Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light

Claim 2

A microscope comprising: a probe; a cantilever having a free end portion supporting the probe; selective reflection means provided on the free end portion of the cantilever, for reflecting displacement detection light and for passing sample examination light therethrough; scanning means for causing the probe to scan the surface of a sample while controlling the distance between the probe and the sample to be substantially constant, which distance would otherwise vary due to an interatomic force exerted between the probe and the sample; light source means for emitting the displacement detection light and the sample examination light; guide means for guiding the displacement detection light and the sample examination light to the selective reflection means provided on the cantilever, the displacement detection light being reflected by the reflection means, the sample examination light passing through the reflection means and being radiated onto the surface of the sample, resulting in that a radiated portion of the surface of the sample generates characteristic light indicative of the characteristics thereof; means for receiving light reflected by the reflection means and for detecting displacement of the free end of the cantilever; and means for detecting the characteristic light to thereby detect the characteristics of the radiated portion.

Claim 3

The microscope according to claim 1, wherein the cantilever has a portion for passing the sample examination light therethrough, and the probe is formed of an optically transparent member for passing the sample examination light therethrough.

Claim 4

The microscope according to claim 2, wherein the cantilever is formed of an optically transparent member for passing the sample examination light therethrough.

Claim 5

The microscope according to claim 3, wherein the free end portion of the cantilever has a side provided with selective reflection means and another side provided with the probe, said another side being opposed to the sample.

Claim 6

A microscope comprising: a light source for emitting a sample examination light; a probe having a portion for passing the sample examination light therethrough; a cantilever having a free end portion supporting the probe, the free end portion having a portion for passing the sample examination light therethrough; scanning means for causing the probe to scan then surface of a sample while controlling the distance between the probe and the sample on the basis of a tunnel current flowing therebetween; guide means for guiding the sample examination light to the free end portion of the cantilever, the sample examination light passing through the free end portion of the cantilever and probe and being radiated onto the surface of the sample, resulting in that a radiated portion of the surface of the sample generates characteristic light indicative of the characteristics thereof; and means for detecting the characteristic light to thereby detect the characteristics of the radiated portion of the surface of the sample.

Claim 7

A microscope comprising: a light source for emitting a sample examination light; a probe having a portion for passing the sample examination light therethrough; a cantilever having a free end portion supporting the probe, the free end portion having a portion for passing the sample examination light therethrough; scanning means for causing the probe to scan then surface of a sample while controlling the distance between the probe and the sample on the basis of a tunnel current flowing therebetween; guide means for guiding the sample examination light to the free end portion of the cantilever, the sample examination light passing through the free end portion of the cantilever and probe and being radiated onto the surface of the sample, resulting in that a radiated portion of the surface of the sample generates characteristic light indicative of the characteristics thereof; and means for detecting the characteristic light to thereby detect the characteristics of the radiated portion of the surface of the sample.

Claim 8

A microscope comprising: an optically transparent probe; a cantilever having optically transparent free end portion supporting the probe; selective reflection means provided on the free end portion of the cantilever, for reflecting displacement detection light and for passing observation light therethrough; scanning means for causing the probe to scan the surface of a sample while controlling the distance between the probe and the sample to be substantially constant, which distance would otherwise vary due to an interatomic force exerted between the probe and the sample; a light source means for emitting the displacement detection light and the observation light; guide means for guiding the displacement detection light and the observation light to the selective reflection means provided on the cantilever, the displacement detection light being reflected by the reflection means, the observation light being radiated on the surface of the sample through the free end portion of the cantilever, and then reflected from the surface; and means for receiving light reflected from the surface of the sample to observe the same.

