US4801977A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Projection optical apparatus
Assignee: Nikon Corp
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Filing: 1988-05-24
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Granted: 1989-01-31
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Expires: 2008-05-24
Abstract
Abstract A projection optical apparatus comprises a projection optical system for projecting the image of an object onto a substrate, data collecting means for obtaining data regarding a factor which causes a variation in the optical characteristic of the projection optical system, adjusting means for adjusting the relation between the substrate and the image of the object relative to the variation in the optical characteristic of the projection optical system, means for determining the amount of adjustment by the adjusting means in accordance with a model formula using a predetermined parameter on the basis of the data obtained by the data collecting means, means for independently measuring the variation in the optical characteristic of the projection optical system, and means for correcting the parameter of the model formula on the basis of the result measured by the measuring means.
Inventors
- 👤 Shoji Ishizaka
- 👤 Hideo Mizutani
- 👤 Susumu Makinouchi
- 👤 Akikazu Tanimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:16
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70591; G03F7/706; G03F7/70216; G03F7/70241; G03F7/708; G03F7/70858; G03F7/70883
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
138 words
A projection optical apparatus comprising: a projection optical system for projecting an image of an object onto a substrate; data collecting means for obtaining data regarding a factor which causes a variation in an optical characteristic of said projection optical system; adjusting means for adjusting a relation between said substrate and the image of said object relative to the variation in the optical characteristic of said projection optical system; means for determining an amount of adjustment by said adjusting means in accordance with a model formula using a predetermined parameter on the basis of said data obtained by said data collecting means; means for independently measuring the variation in the optical characteristic of said projection optical system; and means for correcting the parameter of said model formula on the basis of the result measured by said measuring means.
Claim 2
Dependent Claim
138 words
A projection optical apparatus comprising: a projection optical system for projecting an image of an object onto a substrate; data collecting means for obtaining data regarding a factor which causes a variation in an optical characteristic of said projection optical system; adjusting means for adjusting a relation between said substrate and the image of said object relative to the variation in the optical characteristic of said projection optical system; means for determining an amount of adjustment by said adjusting means in accordance with a model formula using a predetermined parameter on the basis of said data obtained by said data collecting means; means for independently measuring the variation in the optical characteristic of said projection optical system; and means for correcting the parameter of said model formula on the basis of the result measured by said measuring means.
Claim 3
Dependent Claim
28 words
A projection optical apparatus according to claim 1, wherein said data collecting means includes means for measuring an amount of light energy passing through said projection optical system.
Claim 4
Dependent Claim
19 words
A projection optical apparatus according to claim 1, wherein said adjusting means adjusts magnification of said projection optical system.
Claim 5
Dependent Claim
21 words
A projection optical apparatus according to claim 1, wherein said adjusting means adjusts a focusing position of said projection optical system.
Claim 6
Dependent Claim
139 words
A projection optical apparatus comprising: means for supplying light energy for illuminating an object; optical means employing light energy supplied from the illuminated object to form an image of said object on a substrate, an optical characteristic of said optical means being varied by the light energy supplied thereto; means for monitoring the light energy supplied to said optical means and producing monitoring data during each of successive predetermined periods; means for determining the optical characteristic of said optical means at each period, said determining means determining said optical characteristic at the end of any one of said periods on the basis of the optical characteristic at the end of the preceding period and monitoring data corresponding to the preceding period; and means for adjusting a relation between said image and said substrate in response to said determining means.
Claim 7
Dependent Claim
139 words
A projection optical apparatus comprising: means for supplying light energy for illuminating an object; optical means employing light energy supplied from the illuminated object to form an image of said object on a substrate, an optical characteristic of said optical means being varied by the light energy supplied thereto; means for monitoring the light energy supplied to said optical means and producing monitoring data during each of successive predetermined periods; means for determining the optical characteristic of said optical means at each period, said determining means determining said optical characteristic at the end of any one of said periods on the basis of the optical characteristic at the end of the preceding period and monitoring data corresponding to the preceding period; and means for adjusting a relation between said image and said substrate in response to said determining means.
Claim 8
Dependent Claim
22 words
A projection optical apparatus according to claim 5, wherein said monitoring means generates said monitoring data at the end of each period.
Claim 9
Dependent Claim
27 words
A projection optical apparatus according to claim 6, wherein said monitoring data represents an amount of light energy supplied to said optical means during the corresponding period.
Claim 10
Dependent Claim
32 words
A projection optical apparatus according to claim 7, wherein said supplying means includes means for supplying said light energy intermittently, and said monitoring data represents a duty ratio during said corresponding period.
Claim 11
Dependent Claim
50 words
A projection optical apparatus according to claim 6, wherein said supplying means includes means for supplying said light energy intermittently in intervals each longer than each predetermined period, and said monitoring data is binary data indicating presence or absence of the supplying of said light energy to said optical means.
Claim 12
Dependent Claim
39 words
A projection optical apparatus according to claim 6, wherein said determining means assumes in said one period that said light energy is not supplied to said optical means and estimates an optical property at the end of that period.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-31 | 1992-08-01 | 1993-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-31 | 1996-08-01 | 1997-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-31 | 2000-08-01 | 2001-01-31 | $7700.00 | Window Closed / Lapsed |