US5362372A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self cleaning collimator
Assignee: Applied Materials Inc
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Filing: 1993-06-11
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Granted: 1994-11-08
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Expires: 2013-06-11
Abstract
Abstract A self cleaning collimator is provided which avoids a buildup of deposited material such that the collimator does not become clogged, deposition rates remain constant and flakes of deposited material are not formed. The collimator is formed of a dielectric material. The collimator and the target are physically mounted in contact with one another. During a deposition process, a portion of the deposited material will unavoidably also be deposited onto the walls of the passages through the collimator. Eventually, the buildup of such deposited material will provide an electrical path from the deposited material to the target. When this occurs, the electrical path will allow the material deposited on the walls of the passages through the collimator to act as a portion of the target. This material will then be depleted as it is deposited onto the semiconductor wafer 112.
Inventors
- 👤 Avi Tepman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:54
CPC Classifications
C; C22; C22C; C22C29/00; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32798; H01J37/32853; H01J37/32862; C23; C23C; C23C14/00; C23C14/22; C23C14/34; H01J37/34; H01J37/3411; H01J37/3447; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3322; H01J2237/3327
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
80 words
A physical vapor deposition device comprising: a. a target of a material to be deposited onto a semiconductor wafer; b. means for sputtering the target for forming sputtered target material; and c. a collimator initially separable from the target, mounted to the target positioned between the target and the wafer, the collimator including a plurality of passages for filtering sputtered target material to allow only sputtered target material traveling within a prescribed range of angles to pass to the wafer.
Claim 2
Dependent Claim
80 words
A physical vapor deposition device comprising: a. a target of a material to be deposited onto a semiconductor wafer; b. means for sputtering the target for forming sputtered target material; and c. a collimator initially separable from the target, mounted to the target positioned between the target and the wafer, the collimator including a plurality of passages for filtering sputtered target material to allow only sputtered target material traveling within a prescribed range of angles to pass to the wafer.
Claim 3
Dependent Claim
31 words
The physical vapor deposition device according to claim 1 wherein any target material which is deposited onto the side walls of the passages through the collimator is recurrently and automatically removed.
Claim 4
Dependent Claim
18 words
The physical vapor deposition device according to claim 2 wherein the collimator is formed of a dielectric material.
Claim 5
Dependent Claim
47 words
The physical vapor deposition device according to claim 3 wherein sputtered target material is deposited onto the collimator forming an intermediate deposited layer such that periodically the intermediate deposited layer grows to a sufficient size to become electrically coupled to the target forming an extended target thereby.
Claim 6
Dependent Claim
16 words
The physical vapor deposition device according to claim 4 wherein the target is formed of Aluminum.
Claim 7
Dependent Claim
18 words
The physical vapor deposition device according to claim 4 wherein the target is formed of an Aluminum Alloy.
Claim 8
Dependent Claim
16 words
The physical vapor deposition device according to claim 4 wherein the target is formed of Titanium.
Claim 9
Dependent Claim
16 words
The physical vapor deposition device according to claim 4 wherein the target is formed of Tungsten.
Claim 10
Dependent Claim
21 words
The physical vapor deposition device according to claim 4 wherein the target is formed of a composite of Titanium and Tungsten.
Claim 11
Dependent Claim
87 words
A physical vapor deposition device for depositing material onto a semiconductor wafer comprising: a. a target of material to be deposited onto the wafer; b. means for sputtering the target material away from the target; c. a dielectric collimator mounted between the target and the wafer comprising a substantially planar plate of electrically nonconductive material having a finite thickness and a plurality of passages, the passages for allowing target material to pass therethrough in a direction toward the wafer wherein the collimator is mounted to the target.
Claim 12
Dependent Claim
87 words
A physical vapor deposition device for depositing material onto a semiconductor wafer comprising: a. a target of material to be deposited onto the wafer; b. means for sputtering the target material away from the target; c. a dielectric collimator mounted between the target and the wafer comprising a substantially planar plate of electrically nonconductive material having a finite thickness and a plurality of passages, the passages for allowing target material to pass therethrough in a direction toward the wafer wherein the collimator is mounted to the target.
Claim 13
Dependent Claim
16 words
The physical vapor deposition device according to claim 10 wherein the target is formed of Aluminum.
