Patent US5339051A successfully refreshed from Google Patents.
US5339051A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Micro-machined resonator oscillator
Assignee: National Technology and Engineering Solutions of Sandia LLC
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Filing: 1993-03-30
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Granted: 1994-08-16
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Expires: 2013-03-30
Abstract
Abstract A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.
Inventors
- 👤 Dale R. Koehler
- 👤 Jeffry J. Sniegowski
- 👤 Hugh M. Bivens
- 👤 Kurt O. Wessendorf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:03
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/05; H03H9/10; H03H9/1007; H03H9/1035
Claims Analysis
Total Claims: 53
Claim 1
Independent Claim
44 words
A resonator-oscillator apparatus, remote from a data receiving apparatus, comprising: a micro-machined housing comprising a resonator-oscillator means with a frequency of oscillation of greater than approximately one (1) MHz; means for activating a power source of said resonator-oscillator means; and sensor apparatus output means.
Claim 2
Dependent Claim
44 words
A resonator-oscillator apparatus, remote from a data receiving apparatus, comprising: a micro-machined housing comprising a resonator-oscillator means with a frequency of oscillation of greater than approximately one (1) MHz; means for activating a power source of said resonator-oscillator means; and sensor apparatus output means.
Claim 3
Dependent Claim
13 words
The invention of claim 1 wherein said resonator-oscillator means comprises quartz resonator-oscillator means.
Claim 4
Dependent Claim
17 words
The invention of claim 1 wherein said activating means comprises circuit means fabricated into said resonator-oscillator means.
Claim 5
Dependent Claim
27 words
The invention of claim 1 further comprising measuring means comprising means for changing a frequency of said resonator-oscillator means caused by environmental changes to said resonator-oscillator means.
Claim 6
Dependent Claim
24 words
The invention of claim 4 wherein said measuring means comprises means for quantifying a perturbance of a frequency of oscillation of said resonator-oscillator means.
Claim 7
Dependent Claim
22 words
The invention of claim 5 wherein said means for quantifying a perturbance comprises means for changing a capacitance of an oscillator circuit.
Claim 8
Dependent Claim
13 words
The invention of claim 4 wherein said measuring means comprises acceleration measurement means.
Claim 9
Dependent Claim
21 words
The invention of claim 7 wherein said acceleration measurement means comprises means for affixing a predetermined mass on a diaphragm means.
Claim 10
Dependent Claim
13 words
The invention of claim 4 wherein said measuring means comprises pressure measurement means.
Claim 11
Dependent Claim
21 words
The invention of claim 9 wherein said pressure measurement means comprises a diaphragm means exposed to an environment to be measured.
Claim 12
Dependent Claim
13 words
The invention of claim 4 wherein said measuring means comprises chemical measurement means.
Claim 13
Dependent Claim
28 words
The invention of claim 11 wherein said chemical measurement means comprises means for coating at least one vibrating surface of said resonator-oscillator means with a chemically sensitive film.
Claim 14
Dependent Claim
13 words
The invention of claim 4 wherein said measuring means comprises temperature measurement means.
Claim 15
Dependent Claim
17 words
The invention of claim 13 wherein said temperature measurement means comprises a frequency-temperature sensitive resonator plate means.
Claim 16
Dependent Claim
22 words
The invention of claim 1 wherein said means for activating further comprises means for activating said power source on a duty cycle.
Claim 17
Dependent Claim
15 words
The invention of claim 1 further comprising an energy source affixed to said resonator-oscillator means.
Claim 18
Dependent Claim
16 words
The invention of claim 1 further comprising an external energy source independent of said resonator-oscillator means.
Claim 19
Dependent Claim
17 words
The invention of claim 1 wherein said sensor apparatus output means comprises means for radiating electro-magnetic energy.
Claim 20
Dependent Claim
16 words
The invention of claim 18 wherein said means for radiating electro-magnetic energy further comprises antenna means.
Claim 21
Dependent Claim
16 words
The invention of claim 1 wherein said sensor apparatus output means comprises sonic wave transmission means.
Claim 22
Dependent Claim
14 words
The invention of claim 1 wherein said sensor apparatus output means comprises tag means.
Claim 23
Dependent Claim
14 words
The invention of claim 1 wherein said sensor apparatus output means comprises clock means.
Claim 24
Independent Claim
56 words
A method of utilizing a resonator-oscillator remote from a data receiving apparatus, the method comprising the steps of: a) providing a micro-machined housing comprising a resonator-oscillator with a frequency of oscillation of greater than approximately one (1) MHz to an object; b) activating a power source of the resonator-oscillator; and c) providing a sensor apparatus output.
