Patent FR1121640A successfully refreshed from Google Patents.
Patent US5359176A successfully refreshed from Google Patents.
US5359176A
Expired / Lapsed
US
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Optics and environmental protection device for laser processing applications
Assignee: International Business Machines Corp
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Filing: 1993-04-02
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Granted: 1994-10-25
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Expires: 2013-04-02
Abstract
Abstract An optics and environmental protection device for laser processing applications in which a laser processing assembly including a laser beam source is used to process a substrate. The laser processing assembly includes an optical focusing assembly including at least one lens located between the laser source and the substrate for focusing the laser beam on the substrate. The optics and environmental protection device includes a housing defining a chamber located between the optical focusing assembly and the substrate. The housing includes a first opening located adjacent to the optical focusing assembly for admitting the laser beam into the chamber, a second opening located adjacent to the substrate which allows the beam to exit the chamber, a third opening adjacent to which a source of pressurized gas is located, and a fourth opening adjacent to which a vacuum source is located. Pressurized gas and a vacuum source direct smoke, vapor, particles, and other debris produced by the laser processing away from the optical focusing assembly and the substrate and toward the fourth opening in the housing. The vacuum source also removes the smoke, vapor, and particles from the chamber.
Inventors
- 👤 Clifford M. Balliet, Jr.
- 👤 David E. Houser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 12:43
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/14; B23K26/1462; B23K26/1464; B23K26/1476; B23K26/08; B23K26/082; H; H05; H05K; H05K3/00; H05K3/0011; H05K3/0017
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
229 words
An optics and environmental protection device for laser processing applications in which a laser processing assembly including a laser beam source producing a laser beam is used to process a substrate, said laser processing assembly also including an optical focusing assembly including at least one lens located between said laser source and said substrate for focusing said laser beam on said substrate, said optics and environmental protection device comprising: a housing defining a chamber, said housing being located between said optical focusing assembly and said substrate, said housing including a first opening located adjacent to said optical focusing assembly and for admitting said laser beam into said chamber, a second opening located adjacent to said substrate for allowing said beam to exit said chamber, a third opening adjacent to which a source of pressurized gas is located, and a fourth opening adjacent to which a vacuum source is located, wherein said pressurized gas directs smoke, vapor, particles, and other debris produced by said laser processing away from said optical focusing assembly and said substrate and toward said fourth opening in said housing and said vacuum source directs said smoke, vapor, particles and other debris away from said optical focusing assembly and said substrate, toward said fourth opening in said housing and removes them from said chamber, said pressurized gas and said vacuum source creating a cross-flow through said chamber.
Claim 2
Dependent Claim
229 words
An optics and environmental protection device for laser processing applications in which a laser processing assembly including a laser beam source producing a laser beam is used to process a substrate, said laser processing assembly also including an optical focusing assembly including at least one lens located between said laser source and said substrate for focusing said laser beam on said substrate, said optics and environmental protection device comprising: a housing defining a chamber, said housing being located between said optical focusing assembly and said substrate, said housing including a first opening located adjacent to said optical focusing assembly and for admitting said laser beam into said chamber, a second opening located adjacent to said substrate for allowing said beam to exit said chamber, a third opening adjacent to which a source of pressurized gas is located, and a fourth opening adjacent to which a vacuum source is located, wherein said pressurized gas directs smoke, vapor, particles, and other debris produced by said laser processing away from said optical focusing assembly and said substrate and toward said fourth opening in said housing and said vacuum source directs said smoke, vapor, particles and other debris away from said optical focusing assembly and said substrate, toward said fourth opening in said housing and removes them from said chamber, said pressurized gas and said vacuum source creating a cross-flow through said chamber.
Claim 3
Dependent Claim
18 words
The optics and environmental protection device according to claim 1, wherein said housing is made of anodized aluminum.
Claim 4
Dependent Claim
21 words
The optics and environmental protection device according to claim 1, wherein said pressurized gas flows up to 300 feet per second.
Claim 5
Dependent Claim
23 words
The optics and environmental protection device according to claim 1, wherein said apparatus is used to drill up to 200 holes per second.
