Patent US5310450A successfully refreshed from Google Patents.
US5310450A
Expired / Lapsed
US
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Method of making an acceleration sensor
Assignee: Robert Bosch GmbH
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Filing: 1992-06-17
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Granted: 1994-05-10
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Expires: 2012-06-17
Abstract
Abstract A method of making acceleration sensors with integrated measurement of internal pressure includes connecting multiple plates to each other, thereby defining internal cavities. The tightness of these connections or bonds is checked and controlled during the manufacturing process. The plates define membrane portions adjacent each cavity, the membranes deforming in accordance with the internal pressure in the adjacent cavity. Preferably, the internal pressure of the sensor is measurable by detecting deformation of a sensor wall which defines a membrane.
Inventors
- 👤 Michael Offenberg
- 👤 Martin Willmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 08:32
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828; Y; Y10; Y10S; Y10S148/00; Y10S148/159
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
67 words
Method of making an acceleration sensor, comprising connecting together at least an upper plate (3) and a lower plate (2), and forming a cavity (4) between said plates, in such a way that at least one of said plates (2, 3) defines a membrane (5) which deforms in response to an internal pressure in said cavity, thereby facilitating immediate detection of any faulty connection between said plates.
Claim 2
Dependent Claim
67 words
Method of making an acceleration sensor, comprising connecting together at least an upper plate (3) and a lower plate (2), and forming a cavity (4) between said plates, in such a way that at least one of said plates (2, 3) defines a membrane (5) which deforms in response to an internal pressure in said cavity, thereby facilitating immediate detection of any faulty connection between said plates.
Claim 3
Dependent Claim
83 words
Method of making an acceleration sensor, comprising connecting together at least an upper plate (24), a lower plate (21), and at least one intermediate plate (22, 23), and forming a cavity (26, 27) between said plates, in such a way that at least one of said plates (22,23) defines a membrane (5) which deforms in response to an internal pressure in said cavity, and forming respective openings (7) adjacent each membrane (5), so that all of said membranes (5) are accessible from outside.
Claim 4
Dependent Claim
83 words
Method of making an acceleration sensor, comprising connecting together at least an upper plate (24), a lower plate (21), and at least one intermediate plate (22, 23), and forming a cavity (26, 27) between said plates, in such a way that at least one of said plates (22,23) defines a membrane (5) which deforms in response to an internal pressure in said cavity, and forming respective openings (7) adjacent each membrane (5), so that all of said membranes (5) are accessible from outside.
Claim 5
Dependent Claim
14 words
Method according to claim 1, further comprising forming said cavity (4) adjacent multiple plates.
Claim 6
Dependent Claim
16 words
Method according to claim 1, further comprising providing a sensor element (1) inside said cavity (4).
Claim 7
Dependent Claim
33 words
Method according to claim 1, comprising forming at least two of said cavities (4), of which merely a portion have a membrane, and providing sensor elements (1) in a portion without any membrane.
Claim 8
Dependent Claim
15 words
Method according to claim 1, wherein said plates are processed by masking and etching steps.
Claim 9
Dependent Claim
31 words
Method according to claim 1, comprising providing an intermediate plate (8) between said lower plate (2) and said upper plate (3), and forming said sensor element (1) from said intermediate plate.
Claim 10
Dependent Claim
31 words
Method according to claim 7, comprising forming at least one further cavity (9), and forming a membrane (5) in said intermediate plate (8) adjacent said at least one further cavity (9).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-09 | 1997-11-08 | 1998-05-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-09 | 2001-11-08 | 2002-05-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-09 | 2005-11-08 | 2006-05-10 | $7700.00 | Window Closed / Lapsed |