Inverted diffuser stagnation point flow reactor for vapor deposition of thin films

Claim 2

A metal organic chemical vapor deposition reactor comprising a gas mixing chamber with gas entry ports into the mixing chamber; a substrate for deposition thereon of a thin solid film; and a gas outlet for conveying gas away from the substrate, characterized by a gas mixing chamber wherein gas is introduced into the chamber through at least two inlet ports in a tangential manner so as to impart a vortex mixing action to the gas, a capillary plug positioned above the mixing chamber and below the substrate, the capillary plug having therein a plurality of vertically extending and parallel capillary tubes which serve to streamline and evenly distribute the upward flow of gas to the substrate, an upwardly expanding vertically aligned conical diffuser chamber having a lower narrow end and an upper broad end positioned above the top of the capillary plug, the upwardly expanding conical diffuser chamber being designed to streamline the flow of gas from the capillary plug to the substrate, the substrate being positioned above the capillary plug and within the broad end of the upwardly expanding conical diffuser chamber.

Claim 3

A reactor as claimed in claim 1 wherein the substrate is heated.

Claim 4

A reactor as claimed in claim 1 wherein the substrate is heated by an electrical heater.

Claim 5

A metal organic chemical vapor deposition reactor operated at atmospheric pressures comprising: (a) a gas mixing chamber with at least two gas ports directing gas tengentially into the interior of the mixing chamber to thereby impart a vortex flow to the gas; (b) a capillary plug having an upper side and a lower side positioned above the gas mixing chamber and connected therewith by its lower side, said capillary plug having extending therethrough a plurality of vertically extending and parallel capillary tubes which are adapted to pass gas from the mixing chamber therethrough and to provide streamlined flow to the gas as it is vertically passed through the capillary plug and above the capillary plug; (c) an upwardly expanding conical diffuser chamber having a lower narrow end adjacent the upper side of the capillary plug and an upper broad end opposite and above the narrow end, said narrow end being connected to an upper peripheral side of the capillary plug vertically opposite to the mixing chamber, said diffuser having a length, width and rate of divergence which maintains a uniform gas velocity profile to the gas exiting the upper side of the capillary plug and travelling upwardly through the interior of the upwardly diverging conical diffuser; (d) a substrate located at the upper broad end of the upwardly expanding conical diffusing chamber, opposite to the capillary plug, and within the uniform gas velocity profile so that the upwardly flowing gas impinges uniformly at right angles on the substrate, said substrate having a dimension which is smaller than the dimension of the uniform gas velocity profile at the location of the substrate; (e) a heater located proximate to the substrate for heating the substrate to an elevated temperature and; (f) at least one gas outlet port adapted to convey gas away from the substrate and the heater.

Claim 6

A metal organic chemical vapor deposition reactor operated at atmospheric pressures comprising: (a) a gas mixing chamber with at least two gas ports directing gas tengentially into the interior of the mixing chamber to thereby impart a vortex flow to the gas; (b) a capillary plug having an upper side and a lower side positioned above the gas mixing chamber and connected therewith by its lower side, said capillary plug having extending therethrough a plurality of vertically extending and parallel capillary tubes which are adapted to pass gas from the mixing chamber therethrough and to provide streamlined flow to the gas as it is vertically passed through the capillary plug and above the capillary plug; (c) an upwardly expanding conical diffuser chamber having a lower narrow end adjacent the upper side of the capillary plug and an upper broad end opposite and above the narrow end, said narrow end being connected to an upper peripheral side of the capillary plug vertically opposite to the mixing chamber, said diffuser having a length, width and rate of divergence which maintains a uniform gas velocity profile to the gas exiting the upper side of the capillary plug and travelling upwardly through the interior of the upwardly diverging conical diffuser; (d) a substrate located at the upper broad end of the upwardly expanding conical diffusing chamber, opposite to the capillary plug, and within the uniform gas velocity profile so that the upwardly flowing gas impinges uniformly at right angles on the substrate, said substrate having a dimension which is smaller than the dimension of the uniform gas velocity profile at the location of the substrate; (e) a heater located proximate to the substrate for heating the substrate to an elevated temperature and; (f) at least one gas outlet port adapted to convey gas away from the substrate and the heater.

Claim 7

A reactor as claimed in claim 4 wherein the heater is an optical high power IR or tungsten-halogen lamp heater.

Claim 8

A reactor as claimed in claim 4 wherein the capillary plug has therethrough approximately 130 to 140 capillary tubes per square centimeter.

Claim 9

A reactor as claimed in claim 4 wherein a hollow tube is positioned between and connects the mixing chamber and the capillary plug.

Claim 10

A reactor as claimed in claim 4 wherein a water jacket encloses the gas being conveyed to the outlet port in order to minimize deposition of solid reaction products on walls of the reactor.

Claim 11

A reactor as claimed in claim 4 wherein the reactor has two mixing chambers, one mixing chamber mixing reactor gases and delivering them to a first capillary plug; and the second mixing chamber mixing separate reactor gases and delivering them to a second capillary plug, the separate reactor gases being mixed after passing through the first and second capillary plugs into an diverging conical diffuser chamber.

Claim 12

A reactor as claimed in claim 6 wherein the capillary plug is a plurality of fine glass tubes arranged in parallel in a bundle.

Claim 13

A reactor as claimed in claim 4 wherein the capillary plug is constructed by drilling a plurality of parallel fine holes in a stainless steel disk.

Claim 14

A reactor as claimed in claim 4 wherein the capillary plug is constructed of a plurality of parallel fine stainless steel tubes arranged in a bundle.

Claim 15

A reactor as claimed in claim 4 wherein the heater element is an electrical resistance heater.

Claim 16

A reactor as claimed in claim 13 wherein the electrical heater is regulated by a thermocouple.

Claim 17

A reactor as claimed in claim 14 wherein the substrate is held in place at the broad upper end of the conical diffuser chamber by one or more quartz pins.

Claim 18

A reactor as claimed in claim 13 wherein the resistance heater comprises a wound heating element formed of nichrome metal, the element being enclosed in heat reflecting mirror, and a ceramic heater housing.

Claim 19

A reactor as claimed in claim 16 wherein the heater is enclosed in a quartz tube.