US5328559A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Groove width trimming
Assignee: Measurement Specialties Inc
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Filing: 1992-09-08
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Granted: 1994-07-12
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Expires: 2012-09-08
Abstract
Abstract A method for making a groove of a precise width in a substrate material. The groove may have any cross-sectional shape. The groove is formed by initially etching the substrate material. The groove width is then measured. The measured groove width is compared to the desired groove width. Oxide is grown on the substrate in the region of the groove to adjust the width of the groove. The oxide may or may not be grown with the original etchant mask left on the substrate. Depending on whether it is desired to increase or decrease the groove width, the oxide is or is not removed. The process for increasing or decreasing groove width may be repeated any number of times as necessary to achieve a proper groove width. A number of grooves may be formed using these processes. For many applications, the groove will be covered with a plate or other type of cap to define a channel as used in flow restrictors. Where groove width is difficult or impossible to measure, the cross-sectional area of the channel formed by capping a groove formed in a substrate may be varied by growing, then removing or leaving as appropriate, an oxide layer on the interior channel surfaces. The process is particularly useful for making reproducible flow restrictors in a silicon substrate.
Inventors
- 👤 John J. Jerman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 17:52
CPC Classifications
F; F15; F15C; F15C5/00; H; H10; H10P; H10P50/00
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
49 words
A method for forming a groove in a substrate, comprising: forming a groove in the substrate extending from a principal surface of the substrate; measuring a width of the groove; and then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness.
Claim 2
Independent Claim
49 words
A method for forming a groove in a substrate, comprising: forming a groove in the substrate extending from a principal surface of the substrate; measuring a width of the groove; and then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness.
Claim 3
Dependent Claim
52 words
A method as in claim 1, wherein the step of forming further comprises: providing a masking material on the principal surface of the substrate, the masking material defining an opening at a location at which the groove is to be formed; and applying an etchant to the opening, thereby forming a groove.
Claim 4
Dependent Claim
25 words
A method as in claim 2 further comprising removing the masking material from the principal surface of the substrate prior to the step of oxidizing.
Claim 5
Dependent Claim
16 words
A method as in claim 3 further comprising removing at least part of the oxidized portion.
Claim 6
Dependent Claim
28 words
A method as in claim 4 wherein the steps of measuring and oxidizing are performed a plurality of times until a predetermined width of the groove is measured.
Claim 7
Dependent Claim
13 words
A method as in claim 5 wherein a plurality of grooves are formed.
Claim 8
Dependent Claim
26 words
A method as in claim 6 further comprising mounting a plate to the principal surface of the substrate thereby covering the groove and defining a channel.
Claim 9
Dependent Claim
13 words
A method as in claim 1 wherein the groove is V-shaped in cross-section.
Claim 10
Dependent Claim
13 words
A method as in claim 1 wherein the groove is U-shaped in cross-section.
Claim 11
Dependent Claim
13 words
A method as in claim 1 wherein the groove is rectangular-shaped in cross-section.
Claim 12
Dependent Claim
13 words
A method as in claim 1 wherein a plurality of grooves are formed.
Claim 13
Dependent Claim
23 words
A method as in claim 1 further comprising oxidizing the principal surface in the vicinity of the groove after performing the measuring step.
Claim 14
Dependent Claim
16 words
A method as in claim 2 further comprising removing at least part of the oxidized portion.
Claim 15
Dependent Claim
29 words
A method as in claim 2 wherein the masking material is a nitride, and wherein after the etchant is applied the nitride mask overhangs the edges of the groove.
Claim 16
Dependent Claim
17 words
A method as in claim 2 wherein the masking material is an oxide of the substrate material.
Claim 17
Independent Claim
67 words
A method for forming a groove in a substrate, comprising: forming a groove in the substrate extending from a principal surface of the substrate; measuring a width of the groove; then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness; and mounting a plate to the principal surface of the substrate thereby covering the groove and defining a channel.
Claim 18
Independent Claim
67 words
A method for forming a groove in a substrate, comprising: forming a groove in the substrate extending from a principal surface of the substrate; measuring a width of the groove; then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness; and mounting a plate to the principal surface of the substrate thereby covering the groove and defining a channel.
Claim 19
Independent Claim
57 words
A method for forming a groove in a substrate, comprising: forming a groove in the substrate extending from a principal surface of the substrate; measuring a width of the groove; then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness; and removing at least part of the oxidized portion.
Claim 20
Independent Claim
57 words
A method for forming a groove in a substrate, comprising: forming a groove in the substrate extending from a principal surface of the substrate; measuring a width of the groove; then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness; and removing at least part of the oxidized portion.
