US5276748A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vertically-coupled arrow modulators or switches on silicon
Assignee: Texas Instruments Inc
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Filing: 1991-11-22
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Granted: 1994-01-04
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Expires: 2011-11-22
Abstract
Abstract An optical modulator is disclosed. The modulator is based upon an ARROW waveguide, consisting of a substrate, a lower cladding, an interference layer, and a core layer. An electronic element is formed in the structure to control the free-carrier concentration in the interference layer. The light is coupled by grating into the interference layer, where the free-carrier concentration is controlled by the element, which in turn controls the modulation of the light in the interference layer before it is coupled back to the core layer.
Inventors
- 👤 Gregory A. Magel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:54
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/011; G02F1/015; G02F1/025; G02F1/0151; G02F1/0152; G02F2201/00; G02F2201/06; G02F2201/063; G02F2201/30; G02F2201/302; G02F2202/00; G02F2202/10; G02F2202/101; G02F2202/105
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
80 words
A method for forming an optical modulator comprising: a. preparing a semiconductor substrate; b. building a lower cladding layer of a predetermined thickness upon said substrate; c. depositing an interference layer upon said lower cladding layer; d. depositing a core layer upon said interference layer; e. placing gratings in said modulator operable to couple light between said core layer and said interference layer; and f. forming an electronic element in said modulator to control free-carrier effects in said interference layer.
Claim 2
Independent Claim
80 words
A method for forming an optical modulator comprising: a. preparing a semiconductor substrate; b. building a lower cladding layer of a predetermined thickness upon said substrate; c. depositing an interference layer upon said lower cladding layer; d. depositing a core layer upon said interference layer; e. placing gratings in said modulator operable to couple light between said core layer and said interference layer; and f. forming an electronic element in said modulator to control free-carrier effects in said interference layer.
Claim 3
Dependent Claim
14 words
The method as claimed in claim 1 wherein said building step comprises thermal oxidation.
Claim 4
Dependent Claim
18 words
The method as claimed in claim 1 wherein said depositing an interference layer step comprises chemical vapor deposition.
Claim 5
Dependent Claim
18 words
The method as claimed in claim 1 wherein said placing step comprises patterning and etching said interference layer.
Claim 6
Dependent Claim
18 words
The method as claimed in claim 1 wherein said depositing a core layer step comprises chemical vapor deposition.
Claim 7
Dependent Claim
16 words
The method as claimed in claim 1 wherein said forming step comprises doping the interference layer.
Claim 8
Dependent Claim
16 words
The method as claimed in claim 6 wherein said forming step further comprises doping the substrate.
Claim 9
Dependent Claim
16 words
The method as claimed in claim 6 wherein said forming step further comprises depositing an electrode.
Claim 10
Dependent Claim
14 words
The method as claimed in claim 1 wherein said electronic element is a transistor.
Claim 11
Dependent Claim
14 words
The method as claimed in claim 1 wherein said electronic element is a diode.
Claim 12
Dependent Claim
12 words
The method as claimed in claim 1 wherein said substrate is silicon.
Claim 13
Dependent Claim
13 words
The method as claimed in claim 1 wherein said substrate is gallium arsenide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-03 | 1997-07-05 | 1998-01-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-03 | 2001-07-05 | 2002-01-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-03 | 2005-07-05 | 2006-01-04 | $7700.00 | Window Closed / Lapsed |