Patent US5367582A successfully refreshed from Google Patents.
US5367582A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vertically-coupled arrow modulators or switches on silicon
Assignee: Texas Instruments Inc
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Filing: 1993-07-30
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Granted: 1994-11-22
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Expires: 2013-07-30
Abstract
Abstract An optical modulator is disclosed. The modulator is based upon an ARROW waveguide, consisting of a substrate, a lower cladding, an interference layer, and a core layer. An electronic element is formed in the structure to control the free-carrier concentration in the interference layer. The light is coupled by grating into the interference layer, where the free-carrier concentration is controlled by the element, which in turn controls the modulation of the light in the interference layer before it is coupled back to the core layer.
Inventors
- 👤 Gregory A. Magel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:11
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/011; G02F1/015; G02F1/025; G02F1/0151; G02F1/0152; G02F2201/00; G02F2201/06; G02F2201/063; G02F2201/30; G02F2201/302; G02F2202/00; G02F2202/10; G02F2202/101; G02F2202/105
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
76 words
An optical modulator comprising: a. a substrate; b. a lower cladding layer upon said substrate; c. an interference layer upon said lower cladding layer; d. a core layer upon said interference layer; e. at least one grating in said modulator operable to couple light between said core layer and said interference layer; and f. an element to control the free-carrier concentration of said interference layer, and subsequently to control the modulation of light in said layer.
Claim 2
Dependent Claim
76 words
An optical modulator comprising: a. a substrate; b. a lower cladding layer upon said substrate; c. an interference layer upon said lower cladding layer; d. a core layer upon said interference layer; e. at least one grating in said modulator operable to couple light between said core layer and said interference layer; and f. an element to control the free-carrier concentration of said interference layer, and subsequently to control the modulation of light in said layer.
Claim 3
Dependent Claim
12 words
The modulator as claimed in claim 1 wherein said substrate is silicon.
Claim 4
Dependent Claim
13 words
The modulator as claimed in claim 1 wherein said substrate is gallium arsenide.
Claim 5
Dependent Claim
14 words
The modulator as claimed in claim 1 wherein said lower cladding is silicon oxide.
Claim 6
Dependent Claim
15 words
The modulator as claimed in claim 1 wherein said lower cladding is aluminum gallium arsenide.
Claim 7
Dependent Claim
13 words
The modulator as claimed in claim 1 wherein said interference layer is silicon.
Claim 8
Dependent Claim
14 words
The modulator as claimed in claim 1 wherein said interference layer is gallium arsenide.
Claim 9
Dependent Claim
14 words
The modulator as claimed in claim 1 wherein said core layer is silicon oxide.
Claim 10
Dependent Claim
15 words
The modulator as claimed in claim 1 wherein said core layer is aluminum gallium arsenide.
Claim 11
Dependent Claim
13 words
The modulator as claimed in claim 1 wherein said element is a transistor.
Claim 12
Dependent Claim
14 words
The modulator as claimed in claim 1 wherein said element is a p-i-n diode.
Claim 13
Dependent Claim
16 words
The modulator as claimed in claim 1 wherein said element is constructed in said interference layer.
Claim 14
Dependent Claim
19 words
The modulator as claimed in claim 12 wherein contact with said element may be achieved through said core layer.
Claim 15
Dependent Claim
17 words
The modulator as claimed in claim 1 wherein said element is constructed in said lower cladding layer.
Claim 16
Dependent Claim
12 words
The modulator as claimed in claim 1 further comprising an upper cladding.
Claim 17
Dependent Claim
23 words
The modulator as claimed in claim 1 further comprising circuitry fabricated in said substrate, wherein said circuitry is capable of controlling said element.
Claim 18
Dependent Claim
16 words
The modulator as claimed in claim 1 wherein said at least one grating comprises two gratings.
Claim 19
Dependent Claim
24 words
The modulator as claimed in claim 1 said core further comprising a waveguide rib, said rib for transversely confining light traveling through said core.
Claim 20
Dependent Claim
171 words
An optical modulator comprising: a. a substrate; b. a dioxide lower cladding supported by said substrate: c. an interference layer supported by said cladding layer; d. a core layer at least twice the thickness of said lower cladding layer, said core layer supported by said interference layer, said core layer for guiding light, wherein said light has a mode, wherein the thickness of said interference layer is such that light having said mode that reflects off of an interface between said core layer and said interface layer, and light having said mode that reflects off of an interface between said lower cladding and said interference layer is in phase, and therefore constructively interferes; e. a first grating for coupling light from said core to said interference layer: f. a second grating for coupling light from said interference layer to said core: g. an element in electrical contact with said interference layer to control the free-carrier concentration of said interference layer, and subsequently to control the modulation of light in said layer.
Claim 21
Dependent Claim
171 words
An optical modulator comprising: a. a substrate; b. a dioxide lower cladding supported by said substrate: c. an interference layer supported by said cladding layer; d. a core layer at least twice the thickness of said lower cladding layer, said core layer supported by said interference layer, said core layer for guiding light, wherein said light has a mode, wherein the thickness of said interference layer is such that light having said mode that reflects off of an interface between said core layer and said interface layer, and light having said mode that reflects off of an interface between said lower cladding and said interference layer is in phase, and therefore constructively interferes; e. a first grating for coupling light from said core to said interference layer: f. a second grating for coupling light from said interference layer to said core: g. an element in electrical contact with said interference layer to control the free-carrier concentration of said interference layer, and subsequently to control the modulation of light in said layer.
Claim 22
Dependent Claim
12 words
The modulator as claimed in claim 19 wherein said substrate is silicon.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-21 | 1998-05-23 | 1998-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-21 | 2002-05-23 | 2002-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-21 | 2006-05-23 | 2006-11-22 | $7700.00 | Window Closed / Lapsed |