US5340451A
Expired / Lapsed
US
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Process for producing a metal organic polymer combination
Assignee: International Business Machines Corp
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Filing: 1993-05-13
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Granted: 1994-08-23
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Expires: 2013-05-13
Abstract
Abstract A process is disclosed for producing a metal-organic polymer combination by contacting the polymer with a plasma followed by an aqueous solution of a metal salt. In one embodiment a water or nitrous oxide plasma is used to treat a polyimide or a fluorinated polymer. The polymer is combined with a metal cation, the metal being a catalyst for a conventional electroless coating after which it is contacted with an electroless metal plating bath for the formation of electrical circuits and especially for plating high aspect ratio vias in microcircuits. Unlike the conventional electroless process, the cationic catalytic metal is not reduced to a zero valent metal catalyst prior to the application of the electroless metal coating solution. The process also improves the wettability of the polymer, especially the fluorinated polymer and is especially useful in improving the wettability of high aspect ratio vias.
Inventors
- 👤 Leena P. Buchwalter
- 👤 Stephen L. Buchwalter
- 👤 Charles R. Davis
- 👤 Ronald D. Goldblatt
- 👤 John E. Heidenreich, III
- 👤 Sharon L. Nunes
- 👤 Jae M. Park
- 👤 Richard R. Thomas
- 👤 Domenico Tortorella
- 👤 Luis M. Ferreiro, deceased
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:28
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/16; C23C18/18; C23C18/20; C23C18/22; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/034; H05K1/0346; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/38; H05K3/381
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
62 words
A process for producing a metal-organic polymer combination in which the metal is present in cationic form, comprising contacting said polymer with a plasma to obtain a treated polymer and contacting said treated polymer with a compound containing cations of said metal to obtain said metal-organic polymer combination in which the metal is present in cationic form, and then recovering said combination.
Claim 2
Dependent Claim
62 words
A process for producing a metal-organic polymer combination in which the metal is present in cationic form, comprising contacting said polymer with a plasma to obtain a treated polymer and contacting said treated polymer with a compound containing cations of said metal to obtain said metal-organic polymer combination in which the metal is present in cationic form, and then recovering said combination.
Claim 3
Dependent Claim
19 words
The process of claim 1 where said metal-organic polymer combination comprises a coating on the surface of said polymer.
Claim 4
Dependent Claim
24 words
The process of claim 2 where said coating extends from the surface of said polymer to a depth beneath the surface of said polymer.
Claim 5
Dependent Claim
49 words
The process of claim 1 wherein said plasma comprises: (i) an oxidizing gas based on an oxidizing agent containing oxygen; (ii) a reducing gas based on a reducing agent containing hydrogen; or (iii) a mixture of at least an oxidizing agent containing oxygen and a reducing agent containing hydrogen.
Claim 6
Dependent Claim
49 words
The process of claim 2 wherein said plasma comprises: (i) an oxidizing gas based on an oxidizing agent containing oxygen; (ii) a reducing gas based on a reducing agent containing hydrogen; or (iii) a mixture of at least an oxidizing agent containing oxygen and a reducing agent containing hydrogen.
Claim 7
Dependent Claim
49 words
The process of claim 3 wherein said plasma comprises: (i) an oxidizing gas based on an oxidizing agent containing oxygen; (ii) a reducing gas based on a reducing agent containing hydrogen; or (iii) a mixture of at least an oxidizing agent containing oxygen and a reducing agent containing hydrogen.
Claim 8
Dependent Claim
37 words
The process of claim 1 wherein said plasma is a gas based on water, a peroxide, oxygen, an oxide of nitrogen, ozone, hydrogen, ammonia, hydrogen sulfide, hydrazines, diborane, metal acetylacetonates, lower alkyl metal complexes or lower n-alkanes.
Claim 9
Dependent Claim
37 words
The process of claim 2 wherein said plasma is a gas based on water, a peroxide, oxygen, an oxide of nitrogen, ozone, hydrogen, ammonia, hydrogen sulfide, hydrazines, diborane, metal acetylacetonates, lower alkyl metal complexes or lower n-alkanes.
Claim 10
Dependent Claim
37 words
The process of claim 3 wherein said plasma is a gas based on water, a peroxide, oxygen, an oxide of nitrogen, ozone, hydrogen, ammonia, hydrogen sulfide, hydrazines, diborane, metal acetylacetonates, lower alkyl metal complexes or lower n-alkanes.
Claim 11
Dependent Claim
15 words
The process of claim 1 where said polymer is a fluorinated polymer or a polyimide.
