US4936960A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for recovery from low impedance condition during cathodic arc processes
Assignee: Advanced Energy Industries Inc
•
Filing: 1989-01-03
•
Granted: 1990-06-26
•
Expires: 2009-01-03
Abstract
Abstract Techniques for recovery from a low impedance conditions during cathodic arc or electric vapor thin film processes are disclosed. Sensing of a low impedance condition is achieved followed automatically by active clearing of the cloud to return it to the proper impedance or resistance state. Active clearing is accomplished by a progressive increase in the output of bias voltage supply. Regulation of the bias voltage supply switches between voltage or power modes and a current mode of regulation. Circuitry disclosed is designed to readily modify existing power supplies to achieve the methods discussed and to linearly increase the current output by it.
Inventors
- 👤 Jerry D. Siefkes
- 👤 John G. Harpold
- 👤 Douglas S. Schatz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 00:04
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32055; H05; H05B; H05B7/00
Claims Analysis
Total Claims: 51
Claim 1
Independent Claim
82 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item, comprising the steps of: a. generating an ion-containing cloud by driving an arc across a source potential; b. attracting the ions in said cloud to the item to be processed through a bias potential; c. detecting the presence of a low impedance condition across said bias potential; and d. automatically clearing said cloud upon the detection of said low impedance condition across said bias potential.
Claim 2
Independent Claim
82 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item, comprising the steps of: a. generating an ion-containing cloud by driving an arc across a source potential; b. attracting the ions in said cloud to the item to be processed through a bias potential; c. detecting the presence of a low impedance condition across said bias potential; and d. automatically clearing said cloud upon the detection of said low impedance condition across said bias potential.
Claim 3
Dependent Claim
52 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 1 wherein said bias potential is created by a bias voltage supply and wherein said step of automatically clearing the cloud comprises the step of automatically manipulating the bias voltage supply.
Claim 4
Dependent Claim
65 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 2 wherein said step of manipulating the bias voltage supply comprises the steps of: a. substantially stopping the application of power of the bias voltage supply; and then b. progressively increasing the application of power of the bias power supply to its prior level.
Claim 5
Independent Claim
57 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claims 2 or 3 and further comprising the steps of: a. connecting a programmable processor to control said bias voltage supply; b. programming said processor to automatically execute the sequence of steps involving the bias voltage supply.
Claim 6
Dependent Claim
100 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 2 and further comprising the step of regulating the voltage of said bias voltage supply while accomplishing the step of attracting the ions and wherein said step of manipulating the bias voltage supply comprises the steps of sequentially: a. switching to regulate the current of said bias voltage supply upon detecting the low impedance condition; b. substantially stopping the application of current through the bias voltage supply; and c. progressively increasing the current output by the bias power supply.
Claim 7
Dependent Claim
49 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 4 and further comprising the step of returning to regulating the voltage of said bias voltage supply after progressively increasing the current output by the bias voltage supply.
Claim 8
Dependent Claim
55 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 6 and further comprising the step of stopping the progressive increase of said current output at a set level prior to said step of returning to regulating the voltage of the bias voltage supply.
Claim 9
Dependent Claim
42 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 7 and further comprising the step of monitoring the voltage output of the bias voltage supply while regulating its current output.
Claim 10
Dependent Claim
55 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 8 wherein said step of returning to regulate the voltage is accomplished when said voltage equals 100% of the set value of the voltage prior to detecting the presence of the low impedance condition.
Claim 11
Dependent Claim
31 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 9 wherein the time of said progressive increase is linear.
Claim 12
Dependent Claim
31 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 10 wherein the time of said linear increase is adjustable.
Claim 13
Dependent Claim
36 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 10 wherein the time of said linear increase is from 50 ms to 550 ms.
Claim 14
Dependent Claim
55 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 8 wherein said step of returning to regulate the voltage is accomplished when said voltage equals 100% of the set value of the voltage prior to detecting the presence of the low impedance condition.
Claim 15
Dependent Claim
50 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 6 wherein said step of detecting the low impedance condition comprises the step of sensing an over-current condition in said bias voltage supply for a prescribed period of time.
Claim 16
Dependent Claim
32 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 14 wherein said time for sensing the over-current condition is adjustable.
Claim 17
Dependent Claim
45 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 14 wherein said low impedance condition is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.
Claim 18
Dependent Claim
37 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 14 wherein said low impedance condition is detected by sensing the overcurrent condition for 50 ms.
Claim 19
Dependent Claim
40 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 5 and further comprising the step of stopping the progressive increase of said current output at a set level.
Claim 20
Dependent Claim
28 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 5 wherein said progressive increase is linear.
Claim 21
Dependent Claim
36 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 5 wherein the time of said progressive increase is from 50 ms to 550 ms.
Claim 22
Dependent Claim
50 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 20 wherein said step of detecting the low impedance condition comprises the step of sensing an over-current condition in said bias voltage supply for a prescribed period of time.
Claim 23
Dependent Claim
33 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as a described in claim 21 wherein said time for sensing the over-current condition is adjustable.
