US5344236A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for evaluation of quality of the interface between layer and substrate
Assignee: Leland Stanford Junior University
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Filing: 1992-01-23
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Granted: 1994-09-06
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Expires: 2012-01-23
Abstract
Abstract A method for the quantitative and qualitative evaluation of a nonuniform interface between a layer and a substrate is disclosed wherein thermal excitation is provided by irradiating the layer and thermal relaxation responsive to this thermal excitation is measured. The measured thermal relaxation is compared to the expected values, obtained from a model derived for the quantitative description of the process of thermal relaxation. The fraction of the deteriorated area of the interface is obtained from the portion of the thermal relaxation which diverges from the expected values.
Inventors
- 👤 Iiya M. Fishman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:16
CPC Classifications
G; G01; G01N; G01N25/00; G01N25/72
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
130 words
A method for evaluation of the quality of the interface between a layer disposed on a substrate, said interface being nonuniform in adhesion of said layer and said substrate, comprising the steps of: providing a model of expected values for quantitative description of the process of thermal relaxation in the nonuniform interface between layer and substrate; irradiating said layer with a plurality of laser beams to provide a non-uniform thermal excitation across said layer; measuring thermal relaxation of said thermal excitation; comparing said thermal relaxation of said thermal excitation with said expected values for the later stage of the thermal process in said interface obtained from said model; evaluating mismatch of said layer with said substrate by selecting the portion of said thermal relaxation that diverges from the expected values.
Claim 2
Independent Claim
130 words
A method for evaluation of the quality of the interface between a layer disposed on a substrate, said interface being nonuniform in adhesion of said layer and said substrate, comprising the steps of: providing a model of expected values for quantitative description of the process of thermal relaxation in the nonuniform interface between layer and substrate; irradiating said layer with a plurality of laser beams to provide a non-uniform thermal excitation across said layer; measuring thermal relaxation of said thermal excitation; comparing said thermal relaxation of said thermal excitation with said expected values for the later stage of the thermal process in said interface obtained from said model; evaluating mismatch of said layer with said substrate by selecting the portion of said thermal relaxation that diverges from the expected values.
Claim 3
Dependent Claim
12 words
The method of claim 1 wherein said nonuniform thermal excitation is periodic.
Claim 4
Dependent Claim
18 words
The method of claim 1 where said step of irradiating to provide thermal excitation is a transient grating.
Claim 5
Dependent Claim
33 words
The method of claim 3 wherein said transient grating results from concurrent irradiation of said layer by said laser beams including two coherent exciting beams of radiation derived from a first radiation source.
Claim 6
Dependent Claim
45 words
The method of claim 4 wherein said thermal relaxation is measured by irradiating said layer by a third beam of probe radiation and detecting of a diffracted component of said third beam, said third beam being temporally delayed relative to said two coherent exciting beams.
Claim 7
Dependent Claim
19 words
The method of claim 5 wherein said third beam of probe radiation is derived from said first radiation source.
Claim 8
Dependent Claim
26 words
The method of claim 5 wherein said third beam is obtained from another radiation source, said another radiation source non coherent with said first radiation source.
Claim 9
Dependent Claim
38 words
The method of claim 5 wherein said step of irradiating said layer by a third beam is accomplished with said third beam of probe radiation incident on said layer, said layer being substantially transparent to said probe radiation.
Claim 10
Dependent Claim
38 words
The method of claim 5 wherein said step of irradiating said layer by a third beam is accomplished with said third beam of probe radiation incident on said substrate, said substrate being substantially transparent to said probe radiation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-09-05 | 1998-03-07 | 1998-09-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-05 | 2002-03-07 | 2002-09-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-05 | 2006-03-07 | 2006-09-06 | $7700.00 | Window Closed / Lapsed |