US5345105A
Expired / Lapsed
US
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Structure for shielding conductors
Assignee: NXP USA Inc
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Filing: 1993-08-02
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Granted: 1994-09-06
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Expires: 2013-08-02
Abstract
Abstract A shielding structure (10) and method of formation. The shielding structure (10) has a substrate (12). A first dielectric layer (14) overlies the substrate (12). A conductive layer (16) is formed overlying the dielectric layer (14), is patterned, and is etched to form electrically isolated conductive regions from conductive layer (16). The electrically isolated conductive regions have sidewalls and the etching of conductive layer (16) exposes portions of dielectric layer (14). The exposed portions of dielectric layer (14) are etched to form trenched portions of dielectric layer (14). A second dielectric layer (18) is formed overlying the electrically isolated conductive regions, including the sidewalls, and overlying the trenched portions to create recessed regions that separate the electrically isolated conductive regions. A shielding conductive layer (20) is formed overlying dielectric layer (18) and at least partially fills the recessed regions to shield the electrically isolated conductive regions from each another.
Inventors
- 👤 Shih-Wei Sun
- 👤 Yasunobu Kosa
- 👤 John R. Yeargain
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:40
CPC Classifications
H; H10; H10W; H10W42/00; H10W20/00; H10W20/40; H10W20/41; H10W20/423; H10W42/20; Y; Y10; Y10S; Y10S438/00; Y10S438/901
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
146 words
A structure for shielding comprising: a substrate; a first dielectric layer overlying the substrate; a plurality of electrically isolated conductive regions having sidewalls, the plurality of electrically isolated conductive regions overlying the first dielectric layer; trenches within the first dielectric layer, the trenches formed both laterally between and below the electrically isolated conductive regions; a second dielectric layer conformally overlying the electrically isolated conductive regions, the sidewalls of the electrically isolated conductive regions, and the trenches of the first dielectric layer to establish recessed regions from the trenches, the recessed regions separate the electrically isolated conductive regions; and a shielding conductive layer overlying the second dielectric layer including within the recessed regions, the shielding conductive layer reducing capacitive coupling between two or more electrically isolated conductive regions within the plurality of electrically isolated conductive regions by applying a constant voltage potential to the shielding conductive layer.
Claim 2
Dependent Claim
146 words
A structure for shielding comprising: a substrate; a first dielectric layer overlying the substrate; a plurality of electrically isolated conductive regions having sidewalls, the plurality of electrically isolated conductive regions overlying the first dielectric layer; trenches within the first dielectric layer, the trenches formed both laterally between and below the electrically isolated conductive regions; a second dielectric layer conformally overlying the electrically isolated conductive regions, the sidewalls of the electrically isolated conductive regions, and the trenches of the first dielectric layer to establish recessed regions from the trenches, the recessed regions separate the electrically isolated conductive regions; and a shielding conductive layer overlying the second dielectric layer including within the recessed regions, the shielding conductive layer reducing capacitive coupling between two or more electrically isolated conductive regions within the plurality of electrically isolated conductive regions by applying a constant voltage potential to the shielding conductive layer.
Claim 3
Dependent Claim
16 words
The structure of claim 1 wherein the trenches laterally partially underlie the electrically isolated conductive regions.
Claim 4
Dependent Claim
19 words
The structure of claim 1 wherein each of the first conductive layer and the shielding conductive layer is polysilicon.
Claim 5
Dependent Claim
21 words
The structure of claim 1 wherein each of the first conductive layer and the shielding conductive layer is a metal material.
Claim 6
Dependent Claim
21 words
The structure of claim 1 wherein the first conductive layer is polysilicon and forming the shielding layer is a metal material.
Claim 7
Dependent Claim
21 words
The structure of claim 1 wherein the shielding layer is electrically connected to a conductive region coupled to a ground potential.
Claim 8
Dependent Claim
22 words
The structure of claim 1 wherein the shielding layer is electrically connected to a conductive region coupled to a power supply potential.
