Patent US5281321A successfully refreshed from Google Patents.
US5281321A
Expired / Lapsed
US
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Device for the suppression of arcs
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1993-02-25
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Granted: 1994-01-25
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Expires: 2013-02-25
Abstract
Abstract The invention relates to a device for the suppression of arcs in gas discharge arrangements having two cathodes (6, 7) and one anode (4) supplied from an electric energy source (10). Between the electrical terminals of this electric energy source (10) and the cathode (6, 7) is provided a circuit configuration having two switching elements (15, 25) which upon the occurrence of arcs are through-switched.
Inventors
- 👤 Johann Sturmer
- 👤 Gotz Teschner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:33
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/24; H05H1/26; H05H1/32; H05H1/34; H05H1/36
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
173 words
A device for the suppression of arcs in gas discharge arrangements, comprising: a housing (1) with an anode (4) and two cathodes (8, 9), said cathodes (8, 9) having a distance from each other and each of them being arranged at a distance from said anode (4), said distance being equal; an electrical connection between a first of said cathodes (6) with a first potential of an alternating current source (12); an electrical connection between a second of said cathodes (7) with a second potential of said alternating current source (12); a first electrical connection between said first cathode (6) and said second cathode (7) comprising a unidirectional short-circuitable-element (15) which allows a current-flow in a first direction; a second electrical connection between said first cathode (6) and said second cathode (7) comprising a second unidirectional short-circuitable-element (25) which allows a current-flow in a second direction, said second direction being opposite to said first direction; and means (20, 26, 27) for the recognition of arc discharges which through-connect said short-circuitable elements (15, 25).
Claim 2
Independent Claim
173 words
A device for the suppression of arcs in gas discharge arrangements, comprising: a housing (1) with an anode (4) and two cathodes (8, 9), said cathodes (8, 9) having a distance from each other and each of them being arranged at a distance from said anode (4), said distance being equal; an electrical connection between a first of said cathodes (6) with a first potential of an alternating current source (12); an electrical connection between a second of said cathodes (7) with a second potential of said alternating current source (12); a first electrical connection between said first cathode (6) and said second cathode (7) comprising a unidirectional short-circuitable-element (15) which allows a current-flow in a first direction; a second electrical connection between said first cathode (6) and said second cathode (7) comprising a second unidirectional short-circuitable-element (25) which allows a current-flow in a second direction, said second direction being opposite to said first direction; and means (20, 26, 27) for the recognition of arc discharges which through-connect said short-circuitable elements (15, 25).
Claim 3
Dependent Claim
25 words
Device as stated in claim 1, characterized in that between the first and second cathodes (6, 7) and the anode (4) a plasma is formed.
Claim 4
Dependent Claim
42 words
Device as stated in claim 1, characterized in that an arrangement (20) is provided for the recognition of arc discharges which through-connects one of the first and second short-circuitable elements (15, 25) according to a polarity of an alternating current halfwave present.
Claim 5
Dependent Claim
31 words
Device as stated in claim 3, characterized in that the arrangement for the recognition of arc discharges is a capacitor (20) disposed in a parallel branch to the cathodes (6, 7).
Claim 6
Dependent Claim
51 words
Device as stated in claim 4, characterized in that in series with the capacitor (20) is in each instance a winding (19, 21) of transformers (18, 22) whose in each instance other winding (17 or 23, respectively) is connected with a control electrode of one of the two thyristors (15, 25).
Claim 7
Dependent Claim
34 words
Device as stated in claim 5, characterized in that between the control electrode of a thyristor (15, 25) and a winding (17, 23) of a transformer (18, 22) a diode (16, 24) is connected.
Claim 8
Dependent Claim
51 words
Device as stated in claim 4, characterized in that in series with the capacitor (20) is in each instance a winding (19, 21) of transformers (18, 22) whose in each instance other winding (17 or 23, respectively) is connected with a control electrode of one of the two thyristors (15, 25).
Claim 9
Dependent Claim
34 words
Device as stated in claim 7, characterized in that between the control electrode of a thyristor (15, 25) and a winding (17, 23) of a transformer (18, 22) a diode (16, 24) is connected.
Claim 10
Dependent Claim
38 words
Device as stated in claim 3, characterized in that the arrangement for the recognition of arc discharges is a trigger circuit (26, 27) connected to the voltage source (10) and outputs pulses for driving electrical switches (32, 33).
Claim 11
Dependent Claim
13 words
Device as stated in claim 9, characterized in that the pulses are monopolar.
Claim 12
Dependent Claim
13 words
Device as stated in claim 9, characterized in that the pulses are bipolar.
Claim 13
Dependent Claim
21 words
Device as stated in claim 1, characterized in that the first and second short-circuitable elements comprise controllable semiconductor elements (15, 25).
Claim 14
Dependent Claim
17 words
Device as stated in claim 12, characterized in that the controllable semiconductor elements are thyristors (15, 25).
Claim 15
Dependent Claim
23 words
Device as stated in claim 13, characterized in that in parallel to the two thyristors (15, 25) is provided a forced commutation circuit.
Claim 16
Dependent Claim
25 words
Device as stated in claim 14, characterized in that the forced commutation circuit comprises a series circuit of a capacitor (13) and a coil (14).
Claim 17
Dependent Claim
63 words
Device as stated in claim 13, characterized in that in series with a capacitor (20) which is disposed in a parallel branch to the electrodes (6, 7) is in each instance a winding (19, 21) of transformers (18, 22) whose in each instance other winding (17 or 23, respectively) is connected with a control electrode of one of the two thyristors (15, 22).
Claim 18
Dependent Claim
16 words
Device as stated in claim 12, characterized in that the controllable semiconductors are transistors (33, 34).
Claim 19
Dependent Claim
19 words
Device as stated in claim 12, characterized in that the controllable semiconductors are gate turn off thyristors (52, 53).
Claim 20
Dependent Claim
17 words
Device as stated in claim 1, characterized in that the gas discharge arrangement is a sputtering installation.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-24 | 1997-07-26 | 1998-01-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-24 | 2001-07-26 | 2002-01-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-24 | 2005-07-26 | 2006-01-25 | $7700.00 | Window Closed / Lapsed |