US5327224A
Expired / Lapsed
US
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Semiconductor device with hydrogen ion intercepting layer
Assignee: Renesas Electronics Corp
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Filing: 1992-10-14
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Granted: 1994-07-05
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Expires: 2012-10-14
Abstract
Abstract A thin first insulating oxide film is formed on a semiconductor substrate. A thick second insulating oxide film is formed on a semiconductor substrate. A first polysilicon resistance film is formed on the first insulating oxide film. A second polysilicon resistance film is formed on the second insulating oxide film. An insulating protection film, which contains a large amount of hydrogen ion and covers the first polysilicon resistance film, second polysilicon resistance film, first electrode and second electrode, is formed on the semiconductor substrate. A hydrogen ion intercepting film, which prevents passage of hydrogen ion, is interposed between the first insulating oxide film and the first polysilicon resistance film and between the second insulating oxide film and second polysilicon resistance film.
Inventors
- 👤 Masaaki Ikegami
- 👤 Tetsuo Higuchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 14:05
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/47; H10D84/00; H10D84/201; H10D84/204; H10D84/209
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
194 words
A semiconductor device, comprising: a semiconductor substrate; a first insulating oxide film provided on said semiconductor substrate; a second insulating oxide film provided on said semiconductor substrate, contiguous to said first insulating oxide film and having a film thickness larger than that of said first insulating oxide film; a first polysilicon resistance film provided on said first insulating oxide film; a second polysilicon resistance film provided on said second insulating oxide film; a first electrode provided on said semiconductor substrate and electrically connected to said first polysilicon resistance film; a second electrode provided on said semiconductor substrate and electrically connected to said second polysilicon resistance film; an insulating protection film provided on said semiconductor substrate and covering said first polysilicon resistance film, said second polysilicon resistance film, said first electrode and said second electrode; and hydrogen ion intercepting films which prevent passage of hydrogen ion interposed between said first insulating oxide film and said first polysilicon resistance film and bounded by opposite sides of said first polysilicon resistance film, and between said second insulating oxide film and said second polysilicon resistance film and bounded by opposite sides of said first polysilicon resistance film, respectively.
Claim 2
Dependent Claim
194 words
A semiconductor device, comprising: a semiconductor substrate; a first insulating oxide film provided on said semiconductor substrate; a second insulating oxide film provided on said semiconductor substrate, contiguous to said first insulating oxide film and having a film thickness larger than that of said first insulating oxide film; a first polysilicon resistance film provided on said first insulating oxide film; a second polysilicon resistance film provided on said second insulating oxide film; a first electrode provided on said semiconductor substrate and electrically connected to said first polysilicon resistance film; a second electrode provided on said semiconductor substrate and electrically connected to said second polysilicon resistance film; an insulating protection film provided on said semiconductor substrate and covering said first polysilicon resistance film, said second polysilicon resistance film, said first electrode and said second electrode; and hydrogen ion intercepting films which prevent passage of hydrogen ion interposed between said first insulating oxide film and said first polysilicon resistance film and bounded by opposite sides of said first polysilicon resistance film, and between said second insulating oxide film and said second polysilicon resistance film and bounded by opposite sides of said first polysilicon resistance film, respectively.
Claim 3
Dependent Claim
21 words
A semiconductor device according to claim 1, wherein said hydrogen ion intercepting film has a film thickness of about 30-100 nm.
Claim 4
Dependent Claim
18 words
A semiconductor device according to claim 1, wherein said hydrogen ion intercepting film contains a silicon nitride film.
Claim 5
Dependent Claim
33 words
A semiconductor device according to claim 1, wherein said first insulating oxide film has a film thickness of 50-100 nm, and said second insulating oxide film has a film thickness of 800-1500 nm.
Claim 6
Dependent Claim
204 words
A semiconductor device comprising: a semiconductor substrate; a first insulating oxide film provided on said semiconductor substrate; a second insulating oxide film provided on said semiconductor substrate, contiguous to said first insulating oxide film and having a film thickness larger than that of a first insulating oxide film; a first polysilicon resistance film provided on and in contact with said first insulating oxide film; a second polysilicon resistance film provided on and in contact with said second insulating oxide film; a hydrogen ion intercepting film which prevents passage of hydrogen ion, provided on said semiconductor substrate and covering said first polysilicon resistance film, and said second polysilicon resistance film; said hydrogen ion intercepting film being provided with a first opening for partially exposing a surface of said first polysilicon resistance film and a second opening for partially exposing a surface of said second polysilicon resistance film; a film electrode electrically connected through said first opening to said first polysilicon resistance film; a second electrode electrically connected through said first opening to said polysilicon resistance film; and an insulating protection film disposed on said semiconductor substrate and covering said first polysilicon resistance film, said second polysilicon resistance film, said first electrode and said second electrode.
