US4484820A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy
Assignee: Therma Wave Inc
•
Filing: 1982-05-25
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Granted: 1984-11-27
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Expires: 2002-05-25
Abstract
Abstract The subject invention relates to a method of evaluating the quality of the bond achieved between two members utilizing thermoacoustic microscopy. More particularly, thermoacoustic microscopy is used to detect and/or image the plate-mode resonant signature of bonded members to determine the quality of the bond therebetween. The method is particularly suited for analyzing the integrity of a bond between an integrated circuit die and a substrate. The subject method takes advantage of the fact that the plate-mode signature of a securely bonded die and substrate combination and a poorly bonded combination will be different. Accordingly, by detecting and/or imaging the plate-mode resonant signature of the sample the integrity of the bond can be assessed. Two techniques for carrying out the subject method are disclosed.
Inventors
- 👤 Allan Rosencwaig
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 17:14
CPC Classifications
G; G10; G10K; G10K15/00; G10K15/04; G10K15/046; F; F02; F02G; F02G3/00; G01; G01N; G01N21/00; G01N21/17; G01N21/1702; G01N21/84; G01N21/8422; G01N29/00; G01N29/04; G01N29/06; G01N29/0654; G01N29/0681; G01N29/34; G01N29/348; G01N2291/00; G01N2291/02; G01N2291/028; G01N2291/02827; G01N2291/26; G01N2291/269; G01N2291/2697
Claims Analysis
Total Claims: 62
Claim 1
Independent Claim
137 words
A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of: causing a periodic localized heating in at least one microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination with the frequency of said periodic heating causing said combination to resonate; detecting the acoustic waves produced in said combination and generating signals therefrom; processing said signals to obtain a plate-mode resonant signature of said first and second member combination; and comparing said obtained plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.
Claim 2
Independent Claim
137 words
A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of: causing a periodic localized heating in at least one microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination with the frequency of said periodic heating causing said combination to resonate; detecting the acoustic waves produced in said combination and generating signals therefrom; processing said signals to obtain a plate-mode resonant signature of said first and second member combination; and comparing said obtained plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.
Claim 3
Dependent Claim
57 words
The method as recited in claim 1 further including the step of scanning the first member, with said localized heated spot, in a two dimensional array of microscopic spots and processing said signals as a function of the position of said localized heating to generate a two dimensional image of the plate-mode resonant signature of said combination.
Claim 4
Dependent Claim
37 words
The method as recited in claim 1 further including the step of varying the frequency of said periodic localized heating while maintaining said heating at a single spot in order to generate a plurality of plate-mode resonances.
Claim 5
Dependent Claim
21 words
The method as recited in claim 1 wherein the source of said localized heating is an intensity modulated beam of energy.
Claim 6
Dependent Claim
17 words
The method as recited in claim 4 wherein said beam of energy is defined by electromagnetic radiation.
Claim 7
Dependent Claim
15 words
The method as recited in claim 5 wherein said electromagnetic radiation is defined by light.
Claim 8
Dependent Claim
18 words
The method as recited in claim 6 wherein said light is generated from a laser and is coherent.
Claim 9
Dependent Claim
19 words
The method as recited in claim 4 wherein said beam of energy is defined by a stream of particles.
Claim 10
Dependent Claim
15 words
The method as recited in claim 8 wherein the particles in said beam are electrons.
Claim 11
Dependent Claim
19 words
The method as recited in claim 1 wherein said source of localized heating is defined by an electrical resistance.
Claim 12
Dependent Claim
14 words
The method as recited in claim 1 wherein said detector is an ultrasonic transducer.
Claim 13
Dependent Claim
15 words
The method as recited in claim 11 wherein said ultrasonic transducer is a piezoelectric detector.
Claim 14
Dependent Claim
14 words
The method as recited in claim 1 wherein said detector is a laser probe.
Claim 15
Dependent Claim
14 words
The method as recited in claim 1 wherein said detector is a laser interferometer.
Claim 16
Independent Claim
173 words
A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of: causing a periodic localized heating at a microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination and with the frequency of said periodic heating being selected to cause said combination to resonate and exhibit a plate-mode signature; detecting the acoustic waves produced in said combination and generating signals therefrom; scanning said first member with said localized heating in a two-dimensional array of microscopic spots; processing said detected signals as a function of the position of said heated spot to generate a two-dimensional image of the plate-mode resonant signature of said combination; and comparing said generated image of said plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.
