Patent JPS6415652A successfully refreshed from Google Patents.
Patent US5268056A successfully refreshed from Google Patents.
US5268056A
Expired / Lapsed
US
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Plasma surface treating method and apparatus
Assignee: Panasonic Holdings Corp
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Filing: 1992-12-16
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Granted: 1993-12-07
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Expires: 2012-12-16
Abstract
Abstract In a plasma surface treating method, a sample to be treated is supported on a first electrode within a vacuum vessel and a second electrode is caused to confront the first electrode. Active species of negative ions are then generated by means of a direct current glow discharge produced in an abnormal glow discharge region and are subsequently impinged upon a surface of the sample to induce a chemical reaction with the sample.
Inventors
- 👤 Toshinori Kishi
- 👤 Michiyoshi Nagashima
- 👤 Fumiaki Ueno
- 👤 Taro Nambu
- 👤 Hiroyuki Ogawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:03
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32018; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/427; H01J37/32027; H01J37/32045; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334; H01J2237/3342
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
70 words
A plasma surface treating apparatus comprising: a rotary electrode capable of supporting a sample to be treated for rotation together therewith; a counterelectrode confronting said rotary electrode and having an opening defined therein; a direct current source disposed between said rotary electrode and said counterelectrode for applying a voltage; and an ion source disposed in face-to-face relationship with said opening in said counterelectrode for forming a pattern on said sample.
Claim 2
Dependent Claim
70 words
A plasma surface treating apparatus comprising: a rotary electrode capable of supporting a sample to be treated for rotation together therewith; a counterelectrode confronting said rotary electrode and having an opening defined therein; a direct current source disposed between said rotary electrode and said counterelectrode for applying a voltage; and an ion source disposed in face-to-face relationship with said opening in said counterelectrode for forming a pattern on said sample.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-12-06 | 1997-06-07 | 1997-12-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-12-06 | 2001-06-07 | 2001-12-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-12-06 | 2005-06-07 | 2005-12-07 | $7700.00 | Window Closed / Lapsed |