Patent US5330607A successfully refreshed from Google Patents.
US5330607A
Expired / Lapsed
US
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Sacrificial metal etchback system
Assignee: Aixtron Inc
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Filing: 1992-08-27
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Granted: 1994-07-19
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Expires: 2012-08-27
Abstract
Abstract An etchback apparatus for use in integrated circuit processing after via fill to remove excess metal and leave plugged vias, has a sacrificial ring with a surface consisting substantially of a metal that etches much like the metal used to fill the vias. The excess surface area in the process provides sacrificial metal so microloading is avoided. he metal used to fill the vias.
Inventors
- 👤 Ronald S. Nowicki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:27
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; Y; Y10; Y10S; Y10S156/00; Y10S156/915
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
137 words
An apparatus for etchback processing after via fill in integrated circuit manufacturing comprising: a base member for supporting a substrate during processing, the substrate having a surface to be etched comprising at lest two materials, one of which is a metal that comprises less of the surface area of the substrate than the other materials, and the others of which are nonmetals; a sacrificial metal structure supported by the base member and having a central opening of the shape of the periphery of the substrate, providing a nesting recess wherein the substrate may be placed and removed; and plasma generation apparatus for creating a plasma over the substrate and the sacrificial metal structure; wherein the sacrificial metal structure has a surface exposed to plasma consisting substantially of a refractory metal from Group VI of the periodic table.
Claim 2
Independent Claim
137 words
An apparatus for etchback processing after via fill in integrated circuit manufacturing comprising: a base member for supporting a substrate during processing, the substrate having a surface to be etched comprising at lest two materials, one of which is a metal that comprises less of the surface area of the substrate than the other materials, and the others of which are nonmetals; a sacrificial metal structure supported by the base member and having a central opening of the shape of the periphery of the substrate, providing a nesting recess wherein the substrate may be placed and removed; and plasma generation apparatus for creating a plasma over the substrate and the sacrificial metal structure; wherein the sacrificial metal structure has a surface exposed to plasma consisting substantially of a refractory metal from Group VI of the periodic table.
Claim 3
Dependent Claim
27 words
An apparatus as in claim 1 wherein the substrate is a wafer in an integrated circuit manufacturing process and the sacrificial metal structure comprises a circular ring.
Claim 4
Dependent Claim
16 words
An apparatus as in claim 1 wherein the surface exposed to plasma comprises substantially tungsten metal.
Claim 5
Independent Claim
192 words
A system for etchback processing after via fill in integrated circuit manufacturing, comprising: a chamber for confining the processing operations; a sealable opening through a wall of the chamber for loading and unloading substrates; a gas supply interfaced to the chamber for loading and unloading substrates; vacuum pumping apparatus attached to the chamber for evacuating atmospheric gases and for pumping the processing gases during processing; a base member within the chamber for supporting a substrate during processing, the substrate having a surface to be etched comprising at least two materials, one of which is a metal that comprises less of the surface area of the substrate than the other materials, and the others of which are non-metals; a sacrificial metal structure supported by the base member and having a central opening of the shape of the periphery of the substrate, providing a nesting recess wherein the substrate may be placed and removed; and plasma generation apparatus for creating a plasma over the substrate and the sacrificial metal structure; wherein the sacrificial metal structure has a surface exposed to plasma consisting substantially of a refractory metal from Group VI of the periodic table.
Claim 6
Independent Claim
192 words
A system for etchback processing after via fill in integrated circuit manufacturing, comprising: a chamber for confining the processing operations; a sealable opening through a wall of the chamber for loading and unloading substrates; a gas supply interfaced to the chamber for loading and unloading substrates; vacuum pumping apparatus attached to the chamber for evacuating atmospheric gases and for pumping the processing gases during processing; a base member within the chamber for supporting a substrate during processing, the substrate having a surface to be etched comprising at least two materials, one of which is a metal that comprises less of the surface area of the substrate than the other materials, and the others of which are non-metals; a sacrificial metal structure supported by the base member and having a central opening of the shape of the periphery of the substrate, providing a nesting recess wherein the substrate may be placed and removed; and plasma generation apparatus for creating a plasma over the substrate and the sacrificial metal structure; wherein the sacrificial metal structure has a surface exposed to plasma consisting substantially of a refractory metal from Group VI of the periodic table.
Claim 7
Dependent Claim
27 words
A system as in claim 4 wherein the substrate is a wafer in an integrated circuit manufacturing process and the sacrificial metal structure comprises a circular ring.
Claim 8
Dependent Claim
16 words
A system as in claim 4 wherein the surface exposed to plasma comprise substantially tungsten metal.
Claim 9
Dependent Claim
186 words
In a system for etchback processing of a substrate after via fill in integrated circuit fabrication, an apparatus for eliminating microloading comprising: a cathode and an anode for establishing an alternating electrical field in the system, the cathode and the anode configured such that the substrate can be placed therebetween for etching back the surface of the substrate, the surface to be etched comprising at least two materials, one of which is a metal that comprises less of the surface area of the substrate than the other materials, and the others of which are non-metals; wherein one of the cathode and the anode comprise a support surface for the substrate, the one of the cathode and the anode hereinafter referred to as support; and a sacrificial metal structure contacting the support, having an exterior consisting substantially of a refractory metal from Group VI of the periodic table, and having a central opening of the shape of the periphery of the substrate, providing a nesting recess wherein the substrate may be placed and removed, the sacrificial metal structure for providing the metal as sacrificial metal during processing.
Claim 10
Dependent Claim
186 words
In a system for etchback processing of a substrate after via fill in integrated circuit fabrication, an apparatus for eliminating microloading comprising: a cathode and an anode for establishing an alternating electrical field in the system, the cathode and the anode configured such that the substrate can be placed therebetween for etching back the surface of the substrate, the surface to be etched comprising at least two materials, one of which is a metal that comprises less of the surface area of the substrate than the other materials, and the others of which are non-metals; wherein one of the cathode and the anode comprise a support surface for the substrate, the one of the cathode and the anode hereinafter referred to as support; and a sacrificial metal structure contacting the support, having an exterior consisting substantially of a refractory metal from Group VI of the periodic table, and having a central opening of the shape of the periphery of the substrate, providing a nesting recess wherein the substrate may be placed and removed, the sacrificial metal structure for providing the metal as sacrificial metal during processing.
Claim 11
Dependent Claim
27 words
An apparatus as in claim 7 wherein the substrate is a wafer in an integrated circuit manufacturing process and the sacrificial metal structure comprises a circular ring.
Claim 12
Dependent Claim
16 words
An apparatus as in claim 7 wherein the surface exposed to plasma comprises substantially tungsten metal.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-18 | 1998-01-17 | 1998-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-18 | 2002-01-17 | 2002-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-18 | 2006-01-17 | 2006-07-19 | $7700.00 | Window Closed / Lapsed |