US4938600A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for measuring registration between layers of a semiconductor wafer
Assignee: Nanometrics Inc
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Filing: 1989-02-09
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Granted: 1990-07-03
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Expires: 2009-02-09
Abstract
Abstract Method and apparatus for measuring displacement between layers of a semiconductor wafer wherein systematic errors associated with the measurement system are eliminated. An optical system, including a microscope and a camera, records an image of registration patterns on different layers of the wafer. The image is analyzed to measure displacement between the registration patterns. A first measurement is taken, the wafer is rotated by 180 DEG about the measurement axis, and a second measurement is taken. The actual displacement between layers of the semiconductor wafer is calculated from the first and second measurements. Since the measured displacements change sign when the wafer is rotated and the systematic errors remain constant, systematic errors drop out of the calculated values of actual displacement. System errors can also be calculated for subsequent correction of measured values.
Inventors
- 👤 Stephen W. Into
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 00:30
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70591; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G03F7/70605; G03F7/70616; G03F7/70633
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
114 words
A method for measuring displacement between a first pattern and a second pattern on a workpiece, comprising the steps of: positioning the workpiece relative to a measurement apparatus for measurement of said displacement alonq a prescribed measurement direction; making a first measurement of displacement between the first pattern and the second pattern; causing rotation of the workpiece and the measurement apparatus relative to each other by substantially 180° about an axis that is substantially parallel to the measurement direction; making a second measurement of displacement between the first pattern and the second pattern; and determining an actual displacement between the first pattern and the second pattern from said first measurement and said second measurement.
Claim 2
Independent Claim
114 words
A method for measuring displacement between a first pattern and a second pattern on a workpiece, comprising the steps of: positioning the workpiece relative to a measurement apparatus for measurement of said displacement alonq a prescribed measurement direction; making a first measurement of displacement between the first pattern and the second pattern; causing rotation of the workpiece and the measurement apparatus relative to each other by substantially 180° about an axis that is substantially parallel to the measurement direction; making a second measurement of displacement between the first pattern and the second pattern; and determining an actual displacement between the first pattern and the second pattern from said first measurement and said second measurement.
Claim 3
Dependent Claim
73 words
A method for measuring displacement as defined in claim 1 wherein the step of determining an actual displacement includes the steps of determining an x-axis component, X, of actual displacement according to the equation X=(X1-X2)/2 where X1=x-axis component of first measurement and X2=x-axis component of second measurement, and determining a y-axis component, Y, of actual displacement according to the equation Y=(Y1-Y2)/2 where Y1=y-axis component of first measurement and Y2=y-axis component of second measurement.
Claim 4
Dependent Claim
33 words
A method for measuring displacement as defined in claim 2 wherein the step of causing relative rotation of the workpiece and the measurement apparatus includes the step of rotating the workpiece by 180°.
Claim 5
Dependent Claim
36 words
A method for measuring displacement as defined in claim 2 wherein the steps of making a first measurement of displacement and making a second measurement of displacement each include the step of optically sensing the displacement.
Claim 6
Dependent Claim
30 words
A method for measuring displacement as defined in claim 2 further including the step of determining systematic errors in said measurement apparatus from said first measurement and said second measurement.
Claim 7
Dependent Claim
52 words
A method for measuring displacement as defined in claim 2 further including the steps of determining an x-axis component, A, of error in said first and second measurements according to the equation A=(X1+X2)/2, and determining a y-axis component, B, of error in said first and second measurements according to the equation B=(Y1+Y2)/2.
Claim 8
Independent Claim
108 words
A method for measuring registration between a first layer and a second layer of a semiconductor wafer, comprising the steps of: positioning the wafer for measurement of registration alone a prescribed measurement direction; making a first measurement of displacement between a first pattern in said first layer and a second pattern in said second layer; rotating the semiconductor wafer by substantially 180° about an axis that is substantially parallel to said measurement direction; making a second measurement of displacement between said first pattern and said second pattern; and determining an actual displacement between said first pattern and said second pattern from said first measurement and said second measurement.
Claim 9
Independent Claim
108 words
A method for measuring registration between a first layer and a second layer of a semiconductor wafer, comprising the steps of: positioning the wafer for measurement of registration alone a prescribed measurement direction; making a first measurement of displacement between a first pattern in said first layer and a second pattern in said second layer; rotating the semiconductor wafer by substantially 180° about an axis that is substantially parallel to said measurement direction; making a second measurement of displacement between said first pattern and said second pattern; and determining an actual displacement between said first pattern and said second pattern from said first measurement and said second measurement.