Claim 12
Dependent Claim
15 words
The process of claim 2 where said polymer is a fluorinated polymer or a polyimide.
Claim 13
Dependent Claim
15 words
The process of claim 3 where said polymer is a fluorinated polymer or a polyimide.
Claim 14
Dependent Claim
15 words
The process of claim 7 where said polymer is a fluorinated polymer or a polyimide.
Claim 15
Dependent Claim
25 words
The process of claim 1 wherein said metal and cations of said metal are based on the Group VIII, IB, IIB, IIIA and IVA metals.
Claim 16
Dependent Claim
25 words
The process of claim 1 wherein said metal and cations of said metal are based on the Group VIII noble metals or Group IB metals.
Claim 17
Dependent Claim
25 words
The process of claim 10 wherein said metal and cations of the metal are based on the Group VIII noble metals or Group IB metals.
Claim 18
Dependent Claim
25 words
The process of claim 11 wherein said metal and cations of the metal are based on the Group VIII noble metals or Group IB metals.
Claim 19
Dependent Claim
25 words
The process of claim 12 wherein said metal and cations of the metal are based on the Group VIII noble metals or Group IB metals.
Claim 20
Dependent Claim
25 words
The process of claim 13 wherein said metal and cations of the metal are based on the Group VIII noble metals or Group IB metals.
Claim 21
Dependent Claim
120 words
A process for producing a metal-organic polymer combination in which the metal is present in cationic form, comprising contacting said polymer with a plasma to obtain a treated polymer wherein said polymer is a fluorinated polymer or polyamide and said metal is a catalytic metal for an aqueous electroless plating composition, said plasma being formed by irradiating water vapor or one or more vaporous oxides of nitrogen with electromagnetic radiation, contacting said treated polymer with cations of said metal so that said cations are combined with said treated polymer to obtain said metal-organic polymer combination in which the metal is present in cationic form, and contacting said combination with an aqueous electroless metal plating both to deposit a second metal.
Claim 22
Dependent Claim
120 words
A process for producing a metal-organic polymer combination in which the metal is present in cationic form, comprising contacting said polymer with a plasma to obtain a treated polymer wherein said polymer is a fluorinated polymer or polyamide and said metal is a catalytic metal for an aqueous electroless plating composition, said plasma being formed by irradiating water vapor or one or more vaporous oxides of nitrogen with electromagnetic radiation, contacting said treated polymer with cations of said metal so that said cations are combined with said treated polymer to obtain said metal-organic polymer combination in which the metal is present in cationic form, and contacting said combination with an aqueous electroless metal plating both to deposit a second metal.
Claim 23
Dependent Claim
20 words
The process of claim 20 where said polymer is a fluorinated polymer and said plasma comprises a nitrous oxide plasma.
Claim 24
Dependent Claim
19 words
The process of claim 20 where said polymer is a polyimide and said plasma comprises a nitrous oxide plasma.
Claim 25
Dependent Claim
19 words
The process of claim 20 where said polymer is a polyimide and said plasma comprises a water vapor plasma.
Claim 26
Dependent Claim
20 words
The process of claim 20 where said polymer is a fluorinated polymer and said plasma comprises a water vapor plasma.
Claim 27
Dependent Claim
11 words
The process of claim 21 where said catalytic metal is palladium.
Claim 28
Dependent Claim
11 words
The process of claim 22 where said catalytic metal is palladium.
Claim 29
Dependent Claim
11 words
The process of claim 23 where said catalytic metal is palladium.
Claim 30
Dependent Claim
10 words
The process of claim 24 where said metal is palladium.
Claim 31
Dependent Claim
11 words
The process of claim 21 where said plasma also contains hydrogen.
Claim 32
Dependent Claim
11 words
The process of claim 22 where said plasma also contains hydrogen.
Claim 33
Dependent Claim
11 words
The process of claim 25 where said second metal is copper.
Claim 34
Dependent Claim
11 words
The process of claim 26 where said second metal is copper.
Claim 35
Dependent Claim
11 words
The process of claim 27 where said second metal is copper.
Claim 36
Dependent Claim
11 words
The process of claim 28 where said second metal is copper.
Claim 37
Dependent Claim
16 words
The process of claim 20 where said polymer is configured as a high aspect ratio via.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-22 | 1998-02-21 | 1998-08-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-22 | 2002-02-21 | 2002-08-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-22 | 2006-02-21 | 2006-08-23 | $7700.00 | Window Closed / Lapsed |