Claim 9

A microscope comprising: an optically transparent probe; a cantilever having optically transparent free end portion supporting the probe; selective reflection means provided on the free end portion of the cantilever, for reflecting displacement detection light and for passing observation light therethrough; scanning means for causing the probe to scan the surface of a sample while controlling the distance between the probe and the sample to be substantially constant, which distance would otherwise vary due to an interatomic force exerted between the probe and the sample; a light source means for emitting the displacement detection light and the observation light; guide means for guiding the displacement detection light and the observation light to the selective reflection means provided on the cantilever, the displacement detection light being reflected by the reflection means, the observation light being radiated on the surface of the sample through the free end portion of the cantilever, and then reflected from the surface; and means for receiving light reflected from the surface of the sample to observe the same.

Claim 10

A scanning probe microscope comprising: a cantilever including a conductive probe having a tip portion positioned near the surface of a sample, conveying means for conveying said sample to and away from the tip portion of the probe, means for applying a bias voltage between said probe and sample to produce a tunnel current therebetween, means for detecting the produced tunnel current, means for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the tip portion of said probe and of the surface of the sample, and for producing signals corresponding to the detected displacement, a main servo control means for providing said conveying means with feedback in response to the output signals from the probe displacement detection means to maintain substantially constant the distance between the tip portion of the probe and sample, thereby causing said conveying means to convey the sample, means for forming a first three-dimensional image data of information relative to the local electron state in the surface of the sample which information has been obtained from the tunnel current detected by said tunnel current detecting means, means for forming a second three-dimensional image data of information relative to the potential distribution in the surface of the sample, which information has been obtained from the tunnel current detected by said tunnel current detecting means; and means for forming a third three-dimensional image data of information about the roughness of the sample surface corresponding to the amount of displacement of the probe detected by said probe displacement detecting means, so that said first, second and third image data can be separately obtained simultaneously.

Claim 11

A scanning probe microscope comprising: a cantilever including a conductive probe having a tip portion positioned near the surface of a sample, conveying means for conveying said sample to and away from the tip portion of the probe, means for applying a bias voltage between said probe and sample to produce a tunnel current therebetween, means for detecting the produced tunnel current, means for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the tip portion of said probe and of the surface of the sample, and for producing signals corresponding to the detected displacement, a main servo control means for providing said conveying means with feedback in response to the output signals from the probe displacement detection means to maintain substantially constant the distance between the tip portion of the probe and sample, thereby causing said conveying means to convey the sample, means for forming a first three-dimensional image data of information relative to the local electron state in the surface of the sample which information has been obtained from the tunnel current detected by said tunnel current detecting means, means for forming a second three-dimensional image data of information relative to the potential distribution in the surface of the sample, which information has been obtained from the tunnel current detected by said tunnel current detecting means; and means for forming a third three-dimensional image data of information about the roughness of the sample surface corresponding to the amount of displacement of the probe detected by said probe displacement detecting means, so that said first, second and third image data can be separately obtained simultaneously.

Claim 12

A scanning probe microscope according to claim 7, wherein: said bias voltage impression means includes a modulated voltage generator means for applying between the probe and the sample a modulated voltage having a determined cycle and amplitude a bias voltage, and said means for forming said first three-dimensional image data includes an arithmetic means for outputting differential conductances of the tunnel current detected by said tunnel current detecting means and said modulated voltage.

Claim 13

A scanning probe microscope according to claim 8, wherein: said second three-dimensional image data forming means includes a potential servo means for producing a voltage adapted to shift the potential of the bias voltage applied to the sample by integrating the tunnel current detected by said tunnel current detecting means.

Claim 14

A scanning probe microscope according to claim 7, wherein: said cantilever has one plane on which said probe is mounted, another plane, and a conductive film attached to the another plane, and said probe displacement detecting means comprises a tunnel tip provided near the conductive film of said cantilever, and further comprising: an auxiliary bias voltage applying means for applying a bias voltage between the tunnel tip and the conductive film to produce a tunnel current flow between the tunnel tip and the conductive film, and an auxiliary tunnel current detection means for detecting the tunnel current flow produced by the bias voltage applied by said auxiliary bias voltage applying means, so that the amount of current flow of said probe may be detected in accordance with the tunnel current detected by the auxiliary tunnel current detection means.

