Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
88 words
A ceramic heater having a sintered nonoxide ceramic body, which has a heating part and a supporting part, and a heating resistor which is embedded in the heating part of the ceramic body, characterized in that said heating part of said ceramic body is formed of an aluminum nitride based ceramic at least in a core region thereof which is in contact with and encloses said heating element, and that said supporting part is formed of a silicon nitride based ceramic at least in a surface region thereof.
Claim 2
Dependent Claim
88 words
A ceramic heater having a sintered nonoxide ceramic body, which has a heating part and a supporting part, and a heating resistor which is embedded in the heating part of the ceramic body, characterized in that said heating part of said ceramic body is formed of an aluminum nitride based ceramic at least in a core region thereof which is in contact with and encloses said heating element, and that said supporting part is formed of a silicon nitride based ceramic at least in a surface region thereof.
Claim 3
Dependent Claim
30 words
A ceramic heater according to claim 1, wherein the principal material of said heating resistor is selected from the group consisting of elemental tungsten, tungsten carbide (WC) and tungsten alloys.
Claim 4
Dependent Claim
19 words
A ceramic heater according to claim 1, wherein the principal material of said heating resistor is a metal nitride.
Claim 5
Dependent Claim
21 words
A ceramic heater according to claim 3, wherein said metal nitride is selected from the group consisting of TiN and TaN.
Claim 6
Dependent Claim
165 words
A ceramic heater having a sintered nonoxide ceramic body, which has a heating part and a supporting part, and a heating resistor which is embedded in the heating part of the ceramic body, characterized in that said heating part of said ceramic body is formed of an aluminum nitride based ceramic at least in a core region thereof which is in contact with and encloses said heating element, and that said supporting part is formed of a silicon nitride based ceramic at least in a surface region thereof, and wherein said ceramic body has a joint part which is interposed between said heating part and said supporting part and is formed of a mixed ceramic containing both aluminum nitride and silicon nitride with a gradient of the proportion of aluminum nitride to silicon nitride such that said proportion becomes maximal in one end region of the joint part adjacent to said heating part and minimal in the opposite end region adjacent to said supporting part.
Claim 7
Dependent Claim
165 words
A ceramic heater having a sintered nonoxide ceramic body, which has a heating part and a supporting part, and a heating resistor which is embedded in the heating part of the ceramic body, characterized in that said heating part of said ceramic body is formed of an aluminum nitride based ceramic at least in a core region thereof which is in contact with and encloses said heating element, and that said supporting part is formed of a silicon nitride based ceramic at least in a surface region thereof, and wherein said ceramic body has a joint part which is interposed between said heating part and said supporting part and is formed of a mixed ceramic containing both aluminum nitride and silicon nitride with a gradient of the proportion of aluminum nitride to silicon nitride such that said proportion becomes maximal in one end region of the joint part adjacent to said heating part and minimal in the opposite end region adjacent to said supporting part.
Claim 8
Dependent Claim
62 words
A ceramic heater according to claim 1, wherein said ceramic body has an elongate shape, said heating part being contiguous to one end of the elongate ceramic body and substantially entirely formed of said aluminum nitride based ceramic, said supporting part being contiguous to the opposite end of the elongate ceramic body and substantially entirely formed of said silicon nitride based ceramic.
Claim 9
Dependent Claim
225 words
A ceramic heater having a sintered nonoxide ceramic body, which has a heating part and a supporting part, and a heating resistor which is embedded in the heating part of the ceramic body, characterized in that said heating part of said ceramic body is formed of an aluminum nitride based ceramic at least in a core region thereof which is in contact with and encloses said heating element, and that said supporting part is formed of a silicon nitride based ceramic at least in a surface region thereof, and wherein: said ceramic body has an elongate shape, said heating part being contiguous to one end of the elongate ceramic body and substantially entirely formed of said aluminum nitride based ceramic, said supporting part being contiguous to the opposite end of the elongate ceramic body and substantially entirely formed of said silicon nitride based ceramic; and said elongate ceramic body has a joint part which is interposed between said heating part and said supporting part and is formed of a mixed ceramic containing both aluminum nitride and silicon nitride with a gradient of the proportion of aluminum nitride to silicon nitride such that said proportion becomes maximal in one end region of the joint part adjacent to said heating part and minimal in the opposite end region of the joint part adjacent to said supporting part.
