US5285131A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum-sealed silicon incandescent light
Assignee: University of California Berkeley
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Filing: 1990-12-03
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Granted: 1994-02-08
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Expires: 2010-12-03
Abstract
Abstract A microlamp including a polysilicon filament coated with a protective layer and enclosed by a window in a vacuum-sealed cavity.
Inventors
- 👤 Richard S. Muller
- 👤 Carlos H. Mastrangelo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 10:47
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; G; G01; G01J; G01J3/00; G01J3/02; G01J3/10; G01J3/108; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0894; G03; G03F; G03F7/00; H01J21/00; H01J21/02; H01J21/06; H01J21/10; H01J21/105; H01J61/00; H01J61/02; H01J61/30; H01K; H01K1/00; H01K1/02; H01K1/04; H01K1/12; H01K1/28; H01K13/00; H01K3/00; H01K7/00; H01K7/04
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
44 words
A microlamp, comprising: a substrate; a cavity formed in said substrate; a polysilicon filament coated with a protective layer disposed in said cavity; and a window means for vacuum sealing said cavity wherein radiation emitted by said filament is visible through said window means.
Claim 2
Dependent Claim
44 words
A microlamp, comprising: a substrate; a cavity formed in said substrate; a polysilicon filament coated with a protective layer disposed in said cavity; and a window means for vacuum sealing said cavity wherein radiation emitted by said filament is visible through said window means.
Claim 3
Dependent Claim
13 words
The microlamp of claim 1 wherein said protective layer is a silicon-nitride coating.
Claim 4
Dependent Claim
12 words
The microlamp of claim 2 wherein said window means is silicon nitride.
Claim 5
Dependent Claim
50 words
A microstructure comprising: a substrate having a groove; sealing means disposed over said groove to form a sealed cavity; a filament suspended in said cavity, the ends of said filament connected to the sides of said cavity; and means for heating said filament to cause said filament to produce radiation.
Claim 6
Dependent Claim
50 words
A microstructure comprising: a substrate having a groove; sealing means disposed over said groove to form a sealed cavity; a filament suspended in said cavity, the ends of said filament connected to the sides of said cavity; and means for heating said filament to cause said filament to produce radiation.
Claim 7
Dependent Claim
10 words
The microstructure of claim 4 wherein said filament is polysilicon.
Claim 8
Dependent Claim
12 words
The microstructure of claim 4 wherein said filament is a refractory metal.
Claim 9
Dependent Claim
26 words
The microstructure of claim 6 wherein said refractory metal is selected from the group consisting of tungsten, tantalum, platinum, palladium, molybdenum, zirconium, titanium, nickel and chromium.
Claim 10
Dependent Claim
14 words
The microstructure of claim 4 wherein said filament is coated with a protective layer.
Claim 11
Dependent Claim
12 words
The microstructure of claim 8 wherein said protective layer is silicon nitride.
Claim 12
Dependent Claim
20 words
The microstructure of claim 4 wherein said sealing means includes a window through which radiation from said filament may pass.
Claim 13
Dependent Claim
10 words
The microstructure of claim 4 wherein said radiation is electrons.
Claim 14
Dependent Claim
17 words
The microstructure of claim 4 wherein said filament is between 110 μm and 550 μm in length.
References Cited (Backward Citations)
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