Patent US5338701A successfully refreshed from Google Patents.
US5338701A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for fabrication of w-polycide-to-poly capacitors with high linearity
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1993-11-03
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Granted: 1994-08-16
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Expires: 2013-11-03
Abstract
Abstract A method of forming a polycide-to-polysilicon capacitor simultaneously with a CMOS device with polycide gate is described. Field oxide regions, n-well and p-well regions, and gate oxide regions are formed in and on a silicon substrate. A first layer of polysilicon, having a suitable doping concentration, is formed on the surface of the substrate and the field oxide regions. A layer of silicide is formed over the layer of polysilicon. The layer of silicide is ion implanted in a vertical direction to produce the low voltage coefficient and high linearity. A layer of interpoly oxide is formed over the layer of silicide. The layer of interpoly oxide is densified. A second layer of polysilicon is formed on the surface of the interpoly oxide. The second layer of polysilicon is doped, and then patterned to form the top plate of the capacitor. The layer of interpoly oxide is removed, except in the area under the top plate of the capacitor, where it acts as a capacitor dielectric. The layer of silicide and the layer of polysilicon are patterned to form a polycide bottom plate of the capacitor and to form the polycide gate. The layer of silicide is annealed. The source and drain regions of the CMOS device are formed in the substrate in the regions between the polycide gate and the field oxide regions; and the remaining layers are formed to complete the integrated circuit.
Inventors
- 👤 Shun-Liang Hsu
- 👤 Chun-Yi Shi
- 👤 Mou-Shiung Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 18:57
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
204 words
A method for forming a polycide-to-polysilicon capacitor with a low voltage coefficient and high linearity, in and on a silicon substrate, on an integrated circuit having FET devices which are separated from each other by means of field oxide regions, comprising: forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions; forming a layer of silicide over said layer of polysilicon; ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity; forming a layer of interpoly oxide over said layer of silicide; densifying said layer of interpoly oxide; forming a second layer of polysilicon, on the surface of said layer of interpoly oxide; doping said second layer of polysilicon; patterning said second layer of polysilicon to form the top plate of said capacitor; removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric; patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor; annealing said polycide bottom plate; and forming sidewalls on the sides of said polycide bottom plate.
Claim 2
Independent Claim
204 words
A method for forming a polycide-to-polysilicon capacitor with a low voltage coefficient and high linearity, in and on a silicon substrate, on an integrated circuit having FET devices which are separated from each other by means of field oxide regions, comprising: forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions; forming a layer of silicide over said layer of polysilicon; ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity; forming a layer of interpoly oxide over said layer of silicide; densifying said layer of interpoly oxide; forming a second layer of polysilicon, on the surface of said layer of interpoly oxide; doping said second layer of polysilicon; patterning said second layer of polysilicon to form the top plate of said capacitor; removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric; patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor; annealing said polycide bottom plate; and forming sidewalls on the sides of said polycide bottom plate.
Claim 3
Dependent Claim
37 words
The method of claim 1 wherein said ion implanting is with arsenic, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm 2 at an energy of between about 60 and 120 KeV.
Claim 4
Dependent Claim
11 words
The method of claim 1 wherein said silicide is tungsten silicide.
Claim 5
Independent Claim
22 words
The method of claim I wherein said polycide bottom plate is annealed at a temperature of between about 850° and 1000° C.
Claim 6
Independent Claim
38 words
The method of claim I wherein said ion implanting is with phosphorus, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm 2 , at an energy of between about 60 and 90 KeV.
Claim 7
Dependent Claim
39 words
The method of claim 1 wherein said ion implanting is with boron fluoride, in a concentration of between about 1 E 15 and 5 E 15 atoms/cm 2 , at an energy of between about 50 and 80 KeV.
Claim 8
Dependent Claim
29 words
The method of claim 1 wherein said doping said second layer of polysilicon is by diffusion of POCl 3 at a temperature of between about 800° and 920° C.
Claim 9
Independent Claim
242 words
A method for forming an integrated circuit in and on a silicon substrate, with a polycide-to-polysilicon capacitor with low voltage coefficient and high linearity, and with a CMOS device with polycide gate, comprising: forming field oxide regions, n-well and p-well regions, and gate oxide regions in and on said silicon substrate; forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions; forming a layer of silicide over said layer of polysilicon; ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity; forming a layer of interpoly oxide over said layer of silicide; densifying said layer of interpoly oxide; forming a second layer of polysilicon, on the surface of said layer of interpoly oxide; doping said second layer of polysilicon; patterning said second layer of polysilicon to form the top plate of said capacitor; removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric; patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor and to form said polycide gate; annealing said layer of silicide; forming source and drain regions of said CMOS device in said substrate in the regions between said polycide gate and said field oxide regions; and forming remaining layers to complete said integrated circuit.
