US5293516A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiprobe apparatus
Assignee: International Business Machines Corp
•
Filing: 1992-01-28
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Granted: 1994-03-08
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Expires: 2012-01-28
Abstract
Abstract A multiprobe apparatus for probing a device having a plurality of contacts includes a holder for holding the device in a fixed position; a plurality of electrically conducting elongated probes, each probe being adapted for electrical communication with a respective one of the contacts by tangential linear contact along the length of the probe; and a probe support for supporting the probes and for maintaining the probes in electrical communication with the contacts.
Inventors
- 👤 Jean-Claude Fouere
- 👤 Kyong-Min Kim
- 👤 Pavel Smetana
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:03
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
164 words
A multiprobe apparatus for probing a device having a plurality of contacts, comprising: a plurality of electrically conducting elongated probes, each probe comprising a wire of circular cross section, and each probe being adapted for electrical communication with a respective one of said contacts by tangential linear contact along the length of the probe; a probe support comprising a silicon wafer having <100> orientation, said silicon wafer having a plurality of grooves along the <110> direction, each groove corresponding to a respective one of said contacts, and each groove having a respective one of said probes disposed therein for supporting said probes and for maintaining said probes in electrical communication with said contacts; and holding means having a holding groove for fitting said device and said probe support with said probes therein, wherein said holding groove, in conjunction with the tangential linear contact of said probes with said contacts, allows said contacts to be properly contacted by said probes by alignment in one dimension.
Claim 2
Dependent Claim
164 words
A multiprobe apparatus for probing a device having a plurality of contacts, comprising: a plurality of electrically conducting elongated probes, each probe comprising a wire of circular cross section, and each probe being adapted for electrical communication with a respective one of said contacts by tangential linear contact along the length of the probe; a probe support comprising a silicon wafer having <100> orientation, said silicon wafer having a plurality of grooves along the <110> direction, each groove corresponding to a respective one of said contacts, and each groove having a respective one of said probes disposed therein for supporting said probes and for maintaining said probes in electrical communication with said contacts; and holding means having a holding groove for fitting said device and said probe support with said probes therein, wherein said holding groove, in conjunction with the tangential linear contact of said probes with said contacts, allows said contacts to be properly contacted by said probes by alignment in one dimension.
Claim 3
Dependent Claim
19 words
A multiprobe apparatus according to claim 1, wherein said probes are sandwiched between said contacts and said probe support.
Claim 4
Dependent Claim
15 words
A multiprobe apparatus according to claim 1, wherein said grooves are V-shaped in cross section.
Claim 5
Dependent Claim
23 words
A multiprobe apparatus according to claim 1, wherein each of said grooves comprises two sidewalls along the (111) plane of said silicon wafer.
Claim 6
Dependent Claim
25 words
A multiprobe apparatus according to claim 1, wherein said probes comprise a material which is at least as soft as said contacts of said device.
Claim 7
Dependent Claim
12 words
A multiprobe apparatus according to claim 5, wherein said probes comprise gold.
Claim 8
Dependent Claim
13 words
A multiprobe apparatus according to claim 6, wherein said grooves are gold plated.
Claim 9
Dependent Claim
15 words
A multiprobe apparatus according to claim 1, wherein said probes are bonded into said grooves.
Claim 10
Dependent Claim
14 words
A multiprobe apparatus according to claim 1, wherein said holding means comprises vacuum means.
Claim 11
Dependent Claim
19 words
A multiprobe apparatus according to claim 1, further including temperature controlling means for controlling the temperature of the device.
Claim 12
Dependent Claim
20 words
A multiprobe apparatus according to claim 10, wherein said temperature controlling means comprises a heatsink having a temperature controlled liquid.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-07 | 1997-09-06 | 1998-03-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-07 | 2001-09-06 | 2002-03-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-07 | 2005-09-06 | 2006-03-08 | $7700.00 | Window Closed / Lapsed |