US5273775A
Expired / Lapsed
US
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Process for selectively depositing copper aluminum alloy onto a substrate
Assignee: Versum Materials US LLC
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Filing: 1992-04-13
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Granted: 1993-12-28
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Expires: 2012-04-13
Abstract
Abstract An improved method is provided for depositing a thin copper aluminum alloy film on a patterned silicon substrate. A copper base layer conforming to the existing pattern is initially formed on the surface of the substrate, followed by contact with vapors of an aminealane compound, which causes aluminum to be selectively deposited on the copper base layer portion of the substrate. Preferably, copper is applied to a diffusion barrier surface such as tungsten using chemical vapor deposition from a complex of copper (I) perfluoroalkyl-β-diketonate and an olefin or silylolefin. The entire process of developing an alloy film can be carried out without exceeding 200° C.
Inventors
- 👤 Paul N. Dyer
- 👤 Stephen M. Fine
- 👤 John A. T. Norman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 18:40
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/412; C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/16; C23C16/00; C23C16/04; C23C16/06; C23C16/18; C23C16/20; H10P14/42; H10P14/43; H10P14/432
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
104 words
A process for selectively depositing aluminum onto a pattern of exposed silicon formed by coating a silicon substrate with an oxide layer and etching away a portion of the oxide layer to form the pattern of exposed silicon, which process comprises: (a) depositing a copper base layer on the pattern of exposed silicon to form a patterned copper base layer; and (b) selectively depositing aluminum onto the patterned copper base layer by contacting said base layer with vapors of an aminealane compound at a temperature from 25° to 180° C. to selectively deposit aluminum onto the patterned copper base layer portion of the substrate.
Claim 2
Dependent Claim
104 words
A process for selectively depositing aluminum onto a pattern of exposed silicon formed by coating a silicon substrate with an oxide layer and etching away a portion of the oxide layer to form the pattern of exposed silicon, which process comprises: (a) depositing a copper base layer on the pattern of exposed silicon to form a patterned copper base layer; and (b) selectively depositing aluminum onto the patterned copper base layer by contacting said base layer with vapors of an aminealane compound at a temperature from 25° to 180° C. to selectively deposit aluminum onto the patterned copper base layer portion of the substrate.
Claim 3
Dependent Claim
11 words
The process of claim 1 wherein said aminealane compound is trimethylaminealane.
Claim 4
Dependent Claim
16 words
The process of claim 1 wherein said copper base layer is deposited by chemical vapor deposition.
Claim 5
Dependent Claim
16 words
The process of claim 1 wherein said copper base layer is deposited by physical vapor deposition.
Claim 6
Dependent Claim
25 words
The process of claim 1 wherein the silicon substrate is contacted with vapors of an aminealane Compound at a temperature from 25° to 145° C.
Claim 7
Dependent Claim
25 words
The process of claim 5 wherein the silicon substrate is contacted with vapors of an aminealane compound at a temperature from 100° to 145° C.
Claim 8
Dependent Claim
11 words
The process of claim 6 wherein said aminealane compound is trimethylaminealane.
Claim 9
Dependent Claim
15 words
The process of claim 1 wherein said aminealane compound is present in a carrier gas.
Claim 10
Dependent Claim
13 words
The process of claim 8 wherein said carrier gas is argon or hydrogen.
Claim 11
Dependent Claim
25 words
The process of claim 1 wherein a diffusion barrier coating is applied to the exposed silicon portion of the substrate prior to depositing the copper.
Claim 12
Dependent Claim
25 words
The process of claim 10 wherein said diffusion barrier coating is selected from the group consisting of Ti, TiN, Ta, TaN, W and combinations thereof.
Claim 13
Dependent Claim
16 words
The process of claim 1 wherein the substrate undergoes annealing subsequent to the depositing of aluminum.
Claim 14
Dependent Claim
12 words
The process of claim 12 wherein said annealing is rapid thermal annealing.
Claim 15
Dependent Claim
16 words
The process of claim 10 wherein said copper base layer is deposited by chemical vapor deposition.
