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US5294818A
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MISFET including GaAs substrate and a Group II-VI gate insulator
Assignee: HIRAOKA HI LABORATORY Co Ltd A CORP OF JAPAN
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Filing: 1992-07-08
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Granted: 1994-03-15
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Expires: 2012-07-08
Abstract
Abstract A MISFET includes a GaAs substrate, a gate insulating film of a II-VI group compound including Zn, Mg, S, and Se epitaxially grown on the GaAs substrate, and a gate electrode formed on the gate insulating film.
Inventors
- 👤 Shigeo Fujita
- 👤 Shizuo Fujita
- 👤 Susumu Fukuda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:06
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/66; H10D64/68; H10D64/691; H10D30/00; H10D30/60
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
35 words
A MISFET comprising: GaAs substrate, a gate insulating film of a II-VI group compound including Zn, Mg, S, and Se, epitaxially grown on said substrate, and a gate electrode formed on said gate insulating film.
Claim 2
Dependent Claim
35 words
A MISFET comprising: GaAs substrate, a gate insulating film of a II-VI group compound including Zn, Mg, S, and Se, epitaxially grown on said substrate, and a gate electrode formed on said gate insulating film.
Claim 3
Dependent Claim
38 words
The MISFET according to claim 1, wherein said gate insulating film is formed of a II-VI group compound of Zn 1-x Mg x S y Se 1-y , with a composition within the range of 0.01≲×≲0.4 and 0≦y≲0.6.
Claim 4
Dependent Claim
18 words
The MISFET according to claim 1, wherein said gate insulating film has a lattice matching said GaAs substrate.
Claim 5
Dependent Claim
18 words
The MISFET according to claim s, wherein said gate insulating film has a lattice matching said GaAs substrate.
References Cited (Backward Citations)
US4160261A
Cited
US4317127A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-14 | 1997-09-13 | 1998-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-14 | 2001-09-13 | 2002-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-14 | 2005-09-13 | 2006-03-15 | $7700.00 | Window Closed / Lapsed |