Claim 15

A scanning probe microscope according to claim 10, wherein: said cantilever includes a plate like electrically insulated member having one plane and another plane, a conductive member for connection of said probe and said auxiliary tunnel current detection means when said probe is provided on said one plane and said conductive film is provided on said another plane, and means for connecting said conductive film to ground.

Claim 16

A scanning probe microscope according to claim 11, which further comprises a logarithm arithmetic means for finding the tunnel current flow detected by said auxiliary tunnel current detection means and for computing the distance between the tunnel tip and conductive film.

Claim 17

A scanning probe microscope according to claim 7, wherein said first three-dimensional image data forming means and said second three-dimensional image forming means comprise arithmetic means for performing a digital arithmetic process on the tunnel current detected by the tunnel current detecting means to produce respective first and second three-dimensional image data.

Claim 18

A scanning probe microscope according to claim 7, further comprising: an auxiliary servo control means for providing said conveying means with feedback in response to the tunnel current detected by said tunnel current detecting means so as to maintain substantially constant the distance between the probe and sample, thereby causing said conveying means to convey the sample; and connection switching means for executing selective connections of the auxiliary servo control means and said first-mentioned servo control means with said conveying means.

Claim 19

The microscope according to claim 2, wherein the cantilever is formed of an optically transparent member at portions thereof for passing reflected characteristic light therethrough.

Claim 20

A microscope comprising: a cantilever including a free end portion and a probe provided on the free end portion; light emitting means for emitting a sample examination light onto a surface of a sample through the probe so that a portion of the surface of the sample onto which light is emitted generates characteristic light thereof; scanning means for causing the probe to scan the surface of a sample while controlling the distance between the probe and the surface of the sample to be substantially constant on the basis of an interatomic force exerted between the probe and sample; and means for detecting the characteristic light generated by the sample to thereby detect the characteristics of said portion of the surface of the sample onto which said sample examination light is emitted.

Claim 21

A microscope comprising: a cantilever including a free end portion and a probe provided on the free end portion; light emitting means for emitting a sample examination light onto a surface of a sample through the probe so that a portion of the surface of the sample onto which light is emitted generates characteristic light thereof; scanning means for causing the probe to scan the surface of a sample while controlling the distance between the probe and the surface of the sample to be substantially constant on the basis of an interatomic force exerted between the probe and sample; and means for detecting the characteristic light generated by the sample to thereby detect the characteristics of said portion of the surface of the sample onto which said sample examination light is emitted.

Claim 22

The microscope according to claim 16, wherein said probe has a transparent tip through which sample examination light is emitted onto said sample surface.

Claim 23

A microscope comprising: a lever means including a flexible portion and a probe provided on the flexible portion; light emitting means for emitting a sample examination light onto a surface of a sample through the probe so that a portion of the surface of the sample onto which light is emitted generates characteristic light thereof; scanning means for causing the probe to scan the surface of a sample while controlling the distance between the probe and the surface of the sample to be substantially constant on the basis of an interatomic force exerted between the probe and sample; and means for detecting the characteristic light generated by the sample to thereby detect the characteristics of the portion of the surface of the sample onto which said sample examination light is emitted.

Claim 24

A microscope comprising: a lever means including a flexible portion and a probe provided on the flexible portion; light emitting means for emitting a sample examination light onto a surface of a sample through the probe so that a portion of the surface of the sample onto which light is emitted generates characteristic light thereof; scanning means for causing the probe to scan the surface of a sample while controlling the distance between the probe and the surface of the sample to be substantially constant on the basis of an interatomic force exerted between the probe and sample; and means for detecting the characteristic light generated by the sample to thereby detect the characteristics of the portion of the surface of the sample onto which said sample examination light is emitted.

Claim 25

The microscope according to claim 18, wherein: said light emitting means includes a light source for emitting the sample examination light, and a guide means for guiding the sample examination light from the light source onto the flexible portion of the lever means; and said lever means includes transparent portions at said flexible portion thereof and transparent portions of said probe portion through which said sample examination light passes and is radiated onto said sample surface portion.