Claim 9
Dependent Claim
150 words
A structure comprising: a substrate; a plurality of transistors overlying the substrate; a first dielectric layer overlying the plurality of transistors; a first conductive region overlying the first dielectric layer; a second conductive region overlying the first dielectric layer, the second conductive regions being physically separated from the first conductive region by a recess region; a second dielectric layer overlying both the first conductive region and the second conductive region, the second dielectric layer having a first surface which overlies the first conductive region and the second conductive region and a second surface which lies within the recess region, the first surface being further separated from the substrate than the second surface; and a conductive layer adjacent at least the second surface of the second dielectric layer, the conductive layer being biased to a voltage potential which improves electrical isolation between the first conductive region and the second conductive region.
Claim 10
Dependent Claim
150 words
A structure comprising: a substrate; a plurality of transistors overlying the substrate; a first dielectric layer overlying the plurality of transistors; a first conductive region overlying the first dielectric layer; a second conductive region overlying the first dielectric layer, the second conductive regions being physically separated from the first conductive region by a recess region; a second dielectric layer overlying both the first conductive region and the second conductive region, the second dielectric layer having a first surface which overlies the first conductive region and the second conductive region and a second surface which lies within the recess region, the first surface being further separated from the substrate than the second surface; and a conductive layer adjacent at least the second surface of the second dielectric layer, the conductive layer being biased to a voltage potential which improves electrical isolation between the first conductive region and the second conductive region.
Claim 11
Dependent Claim
38 words
The structure of claim 8 wherein the first conductive region is formed from a material selected from a group consisting of: a metal, aluminum, copper, tungsten, gold, a salicide material, a silicide material, polysilicon, and an epitaxial formation.
Claim 12
Dependent Claim
22 words
The structure of claim 8 wherein the voltage potential is a voltage potential which is substantially constant in voltage magnitude over time.
Claim 13
Dependent Claim
14 words
The structure of claim 10 wherein the voltage potential is a ground voltage potential.
Claim 14
Dependent Claim
19 words
The structure of claim 8 wherein the conductive layer also overlies the first surface of the second dielectric layer.
Claim 15
Dependent Claim
28 words
The structure of claim 8 wherein the conductive layer is a contiguous layer of a conductive material which overlies each of the transistors within the plurality of transistors.
Claim 16
Dependent Claim
114 words
A semiconductor structure comprising: a substrate; a plurality of physically separated conductive regions overlying the substrate, a recessed region being located between each set of adjacent conductive regions in the plurality of physically separated conductive regions to form a plurality of recessed regions; a dielectric isolation layer overlying the plurality of physically separated conductive regions and at least partially lying within each of the recessed regions within the plurality of recessed regions; and a contiguous conductive shielding layer both overlying the dielectric isolation layer and within each of the recessed regions within the plurality of recessed regions, the contiguous conductive shielding layer being used to reduce electrical coupling between adjacent physically separated conductive regions.
Claim 17
Dependent Claim
114 words
A semiconductor structure comprising: a substrate; a plurality of physically separated conductive regions overlying the substrate, a recessed region being located between each set of adjacent conductive regions in the plurality of physically separated conductive regions to form a plurality of recessed regions; a dielectric isolation layer overlying the plurality of physically separated conductive regions and at least partially lying within each of the recessed regions within the plurality of recessed regions; and a contiguous conductive shielding layer both overlying the dielectric isolation layer and within each of the recessed regions within the plurality of recessed regions, the contiguous conductive shielding layer being used to reduce electrical coupling between adjacent physically separated conductive regions.
Claim 18
Dependent Claim
19 words
The semiconductor structure of claim 14 wherein the contiguous conductive shielding layer is biased to a fixed supply voltage.
Claim 19
Dependent Claim
42 words
The semiconductor structure of claim 14 wherein the plurality of physically separated conductive regions is formed from a material selected from a group consisting of: a metal, aluminum, copper, tungsten, gold, a salicide material, a silicide material, polysilicon, and an epitaxial formation.
Claim 20
Dependent Claim
44 words
The semiconductor structure of claim 14 wherein the recessed regions each have a bottom surface with a height measured from the substrate which is less than a height measured from the substrate of a bottom surface of the plurality of physically separated conductive regions.
Claim 21
Dependent Claim
25 words
The structure of claim 1 wherein the plurality of electrically isolated conductive regions are formed directly overlying at least one transistor formed overlying the substrate.
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