Claim 10
Independent Claim
242 words
A method for forming an integrated circuit in and on a silicon substrate, with a polycide-to-polysilicon capacitor with low voltage coefficient and high linearity, and with a CMOS device with polycide gate, comprising: forming field oxide regions, n-well and p-well regions, and gate oxide regions in and on said silicon substrate; forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions; forming a layer of silicide over said layer of polysilicon; ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity; forming a layer of interpoly oxide over said layer of silicide; densifying said layer of interpoly oxide; forming a second layer of polysilicon, on the surface of said layer of interpoly oxide; doping said second layer of polysilicon; patterning said second layer of polysilicon to form the top plate of said capacitor; removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric; patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor and to form said polycide gate; annealing said layer of silicide; forming source and drain regions of said CMOS device in said substrate in the regions between said polycide gate and said field oxide regions; and forming remaining layers to complete said integrated circuit.
Claim 11
Dependent Claim
37 words
The method of claim 8 wherein said ion implanting is with arsenic, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm 2 at an energy of between about 60 and 120 KeV.
Claim 12
Dependent Claim
11 words
The method of claim 8 wherein said silicide is tungsten silicide.
Claim 13
Dependent Claim
22 words
The method of claim 8 wherein said polycide bottom plate is annealed at a temperature of between about 850° and 1000° C.
Claim 14
Dependent Claim
38 words
The method of claim 8 wherein said ion implanting is with phosphorus, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm 2 , at an energy of between about 60 and 90 KeV.
Claim 15
Dependent Claim
39 words
The method of claim 8 wherein said ion implanting is with boron fluoride, in a concentration of between about 1 E 15 and 5 E 15 atoms/cm 2 , at an energy of between about 50 and 80 KeV.
Claim 16
Dependent Claim
29 words
The method of claim 8 wherein said doping said second layer of polysilicon is by diffusion of POCl 3 at a temperature of between about 800° and 920° C.
Claim 17
Independent Claim
213 words
A method for forming a polycide-to-polysilicon capacitor with a low voltage coefficient and high linearity, in and on a silicon substrate, on an integrated circuit having FET devices which are separated from each other by means of field oxide regions, comprising: forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions; forming a layer of silicide over said layer of polysilicon; ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity; patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor; forming a layer of interpoly oxide over said layer of silicide and over exposed areas of said substrate and said field oxide regions; densifying said layer of interpoly oxide; forming a second layer of polysilicon, on said layer of interpoly oxide; doping said second layer of polysilicon; patterning said second layer of polysilicon to form the top plate of said capacitor; removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric; annealing said polycide bottom plate; and forming sidewalls on the sides of said polycide bottom plate.
Claim 18
Independent Claim
213 words
A method for forming a polycide-to-polysilicon capacitor with a low voltage coefficient and high linearity, in and on a silicon substrate, on an integrated circuit having FET devices which are separated from each other by means of field oxide regions, comprising: forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions; forming a layer of silicide over said layer of polysilicon; ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity; patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor; forming a layer of interpoly oxide over said layer of silicide and over exposed areas of said substrate and said field oxide regions; densifying said layer of interpoly oxide; forming a second layer of polysilicon, on said layer of interpoly oxide; doping said second layer of polysilicon; patterning said second layer of polysilicon to form the top plate of said capacitor; removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric; annealing said polycide bottom plate; and forming sidewalls on the sides of said polycide bottom plate.
Claim 19
Dependent Claim
37 words
The method of claim 15 wherein said ion implanting is with arsenic, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm 2 at an energy of between about 60 and 120 KeV.
Claim 20
Dependent Claim
11 words
The method of claim 15 wherein said silicide is tungsten silicide.
Claim 21
Dependent Claim
22 words
The method of claim 15 wherein said polycide bottom plate is annealed at a temperature of between about 850° and 1000° C.
Claim 22
Dependent Claim
38 words
The method of claim 15 wherein said ion implanting is with phosphorus, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm 2 , at an energy of between about 60 and 90 KeV.
Claim 23
Dependent Claim
39 words
The method of claim 15 wherein said ion implanting is with boron fluoride, in a concentration of between about 1 E 15 and 5 E 15 atoms/cm 2 , at an energy of between about 50 and 80 KeV.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-08-15 | 1998-02-14 | 1998-08-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-15 | 2002-02-14 | 2002-08-16 | $3760.00 | Window Closed / Lapsed |
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