US5280437A
Expired / Lapsed
US
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Structure and method for direct calibration of registration measurement systems to actual semiconductor wafer process topography
Assignee: Compaq Information Technologies Group LP
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Filing: 1991-06-28
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Granted: 1994-01-18
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Expires: 2011-06-28
Abstract
Abstract To calibrate a registration measurement system for use in semiconductor fabrication processes, a calibration structure is provided. The calibration structure includes at least one zero offset registration structure and a plurality of non-zero offset registration structures. By measuring the displacement of the zero registration, structure at 0° and 180°, the tool induced shift (TIS) of the registration measurement system may be determined. Then, by measuring the displacement of the zero offset registration structure at 0°, 90°, 180°, and 270° the initial TIS determination is verified and the presence or absence of astigmatism is established. When TIS and astigmatism have been accounted for, all of the registration structures, both zero and non-zero, are measured at an angular orientation of 0° to determine the systematic errors present in the measurement. Once these errors are determined, the registration measurement system is calibrated to alleviate these errors.
Inventors
- 👤 Daniel A. Corliss
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 14:52
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
190 words
A calibration structure for use in calibrating a registration measurement system, said calibration structure being formed by integrated circuit fabrication process steps and comprising: a first registration structure formed on a substrate and having a first pattern and a second pattern as viewed from a point perpendicular to a plane generally defined by said substrate, wherein each of said first and second patterns has a center, and wherein the displacement between the centers of said first and second patterns is selected to be zero, absent any misalignment induced by said integrated circuit fabrication process steps; and a plurality of second registration structures formed on said substrate and located on said substrate in spaced apart relation to one another and to said first registration structure, each of said second registration structures having a third pattern and a fourth pattern, wherein each of said third and fourth patterns have a center, and wherein the displacement between the centers of each said third pattern and its respective fourth pattern is selected to be of a known non-zero magnitude and a known direction, absent any misalignment induced by said integrated circuit fabrication process steps.
Claim 2
Dependent Claim
190 words
A calibration structure for use in calibrating a registration measurement system, said calibration structure being formed by integrated circuit fabrication process steps and comprising: a first registration structure formed on a substrate and having a first pattern and a second pattern as viewed from a point perpendicular to a plane generally defined by said substrate, wherein each of said first and second patterns has a center, and wherein the displacement between the centers of said first and second patterns is selected to be zero, absent any misalignment induced by said integrated circuit fabrication process steps; and a plurality of second registration structures formed on said substrate and located on said substrate in spaced apart relation to one another and to said first registration structure, each of said second registration structures having a third pattern and a fourth pattern, wherein each of said third and fourth patterns have a center, and wherein the displacement between the centers of each said third pattern and its respective fourth pattern is selected to be of a known non-zero magnitude and a known direction, absent any misalignment induced by said integrated circuit fabrication process steps.
Claim 3
Dependent Claim
44 words
The calibration structure, as set forth in claim 1, wherein said first registration structure comprises: a first layer on said substrate forming said first pattern; an intermediary layer covering said first pattern; and a second layer on said intermediary layer forming said second pattern.
Claim 4
Dependent Claim
46 words
The calibration structure, as set forth in claim 2, wherein each of said second registration structures comprise: a first layer on said substrate forming said third pattern; an intermediary layer covering said third pattern; and a second layer on said intermediary layer forming said fourth pattern.
Claim 5
Dependent Claim
36 words
The calibration structure, as set forth in claim 1, wherein said first registration structure comprises: a first layer on said substrate forming said first pattern; and a second layer on said substrate forming said second pattern.
Claim 6
Dependent Claim
38 words
The calibration structure, as set forth in claim 4, wherein each of said second registration structures comprise: a first layer on said substrate forming said third pattern; and a second layer on said substrate forming said fourth pattern.
Claim 7
Dependent Claim
57 words
The calibration structure, as set forth in claim 1, wherein: said second pattern is rectangular having an opening therein and said first pattern is rectangular and positioned within said opening; and each of said fourth patterns is rectangular having an opening therein and each of said respective third patterns is rectangular and positioned within said respective opening.
Claim 8
Dependent Claim
60 words
The calibration structure, as set forth in claim 1, wherein said displacement between said center of said first pattern and said center of said second pattern and between each center of said third patterns and said respective center of said fourth patterns is determined with reference to respective, orthogonal, intersecting X and Y axes defined as lying in said plane.
Claim 9
Dependent Claim
55 words
The calibration structure, as set forth in claim 7, wherein the intersection of each of said respective X and Y axis define an x, y coordinate (0, 0), and wherein said centers of each of said first and third patterns is located at x, y coordinate (o, o) of its respective X and Y axis.
