Process for producing electrode substrate

Claim 1

A process for producing an electrode substrate for use in a chiral smectic liquid crystal device comprising the steps of: (a) forming a laminate film comprising a transparent conductive film and a metal film on a first side of a glass substrate, which is transparent; (b) pattern-etching the laminate film for forming islands of the laminate film in a predetermined pattern; (c) etching portions of the glass substrate at portions between adjacent islands of the laminate film, for forming grooves in the portions of the glass substrate; (d) applying a photosensitive anaerobic colored resin having a thickness of 1 μm or more coated by a spin-coating process on the first side of the glass substrate on which the islands of laminated film are arranged in the predetermined pattern; (e) uniformly exposing the glass substrate to a light from a second side of the substrate, opposite to the first side, in an oxygen-containing atmosphere, a cured film thickness of said photosensitive resin formed by the exposure being determined to have a value substantially the same as the thickness of the laminate film in accordance with an amount of the exposure; (f) removing unexposed portions and uncured portions of the photosensitive anaerobic resin so as to leave the photosensitive anaerobic resin only in spaces between adjacent islands of the laminate film, for forming a light-shielding film in each of the spaces; and (g) etching the metal film of each of the laminate film islands to remove unnecessary portions of the metal film, so as to form electrodes along the edges of the transparent conductive film.