US5336368A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for depositing conductive metal traces on diamond
Assignee: General Electric Co
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Filing: 1993-07-08
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Granted: 1994-08-09
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Expires: 2013-07-08
Abstract
Abstract Adherent traces of a carbide-forming conductive metal are produced on a diamond surface, without deposition of carbide in areas to be non-conductive, by depositing an undercoat layer of a non-carbide-forming metal such as palladium, patterning said undercoat layer and then depositing a bond layer of the carbide-forming metal. The undercoat layer and the portion of the bond layer deposited thereon are then removed, typically by etching.
Inventors
- 👤 Charles D. Iacovangelo
- 👤 Elihu C. Jerabek
- 👤 Bradley E. Williams
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:50
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/02; C23C14/024; C23C14/025; C23C14/04; C23C14/06; C23C14/14; C23C14/18; C23C14/185; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/10; H05K3/14; H05K3/143; H05K3/38
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
79 words
A method for depositing conductive metal traces on a diamond surface which comprises: depositing an undercoat layer of a non-carbide-forming metal on at least a portion of said diamond surface, patterning said undercoat layer with a first pattern to expose said diamond surface in the trace-receiving areas thereof, depositing a bond layer of conductive carbide-forming metal on said undercoat layer and the exposed diamond surface, and removing said undercoat layer and the portion of said top layer deposited thereon.
Claim 2
Independent Claim
79 words
A method for depositing conductive metal traces on a diamond surface which comprises: depositing an undercoat layer of a non-carbide-forming metal on at least a portion of said diamond surface, patterning said undercoat layer with a first pattern to expose said diamond surface in the trace-receiving areas thereof, depositing a bond layer of conductive carbide-forming metal on said undercoat layer and the exposed diamond surface, and removing said undercoat layer and the portion of said top layer deposited thereon.
Claim 3
Dependent Claim
17 words
A method according to claim 1 wherein the diamond is polycrystalline diamond prepared by chemical vapor deposition.
Claim 4
Dependent Claim
15 words
A method according to claim 2 wherein contaminants are initially removed from the diamond surface.
Claim 5
Dependent Claim
23 words
A method according to claim 1 wherein the non-carbide-forming metal is aluminum, copper, nickel, silver, gold or palladium or alloys or mixtures thereof.
Claim 6
Dependent Claim
12 words
A method according to claim 4 wherein the non-carbide-forming metal is palladium.
Claim 7
Dependent Claim
17 words
A method according to claim 4 wherein the thickness of the undercoat layer is about 1000-5000 Å.
Claim 8
Dependent Claim
14 words
A method according to claim 4 wherein the undercoat layer is deposited by sputtering.
Claim 9
Dependent Claim
23 words
A method according to claim 1 wherein the carbide-forming metal is titanium, tungsten, molybdenum, chromium, niobium or tantalum or alloys or mixtures thereof.
Claim 10
Dependent Claim
12 words
A method according to claim 8 wherein the carbide-forming metal is titanium.
Claim 11
Dependent Claim
17 words
A method according to claim 8 wherein the thickness of the bond layer is about 500-2000 Å.
Claim 12
Dependent Claim
14 words
A method according to claim 8 wherein the bond layer is deposited by sputtering.
Claim 13
Dependent Claim
19 words
A method according to claim 8 wherein at least one further metal layer is deposited over the bond layer.
Claim 14
Dependent Claim
19 words
A method according to claim 12 wherein the carbide-forming metal is titanium and the further metal layer is gold.
Claim 15
Dependent Claim
15 words
A method according to claim 1 wherein removal of the metal layers is by etching.
Claim 16
Dependent Claim
22 words
A method according to claim 14 wherein the bond layer is patterned for etching, using a negative of the undercoat layer pattern.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-08 | 1998-02-07 | 1998-08-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-08 | 2002-02-07 | 2002-08-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-08 | 2006-02-07 | 2006-08-09 | $7700.00 | Window Closed / Lapsed |