Claim 10
Independent Claim
370 words
A method for calibrating a registration measurement system, said method comprising the steps of: determining any tool induced shift exhibited by said registration measurement system and if said registration measurement system can accept tool induced shift corrections, adjusting said registration measurement system for said determined tool induced shift; positioning a calibration structure on said registration measurement system in an initial position, said calibration structure having thereon a registration structure having a preselected zero offset, and a plurality of registration structures having respective preselected non-zero offsets; making a first measurement of displacement of said zero offset registration structure in a given direction using said registration measurement system; rotating said calibration structure by 90 degrees from said initial position; making a second measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said calibration structure by 180 degrees from said initial position; making a third measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said calibration structure by 270 degrees from said initial position; making a fourth measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; verifying said tool induced shift determination and checking for any astigmatism in response to said first, second, third, and fourth measurements; rotating said calibration structure to said initial position; making a fifth measurement of displacement of each of said registration structures in said given direction using said registration measurement system; calculating adjusted fifth displacement measurements for said non-zero offset registration structures by subtracting said fifth zero offset displacement measurement from each of said respective fifth non-zero displacement measurements, and if said registration measurement system cannot accept tool induced shift corrections, subtracting said determined tool induced shift from each of said respective fifth non-zero displacement measurements; deriving a calibration curve from said adjusted fifth displacement measurements and said respective preselected zero and non-zero offsets; and adjusting said registration measurement system using said calibration curve to compensate for systematic errors exhibited by said registration measurement system and to compensate for tool induced shift if said determined tool induced shift was subtracted from each of said respective fifth non-zero displacement measurements.
Claim 11
Independent Claim
370 words
A method for calibrating a registration measurement system, said method comprising the steps of: determining any tool induced shift exhibited by said registration measurement system and if said registration measurement system can accept tool induced shift corrections, adjusting said registration measurement system for said determined tool induced shift; positioning a calibration structure on said registration measurement system in an initial position, said calibration structure having thereon a registration structure having a preselected zero offset, and a plurality of registration structures having respective preselected non-zero offsets; making a first measurement of displacement of said zero offset registration structure in a given direction using said registration measurement system; rotating said calibration structure by 90 degrees from said initial position; making a second measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said calibration structure by 180 degrees from said initial position; making a third measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said calibration structure by 270 degrees from said initial position; making a fourth measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; verifying said tool induced shift determination and checking for any astigmatism in response to said first, second, third, and fourth measurements; rotating said calibration structure to said initial position; making a fifth measurement of displacement of each of said registration structures in said given direction using said registration measurement system; calculating adjusted fifth displacement measurements for said non-zero offset registration structures by subtracting said fifth zero offset displacement measurement from each of said respective fifth non-zero displacement measurements, and if said registration measurement system cannot accept tool induced shift corrections, subtracting said determined tool induced shift from each of said respective fifth non-zero displacement measurements; deriving a calibration curve from said adjusted fifth displacement measurements and said respective preselected zero and non-zero offsets; and adjusting said registration measurement system using said calibration curve to compensate for systematic errors exhibited by said registration measurement system and to compensate for tool induced shift if said determined tool induced shift was subtracted from each of said respective fifth non-zero displacement measurements.
Claim 12
Dependent Claim
108 words
The method, as set forth in claim 9, wherein said step of determining said tool induced shift is accomplished by: positioning said calibration structure on said registration measurement system in said initial position; making an initial measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said zero offset registration structure by 180 degrees from said initial position; making a subsequent measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; and calculating any tool induced shift exhibited by said registration measurement system in response to said initial and subsequent measurements.
Claim 13
Dependent Claim
45 words
The method, as set forth in claim 10, wherein said step of calculating tool induced shift is accomplished using the equation: TIS=(D.sub.180 ±D.sub.0)/2; where TIS represents said tool induced shift, D 180 represents said subsequent displacement measurement, and D 0 represents said initial displacement measurement.
Claim 14
Dependent Claim
50 words
The method, as set forth in claim 11, wherein said step of adjusting said registration measurement system using said determined tool induced shift is accomplished by: deriving a TIS calibration curve from said equation; and altering measurement made by said registration measurement system in accordance with said TIS calibration curve.
Claim 15
Dependent Claim
101 words
The method, as set in claim 9, wherein said step of calculating adjusted fifth displacement measurements is accomplished using the equation, if said registration measurement system cannot accept tool induced shift corrections: D.sub.Sn adj =D.sub.Sn -TIS-D.sub.S0 ; where n represents one of said respective non-zero registration structures; D Sn adj represents the respective fifth adjusted displacement measurement for one of said non-zero offset registration structures; D Sn represents the respective fifth displacement measurement for one of said non-zero offset registration structures; TIS represents said tool induced shift; and D S0 represents the fifth displacement measurement for said zero offset registration structure.
