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US5293336A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor memory device and method for manufacturing the same

Assignee: Toshiba Corp
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Filing: 1991-10-29
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Granted: 1994-03-08
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Expires: 2011-10-29
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Abstract

Abstract A semiconductor memory device has a memory cell composed of a select MOS transistor and information storage capacitor and a peripheral circuit composed of a MOS transistor formed at a peripheral side of the memory cell, these transistors being formed in the surface portion of a first conductivity type semiconductor substrate. In the semiconductor memory device, the gate oxide film of the select MOS transistor is different in thickness from the gate oxide film of the MOS transistor of the peripheral circuit, the gate electrodes of these transistors being simultaneously formed.

Inventors

  • 👤 Takeaki Ishii
  • 👤 Satoshi Maeda

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 19:52
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/33; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10B12/05; H10D; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0144; H10D84/02; H10D84/03; H10D84/038

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 106 words
A semiconductor memory device comprising: a memory cell composed of a select MOS transistor and an information storage capacitor both formed on a surface portion of a first conductivity type semiconductor region of a substrate and a peripheral circuit composed of a MOS transistor formed on the surface portion of the semiconductor region of the substrate at a peripheral portion of the memory cell, wherein a thickness of a gate oxide film of the MOS transistor of the peripheral circuit is between a thickness of a gate oxide film of the select MOS transistor and a thickness of an insulating film of the information storage capacitor.
Claim 2
Dependent Claim 106 words
A semiconductor memory device comprising: a memory cell composed of a select MOS transistor and an information storage capacitor both formed on a surface portion of a first conductivity type semiconductor region of a substrate and a peripheral circuit composed of a MOS transistor formed on the surface portion of the semiconductor region of the substrate at a peripheral portion of the memory cell, wherein a thickness of a gate oxide film of the MOS transistor of the peripheral circuit is between a thickness of a gate oxide film of the select MOS transistor and a thickness of an insulating film of the information storage capacitor.

References Cited (Backward Citations)

US5104819A Cited
US5083172A Cited
US5057449A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-03-07 1997-09-06 1998-03-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-03-07 2001-09-06 2002-03-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-03-07 2005-09-06 2006-03-08 $7700.00 Window Closed / Lapsed

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