Claim 14
Dependent Claim
18 words
The physical vapor deposition device according to claim 10 wherein the target is formed of an Aluminum alloy.
Claim 15
Dependent Claim
16 words
The physical vapor deposition device according to claim 10 wherein the target is formed of Titanium.
Claim 16
Dependent Claim
16 words
The physical vapor deposition device according to claim 10 wherein the target is formed of Tungsten.
Claim 17
Dependent Claim
21 words
The physical vapor deposition device according to claim 10 wherein the target is formed of a composite of Titanium and Tungsten.
Claim 18
Dependent Claim
51 words
The physical vapor deposition device according to claim 10 wherein a portion of the sputtered target material is deposited onto the collimator forming an intermediate deposited layer such that periodically the intermediate deposited layer grows to a sufficient size to become electrically coupled to the target forming an extended target thereby.
Claim 19
Dependent Claim
123 words
A physical vapor deposition device for depositing material onto a semiconductor wafer comprising: a. a chamber; b. vacuum means coupled for evacuating the chamber of air; c. a target of material mounted in the chamber to be deposited onto the wafer; d. means for sputtering the target material and imparting kinetic energy to particles of the material; e. a pedestal mounted in the chamber for holding the wafer; and f. a dielectric collimator mounted to the target and positioned between the target and the wafer, the collimator comprising a substantially planar plate of electrically nonconductive material having a finite thickness and a plurality of passages, the passages for allowing the particles of the material to pass therethrough in a direction toward the wafer.
Claim 20
Dependent Claim
123 words
A physical vapor deposition device for depositing material onto a semiconductor wafer comprising: a. a chamber; b. vacuum means coupled for evacuating the chamber of air; c. a target of material mounted in the chamber to be deposited onto the wafer; d. means for sputtering the target material and imparting kinetic energy to particles of the material; e. a pedestal mounted in the chamber for holding the wafer; and f. a dielectric collimator mounted to the target and positioned between the target and the wafer, the collimator comprising a substantially planar plate of electrically nonconductive material having a finite thickness and a plurality of passages, the passages for allowing the particles of the material to pass therethrough in a direction toward the wafer.
Claim 21
Dependent Claim
49 words
The physical vapor deposition device according to claim 17 wherein target material traveling outside the prescribed range angles is deposited onto the collimator forming an intermediate deposited layer such that periodically the intermediate deposited layer grows sufficiently to become electrically coupled to the target forming an extended target thereby.
Claim 22
Dependent Claim
16 words
The physical vapor deposition device according to claim 17 wherein the target is formed of Aluminum.
Claim 23
Dependent Claim
18 words
The physical vapor deposition device according to claim 17 wherein the target is formed of an Aluminum alloy.
Claim 24
Dependent Claim
16 words
The physical vapor deposition device according to claim 17 wherein the target is formed of Titanium.
Claim 25
Dependent Claim
16 words
The physical vapor deposition device according to claim 17 wherein the target is formed of Tungsten.
Claim 26
Dependent Claim
21 words
The physical vapor deposition device according to claim 17 wherein the target is formed of a composite of Titanium and Tungsten.
Claim 27
Independent Claim
67 words
A method of sputtering target material onto a semiconductor wafer comprising the steps of: a. sputtering the target material from the target through an electrically insulating collimator and depositing target material onto the wafer and the collimator; b. as the target material is deposited onto the collimator forming a buildup thereby, electrically coupling the buildup to the target; and c. sputtering the target material from the buildup.
Claim 28
Independent Claim
67 words
A method of sputtering target material onto a semiconductor wafer comprising the steps of: a. sputtering the target material from the target through an electrically insulating collimator and depositing target material onto the wafer and the collimator; b. as the target material is deposited onto the collimator forming a buildup thereby, electrically coupling the buildup to the target; and c. sputtering the target material from the buildup.
Claim 29
Dependent Claim
26 words
The method according to claim 24 wherein the step of electrically coupling the buildup to the target is accomplished by mounting the collimator to the target.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-07 | 1998-05-09 | 1998-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-07 | 2002-05-09 | 2002-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-07 | 2006-05-09 | 2006-11-08 | $7700.00 | Window Closed / Lapsed |