Patent US4595403A successfully refreshed from Google Patents.
Patent US5288367A successfully refreshed from Google Patents.
US5288367A
Expired / Lapsed
US
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End-point detection
Assignee: International Business Machines Corp
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Filing: 1993-02-01
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Granted: 1994-02-22
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Expires: 2013-02-01
Abstract
Abstract A wavelength of light is monitored for end-point detection during etching. Spectral data is collected during etching which characterizes variation of light emitted by discharge produced during etching. At least one principal component of the data is calculated. Each principal component has variables, each variable has a weight, and each variable corresponds to a wavelength of the light emitted by the discharge. By examining or analyzing the weights, it is then determined which variable of the principal component varies during etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.
Inventors
- 👤 David Angell
- 👤 Carl J. Radens
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 03:20
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935; G; G01; G01N; G01N21/00; G01N21/62; G01N21/66; G01N21/67; H01J37/32972
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
106 words
A method of selecting a wavelength of light to monitor for end-point detection during etching, wherein the etching produces discharge which emits light, said method comprising the steps of: collecting data during etching, said data characterizing variation of light emitted by discharge produced during the etching; calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and determining which variable of the principal component varies during the etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.
Claim 2
Independent Claim
106 words
A method of selecting a wavelength of light to monitor for end-point detection during etching, wherein the etching produces discharge which emits light, said method comprising the steps of: collecting data during etching, said data characterizing variation of light emitted by discharge produced during the etching; calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and determining which variable of the principal component varies during the etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.
Claim 3
Dependent Claim
26 words
A method according to claim 1, further comprising the step of centering the data prior to the step of calculating a principal component of the data.
Claim 4
Dependent Claim
17 words
A method according to claim 2, further comprising variance scaling the data subsequent to centering the data.
Claim 5
Dependent Claim
30 words
A method according to claim 1, wherein said step of calculating a principal component of the data comprises calculating no more than the first four principal components of the data.
Claim 6
Dependent Claim
22 words
A method according to claim 1, wherein said step of calculating a principal component of the data comprises using the eigenanalysis method.
Claim 7
Dependent Claim
24 words
A method according to claim 1, wherein said step of calculating a principal component of the data comprises using the singular value decomposition method.
Claim 8
Dependent Claim
25 words
A method according to claim 1, wherein said step of calculating a principal component of the data comprises using the nonlinear partial least squares method.
Claim 9
Dependent Claim
45 words
A method according to claim 1, wherein said step of determining comprises ranking the variables according to weight from maximum value to minimum value, and analyzing the behavioral pattern of the variable having weight of maximum value and the variable having weight of minimum value.
Claim 10
Dependent Claim
23 words
A method according to claim 8, wherein the ranking of the variables includes plotting the weights of the principal component variables versus variable.
Claim 11
Dependent Claim
37 words
A method according to claim 8, wherein the analyzing of behavioral pattern includes plotting the time trace of the variable having weight of maximum value and the time trace of the variable having weight of minimum value.
Claim 12
Dependent Claim
21 words
A method according to claim 1, wherein said step of collecting data during etching includes use of an optical emission spectrometer.
Claim 13
Independent Claim
145 words
A method of etching a wafer, comprising the steps of: etching a wafer such that discharge is produced which emits light; and terminating etching of the wafer when light of a predetermined wavelength emitted by the discharge varies so as to signal end-point of the etch, wherein determining of the predetermined wavelength comprises the steps of: performing an experimental etch; collecting data during the experimental etch, said data characterizing variation of light emitted by the discharge produced during the experimental etch; calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and determining which variable of the principal component varies during the experimental etch such that end-point can be detected by monitoring the wavelength corresponding to the variable, said wavelength being the predetermined wavelength.
Claim 14
Independent Claim
145 words
A method of etching a wafer, comprising the steps of: etching a wafer such that discharge is produced which emits light; and terminating etching of the wafer when light of a predetermined wavelength emitted by the discharge varies so as to signal end-point of the etch, wherein determining of the predetermined wavelength comprises the steps of: performing an experimental etch; collecting data during the experimental etch, said data characterizing variation of light emitted by the discharge produced during the experimental etch; calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and determining which variable of the principal component varies during the experimental etch such that end-point can be detected by monitoring the wavelength corresponding to the variable, said wavelength being the predetermined wavelength.