Claim 7
Dependent Claim
204 words
A semiconductor device comprising: a semiconductor substrate; a first insulating oxide film provided on said semiconductor substrate; a second insulating oxide film provided on said semiconductor substrate, contiguous to said first insulating oxide film and having a film thickness larger than that of a first insulating oxide film; a first polysilicon resistance film provided on and in contact with said first insulating oxide film; a second polysilicon resistance film provided on and in contact with said second insulating oxide film; a hydrogen ion intercepting film which prevents passage of hydrogen ion, provided on said semiconductor substrate and covering said first polysilicon resistance film, and said second polysilicon resistance film; said hydrogen ion intercepting film being provided with a first opening for partially exposing a surface of said first polysilicon resistance film and a second opening for partially exposing a surface of said second polysilicon resistance film; a film electrode electrically connected through said first opening to said first polysilicon resistance film; a second electrode electrically connected through said first opening to said polysilicon resistance film; and an insulating protection film disposed on said semiconductor substrate and covering said first polysilicon resistance film, said second polysilicon resistance film, said first electrode and said second electrode.
Claim 8
Dependent Claim
21 words
A semiconductor device according to claim 5, wherein said hydrogen ion intercepting film has a film thickness of about 30-100 nm.
Claim 9
Dependent Claim
18 words
A semiconductor device according to claim 5, wherein said hydrogen ion intercepting film is a silicon nitride film.
Claim 10
Dependent Claim
33 words
A semiconductor device according to claim 5, wherein said first insulating oxide film has a film thickness of 50-100 nm, and said second insulating oxide film has a film thickness of 800-1500 nm.
Claim 11
Dependent Claim
132 words
A semiconductor device comprising: a semiconductor substrate; a first insulating oxide film provided on said semiconductor substrate; a second insulating oxide film provided on said semiconductor substrate, contiguous to said first insulating oxide film and having a film thickness larger than that of said first insulating oxide film; a first polysilicon resistance film provided on said first insulating oxide film; a second polysilicon resistance film provided on said second insulation oxide film; a third insulating oxide film provided on said substrate and covering said first and second polysilicon resistance films; and a hydrogen ion intercepting film which prevents passage of hydrogen ion, provided on said third insulating oxide film and covering at least a portion of said first polysilicon resistance film and at least a portion of said second polysilicon resistance film.
Claim 12
Dependent Claim
132 words
A semiconductor device comprising: a semiconductor substrate; a first insulating oxide film provided on said semiconductor substrate; a second insulating oxide film provided on said semiconductor substrate, contiguous to said first insulating oxide film and having a film thickness larger than that of said first insulating oxide film; a first polysilicon resistance film provided on said first insulating oxide film; a second polysilicon resistance film provided on said second insulation oxide film; a third insulating oxide film provided on said substrate and covering said first and second polysilicon resistance films; and a hydrogen ion intercepting film which prevents passage of hydrogen ion, provided on said third insulating oxide film and covering at least a portion of said first polysilicon resistance film and at least a portion of said second polysilicon resistance film.
Claim 13
Dependent Claim
114 words
A semiconductor device according to claim 9, wherein said third insulating oxide film and said hydrogen ion intercepting film being provided with a first opening for partially exposing a surface of said first polysilicon resistance film and a second opening for partially exposing a surface of said second polysilicon resistance film and further comprising: a first electrode electrically connected through said first opening to said first polysilicon resistance film; a second electrode electrically connected through said second opening to said second polysilicon resistance film; and an insulation protection film disposed on said semiconductor substrate and covering said first polysilicon resistance film, said second polysilicon resistance film, and said first electrode and said second electrode.
Claim 14
Dependent Claim
21 words
A semiconductor device according to claim 9, wherein said hydrogen ion intercepting film has a film thickness of about 30-100 nm.
Claim 15
Dependent Claim
18 words
A semiconductor device according to claim 9, wherein said hydrogen ion intercepting film is a silicon nitride film.
Claim 16
Dependent Claim
33 words
A semiconductor device according to claim 9, wherein said first insulating oxide film has a film thickness of 50-100 nm, and said second insulating oxide film has a film thickness of 800-1500 nm.
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