US5342477A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Low resistance electrodes useful in flat panel displays
Assignee: Round Rock Research LLC
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Filing: 1993-07-14
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Granted: 1994-08-30
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Expires: 2013-07-14
Abstract
Abstract A method is provided for fabricating a high resistance row (or column) electrode with which a low resistance runner is associated. The electrode is formed, preferably from a substantially transparent material, and a low resistant (i.e., highly conductive material) is disposed thereon. The highly conductive material is subsequently etched such that the highly conductive material remains along the sides of the electrode, thereby reducing the resistivity of the electrode.
Inventors
- 👤 David A. Cathey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 08:52
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/13439; H05; H05B; H05B33/00; H05B33/10; H05B33/12; H05B33/26; H05B33/28; H10; H10F; H10F77/00; H10F77/20; H10F77/244; H10F77/247; H10K; H10K50/00; H10K50/80; H10K50/805; H10K50/81; H10K50/814; H10K59/00; H10K59/80; H10K59/805; H10K59/8051; H10K59/80516
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
64 words
A method to form low resistance electrodes, the method comprising the following steps of: patterning an electrode superjacent a substrate, said electrode having a length; and disposing a low resistant material along said length of said electrode, said electrode and said low resistant material being combined with a substantially transparent conductive material in a flat panel display, said conductive material having a high resistance.
Claim 2
Independent Claim
64 words
A method to form low resistance electrodes, the method comprising the following steps of: patterning an electrode superjacent a substrate, said electrode having a length; and disposing a low resistant material along said length of said electrode, said electrode and said low resistant material being combined with a substantially transparent conductive material in a flat panel display, said conductive material having a high resistance.
Claim 3
Independent Claim
44 words
A method to form low resistance electrodes, the method comprising the following steps of: patterning an electrode superjacent a substrate, said electrode having a length; disposing a low resistant material along said length of said electrode; and disposing an insulating layer superjacent said electrode.
Claim 4
Independent Claim
44 words
A method to form low resistance electrodes, the method comprising the following steps of: patterning an electrode superjacent a substrate, said electrode having a length; disposing a low resistant material along said length of said electrode; and disposing an insulating layer superjacent said electrode.
Claim 5
Dependent Claim
13 words
The method according to claim 2, wherein said insulating layer is substantially transparent.
Claim 6
Dependent Claim
30 words
The method according to claim 1, wherein said low resistant material is disposed by the following steps comprising: depositing said low resistant material; and selectively removing said low resistant material.
Claim 7
Dependent Claim
24 words
The method according to claim 4, wherein said low resistant material comprises at least one of doped silicon, tantalum oxide, and a salicided material.
Claim 8
Dependent Claim
55 words
A process for fabricating a substantially transparent electrode, said process comprising the following steps of: forming an electrode from a substantially transparent material; patterning a substantially transparent insulating material superjacent said electrode; blanketing a low resistant material superjacent said electrode; and selectively removing said low resistant material, thereby leaving low resistant spacers along said electrode.
Claim 9
Dependent Claim
55 words
A process for fabricating a substantially transparent electrode, said process comprising the following steps of: forming an electrode from a substantially transparent material; patterning a substantially transparent insulating material superjacent said electrode; blanketing a low resistant material superjacent said electrode; and selectively removing said low resistant material, thereby leaving low resistant spacers along said electrode.
Claim 10
Dependent Claim
20 words
The process according to claim 6, wherein said electrode comprises at least one of indium tin oxide and tin oxide.
Claim 11
Dependent Claim
13 words
The process according to claim 7, wherein said insulating material comprises silicon dioxide.
Claim 12
Dependent Claim
24 words
The process according to claim 8, wherein said low resistant material is removed by etching, said insulating material protecting said electrode during said etch.
Claim 13
Dependent Claim
27 words
The process according to claim 9, wherein said electrode is disposed on a substrate, at least one insulating layer is disposed between said electrode and said substrate.
Claim 14
Dependent Claim
18 words
The process according to claim 9 wherein a conductive layer is disposed between said electrode and said substrate.
Claim 15
Dependent Claim
19 words
The process according to claim 9, wherein a light emitting source is disposed between said substrate and said electrode.
Claim 16
Dependent Claim
55 words
A process for enhancing the conductivity of an electrode, said process comprising the following steps of: disposing at least one insulating layer on a substrate; disposing an energy responsive layer on said substrate; fabricating a substantially transparent electrode on at least one of said layers; and fabricating a highly conductive runner along said transparent electrode.
Claim 17
Dependent Claim
55 words
A process for enhancing the conductivity of an electrode, said process comprising the following steps of: disposing at least one insulating layer on a substrate; disposing an energy responsive layer on said substrate; fabricating a substantially transparent electrode on at least one of said layers; and fabricating a highly conductive runner along said transparent electrode.
Claim 18
Dependent Claim
34 words
The process according to claim 13, wherein said runner is fabricated by the following steps comprising: depositing a highly conductive material superjacent said electrode; selectively removing said highly conductive material, thereby forming said runner.
Claim 19
Dependent Claim
18 words
The process according to claim 14, wherein said electrode has a height substantially in the range of 1000Å-10000Å.
Claim 20
Dependent Claim
22 words
The process according to claim 15, wherein said runner comprises at least one of doped silicon, tantalum oxide, and a salicided material.
Claim 21
Dependent Claim
20 words
The process according to claim 16, wherein said electrode comprises at least one of indium tin oxide, and tin oxide.
Claim 22
Dependent Claim
21 words
The process according to claim 17, wherein said energy responsive layer comprises at least one of liquid crystals, plasma, and phosphors.
Claim 23
Dependent Claim
35 words
The process according to claim 18, wherein said electrode is used in a display, said display is at least one of a liquid crystal display, an electroluminescent display, a plasma display, and an electrochromic display.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-29 | 1998-02-28 | 1998-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-29 | 2002-02-28 | 2002-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-29 | 2006-02-28 | 2006-08-30 | $7700.00 | Window Closed / Lapsed |