Claim 10
Dependent Claim
73 words
A method for measuring registration as defined in claim 7 wherein the step of determining an actual displacement includes the steps of determining an x-axis component, X, of actual displacement according to the equation X=(X1-X2)/2 wherein X1=x-axis component of first measurement and X2=x-axis component of second measurement, and determining a y-axis component, Y, of actual displacement according to the equation Y=(Y1-Y2)/2 where Y1=y-axis component of first measurement and Y2=y-axis component of second measurement.
Claim 11
Dependent Claim
52 words
A method for measuring registration as defined in claim 8 further including the steps of determining an x-axis component, A, of error in said first and second measurements according to the equation A=(X1+X2)/2, and determining a y-axis component, B, of error in said first and second measurements according to the equation B=(Y1+Y1)/2.
Claim 12
Dependent Claim
124 words
Apparatus for measuring displacement between a first pattern and a second pattern on a workpiece, comprising: measurement means for making a first measurement of displacement between the first pattern and the second pattern and for making a second measurement of displacement between the first pattern and the second pattern, said first and second measurements each being taken along a prescribed measurement direction; means for causing rotation of the workpiece and the measurement means relative to each other after said first measurement and before said second measurement, by substantially 180° about an axis that is substantially parallel to the measurement direction; and means responsive to said first measurement and said second measurement for calculating an actual displacement between said first pattern and said second pattern.
Claim 13
Dependent Claim
124 words
Apparatus for measuring displacement between a first pattern and a second pattern on a workpiece, comprising: measurement means for making a first measurement of displacement between the first pattern and the second pattern and for making a second measurement of displacement between the first pattern and the second pattern, said first and second measurements each being taken along a prescribed measurement direction; means for causing rotation of the workpiece and the measurement means relative to each other after said first measurement and before said second measurement, by substantially 180° about an axis that is substantially parallel to the measurement direction; and means responsive to said first measurement and said second measurement for calculating an actual displacement between said first pattern and said second pattern.
Claim 14
Dependent Claim
31 words
Apparatus as defined in claim 10 wherein said measurement means includes a microscope and camera means for sensing said first pattern and said second pattern and providing electrical signals representative thereof.
Claim 15
Dependent Claim
66 words
Apparatus as defined in claim 11 wherein said calculating means comprises means for calculating an x-axis component, X, of actual displacement according to the equation X=(X1-X2)/2 where X1=x-axis component of first measurement and X2=x-axis component of second measurement, and means for calculating a y-axis component, Y, of actual displacement according to the equation Y=(Y1-Y2)/2 where Y1=y-axis component of first measurement and Y2=y-axis component of second measurement.
Claim 16
Independent Claim
117 words
A method for determining systematic errors in a system for measuring displacement between a first pattern and a second pattern on a workpiece, comprising the steps of: positioning the workpiece relative to a measurement apparatus for measurement of said displacement along a prescribed measurement direction; making a first measurement of displacement between the first pattern and the second pattern; causing rotation of the workpiece and the measurement apparatus relative to each other by substantially 180° about an axis that is substantially parallel to the measurement direction; making a second measurement of displacement between the first pattern and the second pattern; and determining the systematic errors in the measurement system from said first measurement and said second measurement.
Claim 17
Independent Claim
117 words
A method for determining systematic errors in a system for measuring displacement between a first pattern and a second pattern on a workpiece, comprising the steps of: positioning the workpiece relative to a measurement apparatus for measurement of said displacement along a prescribed measurement direction; making a first measurement of displacement between the first pattern and the second pattern; causing rotation of the workpiece and the measurement apparatus relative to each other by substantially 180° about an axis that is substantially parallel to the measurement direction; making a second measurement of displacement between the first pattern and the second pattern; and determining the systematic errors in the measurement system from said first measurement and said second measurement.
Claim 18
Dependent Claim
71 words
A method for measuring systematic errors as defined in claim 13 wherein the step of determining systematic errors includes the steps of determining an x-axis component, A, of error according to the equation A=(X1-X2)/2 where X1=x-axis component of first measurement and X2=x-axis component of second measurement, and determining a y-axis component, B, of error according to the equation B=(Y1-Y2)/2 where Y1=y-axis component of first measurement and Y2=y-axis component of second measurement.
References Cited (Backward Citations)
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