the substrate using the photoresist pattern not covered by the first protective resist as a mask to form a periodic pattern of grooves in the second portion of the substrate; removing the photoresist pattern together with the first protective resist and the insulating film on the photoresist pattern by lift-off, leaving the insulating film on the first portion of substrate; selectively forming a second protective resist on the etched, second portion of the substrate; and etching the first portion of the substrate using the insulating film remaining on the substrate as a mask, thereby forming a periodic pattern of grooves in the first portion of the substrate having a phase that is reversed with respect to the periodic pattern of grooves in the second portion of the substrate, the second portion being covered with the second protective resist.