Autofocusing device and projection exposure apparatus with the same

Claim 2

An autofocusing device for bringing a surface of a substrate, placed at a predetermined station, into focus with a focal plane of a projection optical system, said device comprising: a holder for holding the substrate and being movable substantially along the focal plane of said projection optical system so as to move the substrate to said predetermined station, wherein said holder displaces the substrate along an optical axis of said projection optical system; a detecting system for detecting a deviation of the surface of the substrate with respect to the focal plane, said detecting system detecting the position of the surface of the substrate during movement of said holder substantially along the focal plane of said projection optical system and before the substrate, being moved by said holder, is moved up to said predetermined station; and an adjusting system for adjusting a positional relationship between the focal plane of the substrate on the basis of the detection by said detecting system, so as to bring the focal plane of said projection optical system and the surface of the substrate into substantial coincidence with each other, wherein said adjusting system comprises driving means for actuating said holder to cause displacement of the substrate along the optical axis of said projection optical system, and said driving means (i) actuates said holder to start the displacement of the substrate along the optical axis of said projection optical system, during the movement of said holder and before the substrate, being moved by said holder substantially along the focal plane of said projection optical system, is moved up to said predetermined station, and (ii) completes the displacement of the substrate along the optical axis of said projection optical system for substantial coincidence of the surface of the substrate with the focal plane of said projection optical system, during movement of said holder for moving the substrate to said predetermined station.

Claim 3

A device according to claim 1, wherein said detecting system detects the position and inclination of the surface of the substrate with respect to the focal plane of said projection optical system.

Claim 4

A device according to claim 1, wherein said driving means actuates said holder, after the substrate is moved up to said predetermined station, to start the displacement of the substrate along the optical axis of said projection optical system for substantial coincidence of the surface of the substrate with the focal plane of said projection optical system.

Claim 5

A device according to claim 1, wherein said driving means operates to complete the displacement of the substrate along the optical axis of said projection optical system for substantial coincidence of the surface of the substrate with the focal plane of said projection optical system, during movement of said holder for moving the substrate to said predetermined station.

Claim 6

A step-and-repeat exposure apparatus with a projection optical system, for placing different portions of a wafer sequentially at a predetermined station, adjacent to a focal plane of said projection optical system, and for projecting a radiation beam to each portion of the wafer, placed at said predetermined station, through said projection optical system to thereby print a pattern on that portion of the wafer, said apparatus comprising: a wafer stage for holding the wafer and being movable substantially along the focal plane of said projection optical system so as to move each portion of the wafer to said predetermined station, sequentially, wherein said wafer stage displaces the wafer along an optical axis of said projection optical system; a detecting device for detecting a deviation of a surface of a particular portion of the wafer with respect to the focal plane of said projection optical system, said detecting device being adapted to detect the position of the surface of the particular portion of the wafer during movement of said wafer stage substantially along the focal plane of said projection optical system and before the particular portion of the substrate, being moved by said wafer stage, is moved up to said predetermined station, wherein said detecting device detects the position and inclination of the surface of the particular portion of the wafer with respect to the focal plane of said projection optical system; and an adjusting device for adjusting a positional relationship between the focal plane of said projection optical system and the surface of the particular portion of the substrate on the basis of the detection by said detecting device, so as to bring the focal plane of said projection optical system and the surface of the particular portion of the substrate into substantial coincidence with each other, wherein said adjusting device comprises driving means for actuating said wafer stage to cause displacement of the wafer along the optical axis of said projection optical system, and said driving means (i) actuates said wafer stage to start the displacement of the wafer along the optical axis of said projection optical system, during movement of said wafer stage and before the particular portion of the wafer, being moved by said wafer stage substantially along the focal plane of said projection optical system, is moved up to said predetermined station, and (ii) completes the displacement of the wafer along the optical axis of said projection optical system for substantial coincidence of the surface of the particular portion of the wafer with the focal plane of said projection optical system, during movement of said wafer stage for moving the particular portion of the wafer to said predetermined station.