Claim 24
Dependent Claim
44 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 21 wherein said low impedance is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.
Claim 25
Dependent Claim
36 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item described in claim 21 wherein said low impedance condition is detected by sensing the over-current condition for 50 ms.
Claim 26
Dependent Claim
50 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 2 wherein said step of detecting the low impedance condition comprises the step of sensing an over-current condition in said bias voltage supply for a prescribed period of time.
Claim 27
Dependent Claim
32 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 16 wherein said time for sensing the over-current condition is adjustable.
Claim 28
Dependent Claim
45 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 16 wherein said low impedance condition is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.
Claim 29
Dependent Claim
37 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 16 wherein said low impedance condition is detected by sensing the over-current condition for 50 ms.
Claim 30
Independent Claim
60 words
A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claims 5, 18, 8, 11,26,15, or 22 and further comprising the steps of: a. controlling said bias voltage supply through a programmable processor; and b. programming said processor to automatically execute the sequence of steps involving the bias voltage supply.
Claim 31
Independent Claim
63 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system having a bias voltage supply, which affects a cloud, comprising: a. a sensor for detecting the presence of a low impedance condition across said bias voltage supply; and b. a means for clearing said cloud upon the detection of said low impedance condition across said bias voltage supply.
Claim 32
Independent Claim
63 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system having a bias voltage supply, which affects a cloud, comprising: a. a sensor for detecting the presence of a low impedance condition across said bias voltage supply; and b. a means for clearing said cloud upon the detection of said low impedance condition across said bias voltage supply.
Claim 33
Dependent Claim
37 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 30 wherein said means for clearing the cloud comprises a controller for automatically manipulating said bias voltage supply.
Claim 34
Dependent Claim
27 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 31 wherein said controller comprises a programmable processor.
Claim 35
Dependent Claim
68 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 31 wherein said controller comprises: a. a means for substantially stopping the application of power through the bias voltage supply; and b. a means for progressively increasing the output of power by the bias voltage supply after said means for substantially stopping has acted upon the bias voltage supply.
Claim 36
Dependent Claim
77 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 31 wherein said controller comprises: a. a voltage regulator; b. a current regulator; c. a regulation mode switch for switching between the voltage regulator and the current regulator; d. a means for substantially stopping the application of current through the bias voltage supply; and e. a means for progressively increasing the current output by the bias voltage supply.
Claim 37
Dependent Claim
38 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 34 and further comprising a means for stopping the progressive increase of said current output at a set level.
Claim 38
Dependent Claim
47 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 35 and further comprising a means for monitoring the voltage output by said bias voltage supply which operates while regulating the current output of said bias voltage supply.
Claim 39
Dependent Claim
61 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 36 wherein said regulation mode switch returns to the voltage mode when the value of the voltage output by said bias voltage supply is 100% of the set value of the voltage prior to detecting the presence of the low impedance condition.
Claim 40
Dependent Claim
26 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 34 wherein said progressive increase is linear.
Claim 41
Dependent Claim
29 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 38 wherein the time of said linear increase is adjustable.
Claim 42
Dependent Claim
42 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 39 wherein said sensor comprises a means for sensing an over-current condition in said bias voltage supply for a prescribed period of time.
Claim 43
Dependent Claim
30 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 40 wherein said time for sensing the over-current condition is adjustable.
Claim 44
Dependent Claim
43 words
An apparatus for recovering from a low impedance conditions in a cathodic arc processing system as described in claim 40 wherein said low impedance condition is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.
Claim 45
Dependent Claim
35 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 40 wherein said low impedance condition is detected by sensing the over-current condition for 50 ms.
Claim 46
Dependent Claim
34 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 38 wherein the time of said linear increase is from 50 ms to 550 ms.
Claim 47
Dependent Claim
42 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 31 wherein said sensor comprises a means for sensing an over-current condition in said bias voltage supply for a prescribed period of time.
Claim 48
Dependent Claim
30 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 41 wherein said time for sensing the over-current condition is adjustable.
Claim 49
Dependent Claim
43 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 45 wherein said low impedance condition is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.
Claim 50
Dependent Claim
35 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 45 wherein said low impedance condition is detected by sensing the over-current condition for 50 ms.
Claim 51
Independent Claim
55 words
An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claims 34, 39, 46, 48, 41, or 43 wherein said controller for manipulating the bias voltage supply comprises a programmable processor which is programmed to automatically execute the functions to be accomplished by the bias voltage supply.
References Cited (Backward Citations)
US3071667A
Cited
US3400207A
Cited
US3392304A
Cited
US3546606A
Cited
US3544913A
Cited
US3609200A
Cited
US3793179A
Cited
US3839182A
Cited
US3783231A
Cited
US3748536A
Cited
US4448799A
Cited
US4448659A
Cited
US4559125A
Cited
US4620913A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-25 | 1993-12-25 | 1994-06-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-25 | 1997-12-25 | 1998-06-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-25 | 2001-12-25 | 2002-06-26 | $7700.00 | Window Closed / Lapsed |