Claim 25
Independent Claim
56 words
A method of utilizing a resonator-oscillator remote from a data receiving apparatus, the method comprising the steps of: a) providing a micro-machined housing comprising a resonator-oscillator with a frequency of oscillation of greater than approximately one (1) MHz to an object; b) activating a power source of the resonator-oscillator; and c) providing a sensor apparatus output.
Claim 26
Dependent Claim
24 words
The method of claim 23 wherein the step of providing a micro-machined housing comprising a resonator-oscillator to an object comprises providing a quartz resonator-oscillator.
Claim 27
Dependent Claim
22 words
The method of claim 23 wherein the step of activating a power source comprises integrating a power source circuit into the resonator-oscillator.
Claim 28
Dependent Claim
25 words
The method of claim 23 further comprising the step of measuring a change in frequency of the resonator-oscillator caused by environmental changes to the resonator-oscillator.
Claim 29
Dependent Claim
22 words
The method of claim 26 wherein the step of measuring comprises quantifying a perturbance of a frequency of oscillation of the resonator-oscillator.
Claim 30
Dependent Claim
20 words
The method of claim 27 wherein the step of quantifying a perturbance comprises changing a capacitance of an oscillator circuit.
Claim 31
Dependent Claim
13 words
The method of claim 26 wherein the step of measuring comprises measuring acceleration.
Claim 32
Dependent Claim
19 words
The method of claim 29 wherein the step of measuring acceleration comprises affixing a predetermined mass on a diaphragm.
Claim 33
Dependent Claim
13 words
The method of claim 26 wherein the step of measuring comprises measuring pressure.
Claim 34
Dependent Claim
21 words
The method of claim 31 wherein the step of measuring pressure comprises exposing a diaphragm to an environment to be measured.
Claim 35
Dependent Claim
15 words
The method of claim 26 wherein the step of measuring comprises measuring for a chemical.
Claim 36
Dependent Claim
28 words
The method of claim 33 wherein the step of measuring for a chemical comprises coating at least one vibrating surface of the resonator-oscillator with a chemically sensitive film.
Claim 37
Dependent Claim
14 words
The method of claim 26 wherein the step of measuring comprises measuring a temperature.
Claim 38
Dependent Claim
19 words
The method of claim 35 wherein the step of measuring a temperature comprises utilizing a frequency-temperature sensitive resonator plate.
Claim 39
Dependent Claim
22 words
The method of claim 23 wherein the step of activating a power source comprises activating the power source on a duty cycle.
Claim 40
Dependent Claim
19 words
The method of claim 23 further comprising the step of utilizing an internal energy source affixed to the resonator-oscillator.
Claim 41
Dependent Claim
19 words
The method of claim 23 further comprising the step of utilizing an external energy source independent of the resonator-oscillator.
Claim 42
Dependent Claim
19 words
The method of claim 23 wherein the step of providing a sensor apparatus output comprises providing radiated electro-magnetic energy.
Claim 43
Dependent Claim
18 words
The method of claim 40 wherein the step of providing radiated electro-magnetic energy further comprises utilizing an antenna.
Claim 44
Dependent Claim
19 words
The method of claim 23 wherein the step of providing a sensor apparatus output comprises utilizing sonic wave transmission.
Claim 45
Dependent Claim
18 words
The method of claim 23 wherein the step of providing a sensor apparatus output comprises providing a tag.
Claim 46
Dependent Claim
18 words
The method of claim 23 wherein the step of providing a sensor apparatus output comprises providing a clock.
Claim 47
Dependent Claim
42 words
A method of measuring parameters of and providing for identification of an object, the method comprising the steps of: a) providing the apparatus of claim 1 to an object; b) generating an output from the apparatus indicating at least one predetermined parameter.
Claim 48
Dependent Claim
20 words
The method of claim 45 wherein the step of providing an apparatus comprises providing the apparatus to an animate object.
Claim 49
Dependent Claim
15 words
The method of claim 45 wherein the step of generating an output comprises measuring parameters.
Claim 50
Dependent Claim
18 words
The method of claim 45 wherein the step of generating an output comprises sending data identifying the object.
Claim 51
Dependent Claim
45 words
The method of claim 45 wherein the step of generating an output comprises at least one of the following steps: a) identifying a tire; b) measuring a pressure of the tire; c) measuring a temperature of the tire; and d) counting revolutions of the tire.
Claim 52
Dependent Claim
46 words
The method of claim 45 wherein the step of generating an output comprises at least one of the following steps: a) measuring a pressure in a well; b) measuring acceleration in the well; c) measuring temperature in the well; and d) measuring chemicals in the well.
Claim 53
Dependent Claim
19 words
The invention of claim 45 wherein the step of generating an output comprises monitoring a site for chemical quantification.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-15 | 1998-02-14 | 1998-08-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-15 | 2002-02-14 | 2002-08-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-15 | 2006-02-14 | 2006-08-16 | $7700.00 | Window Closed / Lapsed |