Claim 6
Dependent Claim
26 words
The optics and environmental protection device according to claim 1 also including means to receive and contain said smoke, vapor, and particles removed from said chamber.
Claim 7
Dependent Claim
29 words
The optics and environmental protection device according to claim 1, wherein said housing includes at least one wall having perforations formed therethrough for increasing gas flow into said chamber.
Claim 8
Dependent Claim
33 words
The optics and environmental protection device according to claim 1, wherein said housing includes a fifth opening and wherein a plate including a plurality of perforations formed therein is placed within said opening.
Claim 9
Dependent Claim
24 words
The optics and environmental protection device according to claim 7, wherein said plate is made of a material capable of withstanding stray laser reflections.
Claim 10
Dependent Claim
17 words
The optics and environmental protection device according to claim 8, wherein said plate is made of metal.
Claim 11
Dependent Claim
39 words
The optics and environmental protection device according to claim 1, wherein said housing includes a fifth opening located adjacent said second opening for increasing gas flow over said substrate adjacent where said laser beam is focused on said substrate.
Claim 12
Dependent Claim
46 words
The optics and environmental protection device according to claim 10, wherein at least one flow concentrator is placed adjacent said third opening to increase the flow of gas into said housing and at least one flow concentrator is placed adjacent said fifth opening in said housing.
Claim 13
Dependent Claim
38 words
The optics and environmental protection device according to claim 10, wherein said fifth opening is formed from an upward deformation of an edge of said second opening in said housing, said fifth and said second openings being continuous.
Claim 14
Dependent Claim
49 words
The optics and environmental protection device according to claim 1, wherein a thin polymer film is placed in the vicinity of said optical focusing assembly between said laser source and said substrate for preventing particles and debris produced by said laser processing from impacting with said optical focusing assembly.
Claim 15
Dependent Claim
15 words
The optics and environmental protection device according to claim 13, wherein said film is polyethylene.
Claim 16
Dependent Claim
24 words
The optics and environmental protection device according to claim 13, wherein said film is capable of withstanding up to 350,000 hits by said laser.
Claim 17
Dependent Claim
37 words
The optics and environmental protection device according to claim 13, wherein said thin polymer film is mounted on a film frame, said film frame being supported on a film and film frame support mounted on said housing.
Claim 18
Dependent Claim
15 words
The optics and environmental protection device according to claim 16, wherein said film is polyethylene.
Claim 19
Dependent Claim
80 words
The optics and environmental protection device according to claim 16, wherein: said film is a substantially circular sheet; said film frame is substantially circular and is rotatably mounted on said film support; said film support including a plurality of rollers including at least one each fixed guide roller, motorized drive roller, and spring-loaded guide roller, such that said film frame is movably engaged by said rollers, whereby said film at least partially extends into an opening in said protection housing.
Claim 20
Dependent Claim
23 words
The optics and environmental protection device according to claim 18, wherein said film and film frame rotate up to 1500 revolutions per minute.
Claim 21
Dependent Claim
25 words
The optics and environmental protection device according to claim 16, wherein said opening into which said film extends is said third opening in said chamber.
Claim 22
Dependent Claim
32 words
The optics and environmental protection device according to claim 16, wherein at least one flow concentrator is located adjacent said film for increasing gas flow into said housing and over said film.
Claim 23
Dependent Claim
22 words
The optics and environmental protection device according to claim 13, wherein said film moves linearly through the path of said laser beam.
Claim 24
Dependent Claim
44 words
The optics and environmental protection device according to claim 1, wherein said cross-flow is created in at least a portion of the space between said first and second openings in said chamber over an area at least substantially as large as said second opening.
Claim 25
Dependent Claim
17 words
The optics and environmental protection device according to claim 13, further comprising means for cooling said film.
Claim 26
Dependent Claim
24 words
The optics and environmental protection device according to claim 24, wherein said cooling means comprises at least one flow concentrator located adjacent said film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-24 | 1998-04-25 | 1998-10-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-24 | 2002-04-25 | 2002-10-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-24 | 2006-04-25 | 2006-10-25 | $7700.00 | Window Closed / Lapsed |