Claim 17
Independent Claim
173 words
A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of: causing a periodic localized heating at a microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination and with the frequency of said periodic heating being selected to cause said combination to resonate and exhibit a plate-mode signature; detecting the acoustic waves produced in said combination and generating signals therefrom; scanning said first member with said localized heating in a two-dimensional array of microscopic spots; processing said detected signals as a function of the position of said heated spot to generate a two-dimensional image of the plate-mode resonant signature of said combination; and comparing said generated image of said plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.
Claim 18
Dependent Claim
21 words
The method as recited in claim 15 wherein the source of such localized heating is an intensity modulated beam of energy.
Claim 19
Dependent Claim
17 words
The method as recited in claim 16 wherein said beam of energy is defined by electromagnetic radiation.
Claim 20
Dependent Claim
15 words
The method as recited in claim 17 wherein said electromagnetic radiation is defined by light.
Claim 21
Dependent Claim
18 words
The method as recited in claim 18 wherein said light is generated from a laser and is coherent.
Claim 22
Dependent Claim
19 words
The method as recited in claim 16 wherein said beam of energy is defined by a stream of particles.
Claim 23
Dependent Claim
15 words
The method as recited in claim 20 wherein the particles in said beam are electrons.
Claim 24
Dependent Claim
19 words
The method as recited in claim 15 wherein said source of localized heating is defined by an electrical resistance.
Claim 25
Dependent Claim
14 words
The method as recited in claim 15 wherein said detector is an ultrasonic transducer.
Claim 26
Dependent Claim
15 words
The method as recited in claim 23 wherein said ultrasonic transducer is a piezoelectric detector.
Claim 27
Dependent Claim
14 words
The method as recited in claim 15 wherein said detector is a laser probe.
Claim 28
Dependent Claim
14 words
The method as recited in claim 15 wherein said detector is a laser interferometer.
Claim 29
Independent Claim
130 words
A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of: causing a periodic localized heating at a microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination; detecting the acoustic waves produced in the combination and generating signals therefrom; varying the frequency of the periodic heating while maintaining said heating at a single point to generate a plurality of plate-mode resonances in said combination; and comparing the detected signals to a set of predetermined signals associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.
Claim 30
Independent Claim
130 words
A method for evaluating the quality of the bond achieved between a combination of a first and second member comprising the steps of: causing a periodic localized heating at a microscopic spot in said first member to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination; detecting the acoustic waves produced in the combination and generating signals therefrom; varying the frequency of the periodic heating while maintaining said heating at a single point to generate a plurality of plate-mode resonances in said combination; and comparing the detected signals to a set of predetermined signals associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said members can be evaluated.
Claim 31
Dependent Claim
21 words
The method as recited in claim 27 wherein the source of said localized heating is an intensity modulated beam of energy.
Claim 32
Dependent Claim
17 words
The method as recited in claim 28 wherein said beam of energy is defined by electromagnetic radiation.
Claim 33
Dependent Claim
15 words
The method as recited in claim 29 wherein said electromagnetic radiation is defined by light.
Claim 34
Dependent Claim
18 words
The method as recited in claim 30 wherein said light is generated from a laser and is coherent.
Claim 35
Dependent Claim
19 words
The method as recited in claim 28 wherein said beam of energy is defined by a stream of particles.
Claim 36
Dependent Claim
15 words
The method as recited in claim 32 wherein the particles in said beam are electrons.
Claim 37
Dependent Claim
18 words
The method as recited in claim 27 wherein said source of heating is defined by an electrical resistance.
Claim 38
Dependent Claim
14 words
The method as recited in claim 27 wherein said detector is an ultrasonic transducer.
Claim 39
Dependent Claim
15 words
The method as recited in claim 35 wherein said ultrasonic transducer is a piezoelectric detector.
Claim 40
Dependent Claim
14 words
The method as recited in claim 27 wherein said detector is a laser probe.
Claim 41
Dependent Claim
14 words
The method as recited in claim 27 wherein said detector is a laser interferometer.
Claim 42
Independent Claim
133 words
A method for evaluating the quality of the bond achieved between a combination of an integrated circuit die and a substrate comprising the steps of: causing a periodic localized heating at a microscopic spot in said die to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination; detecting the acoustic waves produced in said combination and generating signals therefrom; varying the frequency of said periodic heating while maintaining said heating at a single spot to generate a plurality of plate-mode resonances in said combination; and comparing the detected signals to a set of predetermined signals associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said die and substrate can be evaluated.