Claim 7

A step-and-repeat exposure apparatus with a projection optical system, for placing different portions of a wafer sequentially at a predetermined station, adjacent to a focal plane of said projection optical system, and for projecting a radiation beam to each portion of the wafer, placed at said predetermined station, through said projection optical system to thereby print a pattern on that portion of the wafer, said apparatus comprising: a wafer stage for holding the wafer and being movable substantially along the focal plane of said projection optical system so as to move each portion of the wafer to said predetermined station, sequentially, wherein said wafer stage displaces the wafer along an optical axis of said projection optical system; a detecting device for detecting a deviation of a surface of a particular portion of the wafer with respect to the focal plane of said projection optical system, said detecting device being adapted to detect the position of the surface of the particular portion of the wafer during movement of said wafer stage substantially along the focal plane of said projection optical system and before the particular portion of the substrate, being moved by said wafer stage, is moved up to said predetermined station, wherein said detecting device detects the position and inclination of the surface of the particular portion of the wafer with respect to the focal plane of said projection optical system; and an adjusting device for adjusting a positional relationship between the focal plane of said projection optical system and the surface of the particular portion of the substrate on the basis of the detection by said detecting device, so as to bring the focal plane of said projection optical system and the surface of the particular portion of the substrate into substantial coincidence with each other, wherein said adjusting device comprises driving means for actuating said wafer stage to cause displacement of the wafer along the optical axis of said projection optical system, and said driving means (i) actuates said wafer stage to start the displacement of the wafer along the optical axis of said projection optical system, during movement of said wafer stage and before the particular portion of the wafer, being moved by said wafer stage substantially along the focal plane of said projection optical system, is moved up to said predetermined station, and (ii) completes the displacement of the wafer along the optical axis of said projection optical system for substantial coincidence of the surface of the particular portion of the wafer with the focal plane of said projection optical system, during movement of said wafer stage for moving the particular portion of the wafer to said predetermined station.

Claim 8

An apparatus according to claim 5, wherein said projection optical system is adapted to project an image of a circuit pattern of an original onto the focal plane.

Claim 9

An apparatus according to claim 5, wherein said driving means actuates said wafer stage, after the particular portion of the wafer is moved up to said predetermined station, to start the displacement of the wafer along the optical axis of said projection optical system for substantial coincidence of the surface of the particular portion of the wafer with the focal plane of said projection optical system.

Claim 10

An apparatus according to claim 5, wherein said detecting device comprises a sensor for optically detecting level of the surface of the particular portion of the wafer.

Claim 11

An apparatus according to claim 8, wherein said detecting device is arranged to optically detect the level of the surface of the particular portion of the wafer as that portion of the wafer, being moved by said wafer stage, is at a position 5-100 microns short of said predetermined station.

Claim 12

An apparatus according to claim 8, wherein said detecting device repeats the optical detection for the level of the surface of the particular portion of the wafer before that portion of the wafer is moved up to said predetermined station.

Claim 13

In a focusing method wherein a substrate is moved substantially along a focal plane of a projection optical system up to a predetermined station adjacent to the focal plane of the projection optical system and then, at the predetermined station, the surface of the substrate is brought into substantial coincidence with the focal plane of the projection optical system, the improvement comprising the steps of: detecting a deviation of the surface of the substrate with respect to the focal plane of the projection optical system, before the substrate, being moved substantially along the focal plane of the projection optical system, is moved up to the predetermined station; and substantially correcting the deviation on the basis of the detection, wherein said correcting step is executed during the movement of the substrate to the predetermined station, and is accomplished before the substrate, being moved, is moved up to the predetermined station.

Claim 14

In a focusing method wherein a substrate is moved substantially along a focal plane of a projection optical system up to a predetermined station adjacent to the focal plane of the projection optical system and then, at the predetermined station, the surface of the substrate is brought into substantial coincidence with the focal plane of the projection optical system, the improvement comprising the steps of: detecting a deviation of the surface of the substrate with respect to the focal plane of the projection optical system, before the substrate, being moved substantially along the focal plane of the projection optical system, is moved up to the predetermined station; and substantially correcting the deviation on the basis of the detection, wherein said correcting step is executed during the movement of the substrate to the predetermined station, and is accomplished before the substrate, being moved, is moved up to the predetermined station.

Claim 15

A method according to claim 11, wherein, for said substantial correction of the deviation, the substrate is displaced along an optical axis of the projection optical system.