Claim 21
Dependent Claim
28 words
A method as in claim 17 wherein the steps of measuring and oxidizing are performed a plurality of times until a predetermined width of the groove is measured.
Claim 22
Dependent Claim
26 words
A method as in claim 17 further comprising mounting a plate to the principal surface of the substrate thereby covering the groove and defining a channel.
Claim 23
Independent Claim
84 words
A method for forming a groove in a substrate, comprising: providing a masking material on the principal surface of the substrate, the masking material having an opening defining a location at which the groove is to be formed; applying an etchant to the opening, thereby forming a groove; measuring a width of the groove; then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness; and removing the masking material from the principal surface of the substrate.
Claim 24
Independent Claim
84 words
A method for forming a groove in a substrate, comprising: providing a masking material on the principal surface of the substrate, the masking material having an opening defining a location at which the groove is to be formed; applying an etchant to the opening, thereby forming a groove; measuring a width of the groove; then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness; and removing the masking material from the principal surface of the substrate.
Claim 25
Independent Claim
92 words
A method for forming a groove in a substrate, comprising: providing a masking material on the principal surface of the substrate, the masking material defining an opening at a location at which the groove is to be formed; applying an etchant to the opening, thereby forming a groove; measuring a width of the groove; then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness; removing at least part of the oxidized portion; and removing the masking material from the principal surface of the substrate.
Claim 26
Independent Claim
92 words
A method for forming a groove in a substrate, comprising: providing a masking material on the principal surface of the substrate, the masking material defining an opening at a location at which the groove is to be formed; applying an etchant to the opening, thereby forming a groove; measuring a width of the groove; then oxidizing an exposed portion of a surface of the substrate in the groove to a predetermined thickness; removing at least part of the oxidized portion; and removing the masking material from the principal surface of the substrate.
Claim 27
Dependent Claim
26 words
A method as in claim 21 further comprising mounting a plate to the principal surface of the substrate, thereby covering the groove and defining a channel.
Claim 28
Independent Claim
56 words
A method for forming a flow channel device, comprising: forming a groove in a substrate; capping the groove to form a channel; measuring a first flow rate of a fluid passing through the channel; oxidizing a portion of interior surfaces of the channel; and measuring a second flow rate of the fluid passing through the channel.
Claim 29
Independent Claim
56 words
A method for forming a flow channel device, comprising: forming a groove in a substrate; capping the groove to form a channel; measuring a first flow rate of a fluid passing through the channel; oxidizing a portion of interior surfaces of the channel; and measuring a second flow rate of the fluid passing through the channel.
Claim 30
Dependent Claim
19 words
A method as in claim 23 further comprising removing the oxidized portions of the interior surfaces of the channel.
Claim 31
Dependent Claim
30 words
A method as in claim 24 wherein either the step of oxidizing or the step of removing is performed a plurality of times until a predetermined flow rate is achieved.
Claim 32
Dependent Claim
13 words
A method as in claim 23 wherein a plurality of channels are formed.
Claim 33
Dependent Claim
62 words
A flow channel device comprising: a substrate including a groove formed in a principal surface of the substrate, an oxide layer of the substrate material being formed on at least one wall of the groove; and a plate covering the principal surface of the substrate, thereby defining a channel, the channel having at least two ports, each communicating external to the channel.
Claim 34
Dependent Claim
62 words
A flow channel device comprising: a substrate including a groove formed in a principal surface of the substrate, an oxide layer of the substrate material being formed on at least one wall of the groove; and a plate covering the principal surface of the substrate, thereby defining a channel, the channel having at least two ports, each communicating external to the channel.
Claim 35
Dependent Claim
42 words
A flow channel device as in claim 27 having a plurality of grooves formed in the principal surface of the substrate to form a plurality of channels, each channel having at least two ports to communicate with points external to the channel.
Claim 36
Dependent Claim
15 words
A flow channel device as in claim 27 wherein the groove has a V-shaped cross-section.
Claim 37
Dependent Claim
15 words
A flow channel device as in claim 27 wherein the groove has a rectangular-shaped cross-section.
Claim 38
Dependent Claim
15 words
A flow channel device as in claim 27 wherein the groove has a U-shaped cross-section.
Claim 39
Dependent Claim
38 words
A flow channel device as in claim 27 wherein a first port is formed at a first end of the groove and a second port is formed at a second end of the groove opposite the first end.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-11 | 1998-01-10 | 1998-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-11 | 2002-01-10 | 2002-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-11 | 2006-01-10 | 2006-07-12 | $7700.00 | Window Closed / Lapsed |