Microwave plasma CVD method for coating a substrate with high thermal-conductivity diamond material

Claim 1

A method for forming a coating on a substrate form a coated article, said coating consisting of polycrystalline diamond, said polycrystalline diamond characterized by being substantially free of voids, having an average crystallite size greater than about 15 microns, said diamond having a maximum intensity of the diamond Raman peak in counts/sec divided by the intensity of photoluminescence at 1270 cm -1 greater than about 3, a Raman sp 3 full width half maximum less than about 6 cm -1 and a diamond-to-graphite Raman ratio greater than about 25, comprising the steps of: preparing said substrate by abrasion with diamond particles; placing said substrate in a CVD reactor suitable for diamond deposition; depositing polycrystalline diamond in said CVD reactor during a first deposition stage by providing an atmosphere consisting essentially of a mixture of about 200 sccm H 2 and 10 sccm CH 4 , at a pressure of about 90 Torr, providing between about 1,800 and 1,950 watts of microwave power at a frequency of about 2.45 GHz to ignite and sustain a plasma in the region of said substrate, and maintaining said substrate at a temperature of between about 625° C. and 675° C. for a period of time sufficient to form a first polycrystalline diamond layer which is substantially continuous; depositing polycrystalline diamond in said CVD reactor during a second deposition stage by providing an atmosphere consisting essentially of a mixture of about 200 sccm H 2 , 4.6 sccm CO, and 9 sccm CH 4 at a pressure of about 90 Torr, providing between about 1,800 and 1,950 watts of microwave power at a frequency of about 2.45 GHz to ignite and sustain a plasma in the region of said substrate, and maintaining said substrate at a temperature of between about 625° C. and 675° C. for a period of time sufficient to form a second polycrystalline diamond layer having a thickness; and removing the coated article from said CVD reactor.

Claim 2

A method for forming a coating on a substrate form a coated article, said coating consisting of polycrystalline diamond, said polycrystalline diamond characterized by being substantially free of voids, having an average crystallite size greater than about 15 microns, said diamond having a maximum intensity of the diamond Raman peak in counts/sec divided by the intensity of photoluminescence at 1270 cm -1 greater than about 3, a Raman sp 3 full width half maximum less than about 6 cm -1 and a diamond-to-graphite Raman ratio greater than about 25, comprising the steps of: preparing said substrate by abrasion with diamond particles; placing said substrate in a CVD reactor suitable for diamond deposition; depositing polycrystalline diamond in said CVD reactor during a first deposition stage by providing an atmosphere consisting essentially of a mixture of about 200 sccm H 2 and 10 sccm CH 4 , at a pressure of about 90 Torr, providing between about 1,800 and 1,950 watts of microwave power at a frequency of about 2.45 GHz to ignite and sustain a plasma in the region of said substrate, and maintaining said substrate at a temperature of between about 625° C. and 675° C. for a period of time sufficient to form a first polycrystalline diamond layer which is substantially continuous; depositing polycrystalline diamond in said CVD reactor during a second deposition stage by providing an atmosphere consisting essentially of a mixture of about 200 sccm H 2 , 4.6 sccm CO, and 9 sccm CH 4 at a pressure of about 90 Torr, providing between about 1,800 and 1,950 watts of microwave power at a frequency of about 2.45 GHz to ignite and sustain a plasma in the region of said substrate, and maintaining said substrate at a temperature of between about 625° C. and 675° C. for a period of time sufficient to form a second polycrystalline diamond layer having a thickness; and removing the coated article from said CVD reactor.