Claim 16

A method according to claim 11, wherein, for said substantial correction of the deviation, the focal plane of the projection optical system is shifted along an optical axis of the projection optical system.

Claim 17

In a semiconductor device manufacturing method wherein a wafer is moved substantially along a focal plane of a projection optical system to place different portions of the wafer sequentially at a predetermined station, adjacent to the focal plane of the projection optical system, and wherein, at the predetermined station, each portion of the wafer is brought into substantial coincidence with the focal plane of the projection optical system and then a radiation beam is projected to that portion of the wafer through the projection optical system to print a pattern on that portion of the wafer, the improvement comprising the steps of: detecting a deviation of the surface of a particular portion of the wafer with respect to the focal plane of the projection optical system, before the particular portion of the wafer, being moved substantially along the focal plane of the projection optical system, is moved up to the predetermined station; and substantially correcting the deviation on the basis of the detection, wherein said correcting step is executed during the movement of the particular portion of the wafer to the predetermined station, and is accomplished before the particular portion of the wafer, being moved, is moved up to the predetermined station.

Claim 18

In a semiconductor device manufacturing method wherein a wafer is moved substantially along a focal plane of a projection optical system to place different portions of the wafer sequentially at a predetermined station, adjacent to the focal plane of the projection optical system, and wherein, at the predetermined station, each portion of the wafer is brought into substantial coincidence with the focal plane of the projection optical system and then a radiation beam is projected to that portion of the wafer through the projection optical system to print a pattern on that portion of the wafer, the improvement comprising the steps of: detecting a deviation of the surface of a particular portion of the wafer with respect to the focal plane of the projection optical system, before the particular portion of the wafer, being moved substantially along the focal plane of the projection optical system, is moved up to the predetermined station; and substantially correcting the deviation on the basis of the detection, wherein said correcting step is executed during the movement of the particular portion of the wafer to the predetermined station, and is accomplished before the particular portion of the wafer, being moved, is moved up to the predetermined station.

Claim 19

A method according to claim 14, wherein, for said substantial correction of the deviation, the wafer is displaced along an optical axis of the projection optical system.

Claim 20

A method according to claim 14, wherein, for said substantial correction of the deviation, the focal plane of the projection optical system is shifted along an optical axis of the projection optical system.

Claim 21

In a semiconductor device manufacturing method wherein a wafer is moved substantially along a focal plane of a projection optical system to place different portions of the wafer sequentially at a predetermined station, adjacent to the focal plane of the projection optical system, and wherein, at the predetermined station, each portion of the wafer is brought into substantial coincidence with the focal plane of the projection optical system and then a radiation beam is projected to that portion of the wafer through the projection optical system to print a pattern on that portion of the wafer, the improvement comprising the steps of: detecting a deviation of the surface of a particular portion of the wafer with respect to the focal plane of the projection optical system, before the particular portion of the wafer, being moved, is moved up to the predetermined station; and moving the wafer along an optical axis of the projection optical system in accordance with the detection of the deviation so as to substantially correct the deviation, wherein the substantial correction of the deviation is executed during the movement of the particular portion of the wafer to the predetermined station, and is accomplished before the particular portion of the wafer, being moved, is moved up to the predetermined station.

Claim 22

In a semiconductor device manufacturing method wherein a wafer is moved substantially along a focal plane of a projection optical system to place different portions of the wafer sequentially at a predetermined station, adjacent to the focal plane of the projection optical system, and wherein, at the predetermined station, each portion of the wafer is brought into substantial coincidence with the focal plane of the projection optical system and then a radiation beam is projected to that portion of the wafer through the projection optical system to print a pattern on that portion of the wafer, the improvement comprising the steps of: detecting a deviation of the surface of a particular portion of the wafer with respect to the focal plane of the projection optical system, before the particular portion of the wafer, being moved, is moved up to the predetermined station; and moving the wafer along an optical axis of the projection optical system in accordance with the detection of the deviation so as to substantially correct the deviation, wherein the substantial correction of the deviation is executed during the movement of the particular portion of the wafer to the predetermined station, and is accomplished before the particular portion of the wafer, being moved, is moved up to the predetermined station.