Claim 43
Independent Claim
133 words
A method for evaluating the quality of the bond achieved between a combination of an integrated circuit die and a substrate comprising the steps of: causing a periodic localized heating at a microscopic spot in said die to produce thermal waves which in turn give rise to acoustic waves of a longer wavelength that propagate through said combination; detecting the acoustic waves produced in said combination and generating signals therefrom; varying the frequency of said periodic heating while maintaining said heating at a single spot to generate a plurality of plate-mode resonances in said combination; and comparing the detected signals to a set of predetermined signals associated with a similar combination where the quality of the bond is known whereby the quality of the bond between said die and substrate can be evaluated.
Claim 44
Dependent Claim
21 words
The method as recited in claim 39 wherein the source of said localized heating is an intensity modulated beam of energy.
Claim 45
Dependent Claim
17 words
The method as recited in claim 40 wherein said beam of energy is defined by electromagnetic radiation.
Claim 46
Dependent Claim
15 words
The method as recited in claim 41 wherein said electromagnetic radiation is defined by light.
Claim 47
Dependent Claim
18 words
The method as recited in claim 42 wherein said light is generated from a laser and is coherent.
Claim 48
Dependent Claim
19 words
The method as recited in claim 40 wherein said beam of energy is defined by a stream of particles.
Claim 49
Dependent Claim
15 words
The method as recited in claim 44 wherein the particles in said beam are electrons.
Claim 50
Dependent Claim
18 words
The method as recited in claim 39 wherein said source of heating is defined by an electrical resistance.
Claim 51
Dependent Claim
14 words
The method as recited in claim 39 wherein said detector is an ultrasonic transducer.
Claim 52
Dependent Claim
15 words
The method as recited in claim 47 wherein said ultrasonic transducer is a piezoelectric detector.
Claim 53
Dependent Claim
14 words
The method as recited in claim 39 wherein said detector is a laser probe.
Claim 54
Dependent Claim
14 words
The method as recited in claim 39 wherein said detector is a laser interferometer.
Claim 55
Independent Claim
128 words
An apparatus for evaluating the quality of the bond achieved between a combination of a first and second member comprising: means generating a periodic localized heating in at least one microscopic spot in said first member to produce thermal waves which in turn gives rise to acoustic waves of longer wavelength which propagate through said combination in a manner to cause said combination to resonate; means for detecting the acoustic waves generated in said combination; means for processing the detected acoustic waves to obtain a plate-mode resonant signature; and means for comparing the obtained plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known, whereby the quality of the bond between the members can be evaluated.
Claim 56
Independent Claim
128 words
An apparatus for evaluating the quality of the bond achieved between a combination of a first and second member comprising: means generating a periodic localized heating in at least one microscopic spot in said first member to produce thermal waves which in turn gives rise to acoustic waves of longer wavelength which propagate through said combination in a manner to cause said combination to resonate; means for detecting the acoustic waves generated in said combination; means for processing the detected acoustic waves to obtain a plate-mode resonant signature; and means for comparing the obtained plate-mode resonant signature to a predetermined plate-mode resonant signature associated with a similar combination where the quality of the bond is known, whereby the quality of the bond between the members can be evaluated.
Claim 57
Dependent Claim
23 words
An apparatus as recited in claim 51 wherein said heating means further includes a means for varying the frequency of the periodic heating.
Claim 58
Dependent Claim
17 words
An apparatus as recited in claim 52 wherein said means for varying the frequency is a modulator.
Claim 59
Dependent Claim
23 words
An apparatus as recited in claim 51 wherein said means for generating localized heating is defined by an intensity modulated beam of energy.
Claim 60
Dependent Claim
56 words
An apparatus as recited in claim 51 further comprising: means for scanning the first member with said localized heated spot in a two-dimensional array of microscopic spots; and means for processing said signals as a function of the position of said localized heating to generate a two-dimensional image of the plate-mode resonant signature of said combination.
Claim 61
Dependent Claim
24 words
An apparatus as recited in claim 51 wherein said means for detecting acoustic waves generated in said combination is defined by a piezoelectric transducer.
Claim 62
Dependent Claim
25 words
An apparatus as recited in claim 51 wherein said means for detecting the acoustic waves generated in said combination is defined by a laser probe.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-11-27 | 1988-05-28 | 1988-11-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-11-27 | 1992-05-28 | 1992-11-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-11-27 | 1996-05-28 | 1996-11-27 | $7700.00 | Window Closed / Lapsed |