US4710440A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Test mask for determining alignment of an automatic IC mask testing apparatus
Assignee: Intersil Corp
•
Filing: 1986-07-14
•
Granted: 1987-12-01
•
Expires: 2006-07-14
Abstract
Abstract A test mask is provided for determining that an automatic IC photomask testing machine is scanning within a desired die area. The test mask includes a plurality of care areas which correspond to the die areas of a mask to be tested. The peripheral region surrounding each care area includes portions which may be opaque and portions which may be transparent. These opaque and transparent portions are arranged so that when two care areas are being scanned and the scan improperly leaves the care area and enters the peripheral region, the portion of the peripheral region of the one care area being scanned is opaque while the portion of the peripheral region of the other care area is transparent. This will be interpreted by the mask testing machine as an error and will therefor be indicative that the machine will scan outside of the desired die areas when testing an IC photomask.
Inventors
- 👤 Paul J. Del Priore
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70591; G03F1/00; G03F1/38; G03F1/44; G03F7/70605; G03F7/70616; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
141 words
A mask for determining whether or not an automatic IC mask testing apparatus is scanning within a desired care area comprising: (a) a substrate having a major surface; (b) a plurality of identical care areas defined on said surface in substantially parallel rows, each of said care areas, having first optical properties and being surrounded by peripheral region on said surface which is adjacent an edge of said care area and extends outwardly therefrom, wherein portions of said peripheral regions have said first optical properties and other portions of said peripheral regions have second optical properties so that for a pair of said care areas, each portions of said peripheral region of one of said pair having said first optical properties spatially corresponds to a portion of said peripheral region of the other of said pair having said second optical properties.
Claim 2
Dependent Claim
141 words
A mask for determining whether or not an automatic IC mask testing apparatus is scanning within a desired care area comprising: (a) a substrate having a major surface; (b) a plurality of identical care areas defined on said surface in substantially parallel rows, each of said care areas, having first optical properties and being surrounded by peripheral region on said surface which is adjacent an edge of said care area and extends outwardly therefrom, wherein portions of said peripheral regions have said first optical properties and other portions of said peripheral regions have second optical properties so that for a pair of said care areas, each portions of said peripheral region of one of said pair having said first optical properties spatially corresponds to a portion of said peripheral region of the other of said pair having said second optical properties.
Claim 3
Dependent Claim
21 words
The mask set forth in claim 1 wherein said pair of care areas are in the same one of said rows.
Claim 4
Dependent Claim
15 words
The mask set forth in claim 2 wherein said care areas are of rectangular shape.
Claim 5
Dependent Claim
94 words
The mask set forth in claim 3 wherein said plurality of identical care areas are further defined on said surface in substantially parallel columns and spaced apart so that the portion of said peripheral regions therebetween extend from the edges of the care areas in one column to the edges of the care areas in an adjacent column and the portions of said peripheral regions of said care areas between adjacent rows extend from the edges of the care areas in one row to the edges of the care areas in an adjacnt row.
Claim 6
Dependent Claim
49 words
The mask set forth in claim 4 wherein said portions of said peripheral regions between a pair of adjacent columns of said care areas have first optical properties and said portions of said peripheral regions between another pair of adjacent columns of said care areas have second optical properties.
Claim 7
Dependent Claim
31 words
The mask set forth in claim 5 wherein said first optical property substantially prevents transmission of radiation through said mask, and wherein said second optical property permits transmission of radiation therethrough.
Claim 8
Dependent Claim
35 words
The mask set forth in claim 5 wherein said first optical property substantially prevents reflection of radiation of a first wavelength, and wherein said second optical property permits reflection of radiation of said first wavelength.
References Cited (Backward Citations)
US3771872A
Cited
US3963354A
Cited
US4218142A
Cited
US4441250A
Cited
US4423959A
Cited
JPS58194354A
Cited
US4532650A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-11-30 | 1991-06-01 | 1991-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-11-30 | 1995-06-01 | 1995-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-11-30 | 1999-06-01 | 1999-12-01 | $7700.00 | Window Closed / Lapsed |