Claim 15
Dependent Claim
26 words
A method according to claim 12, further comprising the step of centering the data prior to the step of calculating a principal component of the data.
Claim 16
Dependent Claim
17 words
A method according to claim 13, further comprising variance scaling the data subsequent to centering the data.
Claim 17
Dependent Claim
30 words
A method according to claim 12, wherein said step of calculating a principal component of the data comprises calculating no more than the first four principal components of the data.
Claim 18
Dependent Claim
22 words
A method according to claim 12, wherein said step of calculating a principal component of the data comprises using the eigenanalysis method.
Claim 19
Dependent Claim
24 words
A method according to claim 12, wherein said step of calculating a principal component of the data comprises using the singular value decomposition method.
Claim 20
Dependent Claim
25 words
A method according to claim 12, wherein said step of calculating a principal component of the data comprises using the nonlinear partial least squares method.
Claim 21
Dependent Claim
45 words
A method according to claim 12, wherein said step of determining comprises ranking the variables according to weight from maximum value to minimum value, and analyzing the behavioral pattern of the variable having weight of maximum value and the variable having weight of minimum value.
Claim 22
Dependent Claim
23 words
A method according to claim 19, wherein the ranking of the variables includes plotting the weights of the principal component variables versus variable.
Claim 23
Dependent Claim
37 words
A method according to claim 19, wherein the analyzing of behavioral pattern includes plotting the time trace of the variable having weight of maximum value and the time trace of the variable having weight of minimum value.
Claim 24
Dependent Claim
21 words
A method according to claim 12, wherein said step of collecting data during etching includes use of an optical emission spectrometer.
Claim 25
Independent Claim
103 words
An apparatus for selecting a wavelength of light to monitor for end-point detection during etching, wherein the etching produces discharge which emits light, said apparatus comprising: means for collecting data characterizing variation of light emitted by discharge produced during etching; means for calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and means for determining which variable of the principal component varies during etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.
Claim 26
Independent Claim
103 words
An apparatus for selecting a wavelength of light to monitor for end-point detection during etching, wherein the etching produces discharge which emits light, said apparatus comprising: means for collecting data characterizing variation of light emitted by discharge produced during etching; means for calculating a principal component of the data, said principal component having variables, each variable having a weight, and each variable corresponding to a wavelength of the light emitted by the discharge; and means for determining which variable of the principal component varies during etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.
Claim 27
Dependent Claim
13 words
An apparatus according to claim 23, further comprising means for centering the data.
Claim 28
Dependent Claim
14 words
An apparatus according to claim 24, further comprising means for variance scaling the data.
Claim 29
Dependent Claim
29 words
An apparatus according to claim 23, wherein said means for calculating a principal component of the data calculates no more than the first four principal components of the data.
Claim 30
Dependent Claim
21 words
An apparatus according to claim 23, wherein said means for calculating a principal component of the data uses the eigenanalysis method.
Claim 31
Dependent Claim
23 words
An apparatus according to claim 23, wherein said means for calculating a principal component of the data uses the singular value decomposition method.
Claim 32
Dependent Claim
24 words
An apparatus according to claim 23, wherein said means for calculating a principal component of the data uses the nonlinear partial least squares method.
Claim 33
Dependent Claim
49 words
An apparatus according to claim 23, wherein said means for determining comprises means for ranking the variables according to weight from maximum value to minimum value, and means for analyzing the behavioral pattern of the variable having weight of maximum value and the variable having weight of minimum value.
Claim 34
Dependent Claim
26 words
An apparatus according to claim 30, wherein said means for ranking the variables includes means for plotting the weights of the principal component variables versus variable.
Claim 35
Dependent Claim
41 words
An apparatus according to claim 30, wherein said means for analyzing the behavioral pattern includes means for plotting the time trace of the variable having weight of maximum value and the time trace of the variable having weight of minimum value.
Claim 36
Dependent Claim
19 words
An apparatus according to claim 23, wherein said means for collecting data during etching comprises an optical emission spectrometer.
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