Claim 16
Dependent Claim
96 words
The method, as set forth in claim 9, wherein said step of calculating adjusted fifth displacement measurements is accomplished using the equation, if said registration measurement system can accept tool induced shift corrections: D.sub.Sn adj =D.sub.Sn -D.sub.S0 ; where n represents one of said respective non-zero registration structures; D Sn adj represents the respective fifth adjusted displacement measurement for one of said non-zero offset registration structures; D Sn represents the respective fifth displacement measurement for one of said non-zero offset registration structures; and D S0 represents the fifth displacement measurement for said zero offset registration structure.
Claim 17
Independent Claim
376 words
A method for calibrating a registration measurement system, said method comprising the steps of: positioning a calibration structure on said registration measurement system in an initial position, said calibration structure having thereon a registration structure having a preselected zero offset and a plurality of registration structures having respective preselected non-zero offsets; making a first measurement of displacement of said zero offset registration structure in a given direction using said registration measurement system; rotating said zero offset registration structure by 180 degrees from said initial position; making a second measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; calculating a measurement shift induced by said registration measurement system in response to said first and second measurements; adjusting said registration measurement system to compensate for said induced shift; rotating said calibration structure to said initial position; making a third measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said registration structures by 90 degrees from said initial position; making a fourth measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said registration structures by 180 degrees from said initial position; making a fifth measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said registration structures by 270 degrees from said initial position; making a sixth measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; verifying said calculated measurement shift and checking for any astigmatism in response to said third, fourth, fifth and sixth measurements; rotating said calibration structure to said initial position; making a seventh measurement of displacement of each of said registration structures in said given direction using said registration measurement system; calculating adjusted seventh displacement measurements for said non-zero offset registration structures by subtracting said seventh zero offset displacement measurement from each of said respective seventh non-zero displacement measurements; deriving a calibration curve from said adjusted seventh displacement measurements and said respective preselected zero and non-zero offsets; and adjusting said registration measurement system using said calibration curve to compensate for systematic errors exhibited by said registration measurement system.
Claim 18
Independent Claim
376 words
A method for calibrating a registration measurement system, said method comprising the steps of: positioning a calibration structure on said registration measurement system in an initial position, said calibration structure having thereon a registration structure having a preselected zero offset and a plurality of registration structures having respective preselected non-zero offsets; making a first measurement of displacement of said zero offset registration structure in a given direction using said registration measurement system; rotating said zero offset registration structure by 180 degrees from said initial position; making a second measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; calculating a measurement shift induced by said registration measurement system in response to said first and second measurements; adjusting said registration measurement system to compensate for said induced shift; rotating said calibration structure to said initial position; making a third measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said registration structures by 90 degrees from said initial position; making a fourth measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said registration structures by 180 degrees from said initial position; making a fifth measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; rotating said registration structures by 270 degrees from said initial position; making a sixth measurement of displacement of said zero offset registration structure in said given direction using said registration measurement system; verifying said calculated measurement shift and checking for any astigmatism in response to said third, fourth, fifth and sixth measurements; rotating said calibration structure to said initial position; making a seventh measurement of displacement of each of said registration structures in said given direction using said registration measurement system; calculating adjusted seventh displacement measurements for said non-zero offset registration structures by subtracting said seventh zero offset displacement measurement from each of said respective seventh non-zero displacement measurements; deriving a calibration curve from said adjusted seventh displacement measurements and said respective preselected zero and non-zero offsets; and adjusting said registration measurement system using said calibration curve to compensate for systematic errors exhibited by said registration measurement system.
Claim 19
Dependent Claim
44 words
The method, as set forth in claim 15, wherein said step of calculating a measurement shift is accomplished using the equation: TIS=(D.sub.180 ±D.sub.0)/2; where TIS represents said measurement shift, D 180 represents said second displacement measurement, and D 0 represents said first displacement measurement.
Claim 20
Dependent Claim
85 words
The method, as set forth in claim 15, wherein said step of calculating adjusted seventh displacement measurements is accomplished using the equation: D.sub.Sn adj =D.sub.Sn -D.sub.S0 ; where n represents one of said respective non-zero registration structures; D Sn adj represents the respective adjusted seventh displacement measurement for one of said non-zero offset registration structures; D Sn represents the respective seventh displacement measurement for one of said non-zero offset registration structures; and D so represents the seventh displacement measurement for said zero offset registration structure.
Claim 21
Dependent Claim
50 words
The method, as set forth in claim 15, wherein said step of adjusting said registration measurement system to compensate for said induced shift is accomplished by: deriving a TIS calibration curve from said equation; and altering measurements made by said registration measurement system in accordance with said TIS calibration curve.
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| 3.5 Years (Year 4) | 1997-01-17 | 1997-07-19 | 1998-01-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-17 | 2001-07-19 | 2002-01-18 | $3760.00 | Window Closed / Lapsed |
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