Claim 10
Dependent Claim
225 words
A ceramic heater having a sintered nonoxide ceramic body, which has a heating part and a supporting part, and a heating resistor which is embedded in the heating part of the ceramic body, characterized in that said heating part of said ceramic body is formed of an aluminum nitride based ceramic at least in a core region thereof which is in contact with and encloses said heating element, and that said supporting part is formed of a silicon nitride based ceramic at least in a surface region thereof, and wherein: said ceramic body has an elongate shape, said heating part being contiguous to one end of the elongate ceramic body and substantially entirely formed of said aluminum nitride based ceramic, said supporting part being contiguous to the opposite end of the elongate ceramic body and substantially entirely formed of said silicon nitride based ceramic; and said elongate ceramic body has a joint part which is interposed between said heating part and said supporting part and is formed of a mixed ceramic containing both aluminum nitride and silicon nitride with a gradient of the proportion of aluminum nitride to silicon nitride such that said proportion becomes maximal in one end region of the joint part adjacent to said heating part and minimal in the opposite end region of the joint part adjacent to said supporting part.
Claim 11
Dependent Claim
50 words
A ceramic heater according to claim 7, wherein said joint part consists of a plurality of segments which are different from each other in the proportion of aluminum nitride to silicon nitride, in each of said plurality of segments the proportion of aluminum nitride to silicon nitride being substantially uniform.
Claim 12
Dependent Claim
33 words
A ceramic heater according to claim 1, wherein said heating part of said ceramic body has a covering region which encloses said core region and is formed of said silicon nitride based ceramic.
Claim 13
Dependent Claim
43 words
A ceramic heater according to claim 1, wherein said supporting part of said ceramic body has a core region which is covered by said surface region, contiguous to said core region of said heating part and formed of said aluminum nitride based ceramic.
Claim 14
Dependent Claim
42 words
A ceramic heater according to claim 10, wherein said ceramic body has an elongate shape, said heating part being contiguous to one end of the elongate ceramic body, said supporting part being contiguous to the opposite end of the elongate ceramic body.
Claim 15
Dependent Claim
16 words
A ceramic heater according to claim 1, wherein said heating resistor is made of a wire.
Claim 16
Dependent Claim
16 words
A ceramic heater according to claim 1, wherein said heating resistor is made of a film.
Claim 17
Dependent Claim
31 words
A ceramic heater according to claim 13, wherein said heating resistor is formed by a thick-film printing process using a paste containing a powder of the material of the heating resistor.
Claim 18
Dependent Claim
30 words
A ceramic heater according to claim 5, wherein the principal material of said heating resistor is selected from the group consisting of elemental tungsten, tungsten carbide (WC) and tungsten alloys.
Claim 19
Dependent Claim
19 words
A ceramic heater according to claim 5, wherein the principal material of said heating resistor is a metal nitride.
Claim 20
Dependent Claim
21 words
A ceramic heater according to claim 16, wherein said metal nitride is selected from the group consisting of TiN and TaN.
Claim 21
Dependent Claim
16 words
A ceramic heater according to claim 5, wherein said heating resistor is made of a wire.
Claim 22
Dependent Claim
16 words
A ceramic heater according to claim 5, wherein said heating resistor is made of a film.
Claim 23
Dependent Claim
31 words
A ceramic heater according to claim 19, wherein said heating resistor is formed by a thick-film printing process using a paste containing a powder of the material to the heating resistor.
Claim 24
Dependent Claim
30 words
A ceramic heater according to claim 7, wherein the principal material of said heating resistor is selected from the group consisting of elemental tungsten, tungsten carbide (WC) and tungsten alloys.
Claim 25
Dependent Claim
19 words
A ceramic heater according to claim 7, wherein the principal material of said heating resistor is a metal nitride.
Claim 26
Dependent Claim
21 words
A ceramic heater according to claim 22, wherein said metal nitride is selected from the group consisting of TiN and TaN.
Claim 27
Dependent Claim
16 words
A ceramic heater according to claim 7, wherein said heating resistor is made of a wire.
Claim 28
Dependent Claim
16 words
A ceramic heater according to claim 7, wherein said heating resistor is made of a film.
Claim 29
Dependent Claim
31 words
A ceramic heater according to claim 25, wherein said heating resistor is formed by a thick-film printing process using a paste containing a powder of the material to the heating resistor.
Claim 30
Dependent Claim
44 words
A ceramic heater according to claim 1, wherein said heating part of said ceramic body is formed of an aluminum nitride based ceramic comprising 100 parts by weight AlN, 1 part by weight Y 2 O 3 and 3 parts by weight of wax.