US4659172A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotatable and translatable mounting mechanism for a specimen pattern in optical processing apparatus
Assignee: OPTICAL SPECIALITIES Inc
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Filing: 1985-05-20
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Granted: 1987-04-21
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Expires: 2005-05-20
Abstract
Abstract A translatable and rotatable mechanism is employed in optical processing apparatus for exposing a specimen pattern and inspecting light pattern or image developed from it. The mounting mechanism includes a plate that is rotatably mounted on a linear positioning table assembly. The plate includes a substrate arm and a camera arm that extend in opposite directions from the axis of rotation of the plate. The specimen pattern, such as a photomask, is positioned on the free end of the substrate arm, and a video camera is positioned on the free end of the camera arm. Whenever the plate is rotated to an exposure orientation, the photomask diffracts light rays emanating from a laser. The diffracted light rays interfere with a reference beam to form a hologram. Whenever the plate is rotated 180° to an inspection orientation, a reconstructed imate of the photomask appears at the location where the photomask was positioned during exposure. The video camera is positioned directly beneath the reconstructed image and scans it by the translational movement of the positioning table. A microscope is mounted to a stationary support and is positioned over the photomask. The video camera and the microscope observe corresponding regions of the image and the photomask, respectively, in synchronism for all translational movements of the plate.
Inventors
- 👤 Daniel L. Cavan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 06:25
CPC Classifications
G; G03; G03H; G03H1/00; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G01N21/95623; G06; G06V; G06V10/00; G06V10/88
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
157 words
In an optical processing apparatus having recording means for making a recording of light information that corresponds to a specimen pattern and light pattern forming means for forming from the recording a light pattern that corresponds to the speciment pattern, a rotatable and translatable mechanism for mounting the specimen pattern and scanning the light pattern, comprising: a plate for supporting the speciment pattern; detecting means operatively connected to the plate for detectring the light pattern; translating means for providing translational movement of the plate in a plane; and rotating means for rotating the plate about an axis that intersects the plate, the rotating means selectively rotating the plate to a first position so that the recording means is operable to make the recording of light information and to a second position so that the translating means is operable to move the plate in the plane and enable the detecting means to scan and detect the light pattern.
Claim 2
Dependent Claim
157 words
In an optical processing apparatus having recording means for making a recording of light information that corresponds to a specimen pattern and light pattern forming means for forming from the recording a light pattern that corresponds to the speciment pattern, a rotatable and translatable mechanism for mounting the specimen pattern and scanning the light pattern, comprising: a plate for supporting the speciment pattern; detecting means operatively connected to the plate for detectring the light pattern; translating means for providing translational movement of the plate in a plane; and rotating means for rotating the plate about an axis that intersects the plate, the rotating means selectively rotating the plate to a first position so that the recording means is operable to make the recording of light information and to a second position so that the translating means is operable to move the plate in the plane and enable the detecting means to scan and detect the light pattern.
Claim 3
Dependent Claim
24 words
The apparatus of claim 1 in which the light pattern is formed in the location occupied by the specimen pattern in the first position.
Claim 4
Dependent Claim
23 words
The apparatus of claim 1 in which the plate has a surface, and the axis of rotation is substantially perpendicular to the surface.
Claim 5
Dependent Claim
32 words
The apparatus of claim 1 in which the plate has a surface, and the specimen pattern and detecting means are supported on the surface on opposite sides of the axis of rotation.
Claim 6
Dependent Claim
102 words
The apparatus of claim 4 in which both the specimen pattern and the light pattern have position coordinates that represent the location of a corresponding region in the specimen pattern and the light pattern; and wherein the apparatus further comprises a viewing means for viewing a region of the specimen pattern, the viewing means being supported separate from the plate and positioned relative to the detecting means so that the region in the view of the viewing means has position coordinates that are in one-to-one correspondence to the position coordinates of the region of the light pattern detected by the detecting means.
Claim 7
Dependent Claim
28 words
The apparatus of claim 1 wherein the apparatus further comprises a viewing means that is supported separate from the plate for viewing a region of the specimen pattern.
Claim 8
Dependent Claim
47 words
The apparatus of claim 6 in which the detecting means has a first field of view with a first center and a second field of view with a second center, the first and second centers and the axis of rotation being aligned so that they are collinear.
Claim 9
Dependent Claim
46 words
The apparatus of claim 7 in which the distance between the first center and the axis of rotation and the distance between the second center and the axis of rotation are equal, and the first and second positions are separated by an angle of 180° .
Claim 10
Dependent Claim
50 words
The apparatus of claim 7 in which the translating means is operable to reposition the axis of rotation in a direction such that the distance between the first center and the axis of rotation and the distance between the second center and the axis of rotation can be made equal.
Claim 11
Dependent Claim
160 words
In an optical processing apparatus having recording means for making a recording of light information that corresponds to a specimen pattern and light pattern forming means for forming from the recording a light pattern that corresponds to defects present in the specimen pattern, a rotatable and translatable mechanism for mounting the specimen pattern and scanning the light pattern, comprising: a plate for supporting the specimen pattern; detecting means operatively connected to the plate for detecting the light pattern; translating means for providing translational movement of the plate in a plane; and rotating means for rotating the plate about an axis that intersects the plate, the rotating means selectively rotating the plate to a first position so that the recording means is operable to make the recording of light information and to a second position so that the translating means is operable to move the plate in the plane and enable the detecting means to scan and detect the light pattern.
Claim 12
Dependent Claim
160 words
In an optical processing apparatus having recording means for making a recording of light information that corresponds to a specimen pattern and light pattern forming means for forming from the recording a light pattern that corresponds to defects present in the specimen pattern, a rotatable and translatable mechanism for mounting the specimen pattern and scanning the light pattern, comprising: a plate for supporting the specimen pattern; detecting means operatively connected to the plate for detecting the light pattern; translating means for providing translational movement of the plate in a plane; and rotating means for rotating the plate about an axis that intersects the plate, the rotating means selectively rotating the plate to a first position so that the recording means is operable to make the recording of light information and to a second position so that the translating means is operable to move the plate in the plane and enable the detecting means to scan and detect the light pattern.
References Cited (Backward Citations)
US4478481A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-04-20 | 1990-10-20 | 1991-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-04-20 | 1994-10-20 | 1995-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-04-20 | 1998-10-20 | 1999-04-21 | $7700.00 | Window Closed / Lapsed |