US5346729A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Solar-induced chemical vapor deposition of diamond-type carbon films
Assignee: Alliance for Sustainable Energy LLC
•
Filing: 1993-05-17
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Granted: 1994-09-13
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Expires: 2013-05-17
Abstract
Abstract An improved chemical vapor deposition method for depositing transparent continuous coatings of sp 3 -bonded diamond-type carbon films, comprising: a) providing a volatile hydrocarbon gas/H 2 reactant mixture in a cold wall vacuum/chemical vapor deposition chamber containing a suitable substrate for said films, at pressure of about 1 to 50 Torr; and b) directing a concentrated solar flux of from about 40 to about 60 watts/cm 2 through said reactant mixture to produce substrate temperatures of about 750° C. to about 950° C. to activate deposition of the film on said substrate.
Inventors
- 👤 J. Roland Pitts
- 👤 C. Edwin Tracy
- 👤 David E. King
- 👤 James T. Stanley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:19
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/44; C23C16/48; C23C16/481; Y; Y10; Y10S; Y10S427/00; Y10S427/103
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
94 words
A chemical vapor deposition method for depositing transparent continuous coatings of sp 3 -bonded diamond carbon film, comprising: a) providing a volatile hydrocarbon gas/ H 2 reactant mixture in a cold wall vacuum chemical vapor deposition chamber containing a substrate for said films, at pressures of from about 1 to about 50 Torr; and b) directing a concentrated solar flux of from about 40 to about 60 watts/cm 2 through said reactant mixture to produce substrate temperatures of about 750° C. to about 950° C. to activate deposition of the film on said substrate.
Claim 2
Dependent Claim
94 words
A chemical vapor deposition method for depositing transparent continuous coatings of sp 3 -bonded diamond carbon film, comprising: a) providing a volatile hydrocarbon gas/ H 2 reactant mixture in a cold wall vacuum chemical vapor deposition chamber containing a substrate for said films, at pressures of from about 1 to about 50 Torr; and b) directing a concentrated solar flux of from about 40 to about 60 watts/cm 2 through said reactant mixture to produce substrate temperatures of about 750° C. to about 950° C. to activate deposition of the film on said substrate.
Claim 3
Dependent Claim
11 words
The process of claim 1, wherein the volatile hydrocarbon is methane.
Claim 4
Dependent Claim
11 words
The process of claim 1, wherein the volatile hydrocarbon is ethane.
Claim 5
Dependent Claim
11 words
The process of claim 1, wherein the volatile hydrocarbon is ethylene.
Claim 6
Dependent Claim
35 words
The process of claim 2, wherein the substrate is Ni on which an interface layer selected from silicon nitride or silicon carbide has been interposed prior to providing said volatile hydrocarbon gas/H 2 reactant mixture.
Claim 7
Dependent Claim
11 words
The process of claim 2, wherein the substrate is polycrystalline silicon.
Claim 8
Dependent Claim
11 words
The process of claim 2, wherein the substrate is gallium arsenide.
Claim 9
Dependent Claim
13 words
The process of claim 2, wherein the substrate is a single crystalline silicon.
Claim 10
Dependent Claim
20 words
The process of claim 2, wherein the substrate is a polycrystalline silicon wafer prepolished with about 1 μm diamond powder.
Claim 11
Dependent Claim
19 words
The process of claim 2, wherein the methane is from about 1 to about 10% by volume in hydrogen.
Claim 12
Dependent Claim
11 words
The process of claim 1, wherein neopentane is substituted for hydrogen.
Claim 13
Dependent Claim
11 words
The process of claim 1, wherein neopentane is admixed with hydrogen.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-12 | 1998-03-14 | 1998-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-12 | 2002-03-14 | 2002-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-12 | 2006-03-14 | 2006-09-13 | $7700.00 | Window Closed / Lapsed |