Claim 16
Dependent Claim
36 words
The process of claim 14 wherein said chemical vapor deposition is effected using an organometallic copper complex comprising a copper (I) per-fluoroalkyl-β-diketonate and an olefin or a silylolefin at a temperature at or below 200° C.
Claim 17
Dependent Claim
121 words
A process for selectively depositing a copper aluminum alloy on a metallic surface or electrically conducting surface which comprises (a) contacting said surface with an organometallic complex of copper (I) perfluoroalkyl-β-diketonate and olefin or silylolefin under chemical vapor deposition conditions including a temperature at or below 200° C. to form a copper layer on said surface, (b) contacting said copper layer with a base adduct of alane under chemical vapor deposition conditions including a temperature in the range of 25° to 180° C. to deposit aluminum on said copper layer, and (c) during or subsequent to step (b) subjecting said copper layer and deposited aluminum to a temperature which promotes migration of copper ions into said aluminum to form said alloy.
Claim 18
Dependent Claim
121 words
A process for selectively depositing a copper aluminum alloy on a metallic surface or electrically conducting surface which comprises (a) contacting said surface with an organometallic complex of copper (I) perfluoroalkyl-β-diketonate and olefin or silylolefin under chemical vapor deposition conditions including a temperature at or below 200° C. to form a copper layer on said surface, (b) contacting said copper layer with a base adduct of alane under chemical vapor deposition conditions including a temperature in the range of 25° to 180° C. to deposit aluminum on said copper layer, and (c) during or subsequent to step (b) subjecting said copper layer and deposited aluminum to a temperature which promotes migration of copper ions into said aluminum to form said alloy.
Claim 19
Dependent Claim
39 words
The process of claim 16 wherein step (a) is carried out at a temperature in the range of 120° to 200° C. and step (b) is carried out at a temperature in the range of 100° to 145° C.
Claim 20
Dependent Claim
19 words
The process of claim 16 wherein said metallic surface or other electrically conducting surface is a patterned diffusion barrier.
Claim 21
Dependent Claim
14 words
The process of claim 16 wherein said base adduct of alane is an aminealane.
Claim 22
Dependent Claim
10 words
The process of claim 19 wherein said aminealane is trimethylaminealane.
Claim 23
Dependent Claim
15 words
The process of claim 16 wherein said copper (I) perfluoroalkyl-β-diketonate is complexed with an olefin.
Claim 24
Dependent Claim
23 words
The process of claim 21 wherein said complex formed form said copper (I) perfluoroalkyl-β-diketonate and said olefin is Cu +1 (hexafluoroacetylacetonate) -1 .
Claim 25
Dependent Claim
10 words
The process of claim 22 wherein said olefin is 1,5-cyclooctadiene.
Claim 26
Dependent Claim
10 words
The process of claim 22 wherein said olefin is norbornadiene.
Claim 27
Dependent Claim
17 words
The process of claim 16 wherein said organometallic copper complex is Cu +1 (hexafluoroacetylacetonate) -1 • trimethylvinylsilane.
Claim 28
Dependent Claim
110 words
The process of claim 16 wherein said organometallic copper complex is represented by the structural formula: ##STR2## wherein R 1 and R 3 are each independently C 1 to C 8 perfluoroalkyl, R 2 is H, F or C 1 to C 8 perfluoroalkyl, each R 4 is independently H, C 1 to C 8 alkyl or --Si(R 6 ) 3 , each R 5 is independently H, C 1 to C 8 alkyl or alkenyl or phenyl or both R 5 groups can be joined in a cycloolefin, and each R 6 is independently phenyl or C 1 to C 8 alkyl, including both cis and trans isomers thereof.
Claim 29
Dependent Claim
28 words
The process of claim 26 wherein at least one R 4 is --Si(R 6 ) 3 and each R 5 is H or C 1 -C 8 alkyl.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-12-27 | 1997-06-28 | 1997-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-12-27 | 2001-06-28 | 2001-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-12-27 | 2005-06-28 | 2005-12-28 | $7700.00 | Window Closed / Lapsed |