Patent US5263246A successfully refreshed from Google Patents.
US5263246A
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Bump forming method
Assignee: NEC Electronics Corp
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Filing: 1992-02-14
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Granted: 1993-11-23
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Expires: 2012-02-14
Abstract
Abstract In order to minimize the size of an aluminum pad in a method of forming a bump, a metal wire is wedge-bonded on the aluminum pad, a necessary amount of the wire is left on the aluminum pad, and the metal wire is disconnected by a clamp. The width of a collapsed portion of the wire on the aluminum pad can be reduced to 1.5 times or less the wire diameter.
Inventors
- 👤 Tsutomu Aoki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:04
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0444; H10W; H10W72/00; H10W72/01; H10W72/012; H10W72/01221; H10W72/01225; H10W72/071; H10W72/075; H10W72/07511; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/20; H10W72/251; H10W72/252; H10W72/29; H10W72/50; H10W72/541; H10W72/5434; H10W72/551; H10W72/552; H10W72/5522; H10W72/59; H10W72/90; H10W72/951; H10W72/952; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49147; Y10T29/49149
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
76 words
A bump forming method, comprising the steps of: wedge-bonding under pressure a portion of a wire to a metal pad located on a wafer by means of a wedge with an ultrasonic horn, said portion of said wire forming a bump on said metal pad and said bump being collapsed after completion of the wedge bonding, and disconnecting said wire from said portion of said wire by moving a clamping means for clamping said wire upward.
Claim 2
Dependent Claim
76 words
A bump forming method, comprising the steps of: wedge-bonding under pressure a portion of a wire to a metal pad located on a wafer by means of a wedge with an ultrasonic horn, said portion of said wire forming a bump on said metal pad and said bump being collapsed after completion of the wedge bonding, and disconnecting said wire from said portion of said wire by moving a clamping means for clamping said wire upward.
Claim 3
Dependent Claim
13 words
The method according to claim 1, wherein said wafer is a TAB wafer.
Claim 4
Dependent Claim
14 words
The method according to claim 1, wherein said metal pad is an aluminum pad.
Claim 5
Dependent Claim
21 words
The method according to claim 1, further comprising the step of: reducing the inner lead pitch between each said metal pad.
Claim 6
Dependent Claim
21 words
The method according to claim 4, wherein said inner lead pitch is reduced to less than or equal to 100 μm.
Claim 7
Dependent Claim
116 words
A bump manufactured by the process of wedge-bonding under pressure a portion of a wire to a metal pad located on a wafer by means of a wedge with an ultrasonic horn, said portion of said wire forming a bump on said metal pad and said bump being collapsed after completion of the wedge-bonding, and disconnecting said wire from said portion of said wire by moving a clamping means for clamping said wire upward, wherein a length of a collapsed portion of said wire is limited to or less than 2.0 times the wire diameter and a width of the collapsed portion of said wire is limited to or less than 1.5 times the wire diameter.
Claim 8
Dependent Claim
116 words
A bump manufactured by the process of wedge-bonding under pressure a portion of a wire to a metal pad located on a wafer by means of a wedge with an ultrasonic horn, said portion of said wire forming a bump on said metal pad and said bump being collapsed after completion of the wedge-bonding, and disconnecting said wire from said portion of said wire by moving a clamping means for clamping said wire upward, wherein a length of a collapsed portion of said wire is limited to or less than 2.0 times the wire diameter and a width of the collapsed portion of said wire is limited to or less than 1.5 times the wire diameter.
Claim 9
Dependent Claim
89 words
A bump forming method, comprising the steps of: wedge-bonding under pressure a portion of a wire to an elongated metal pad located on a wafer by means of a wedge with an ultrasonic horn, said portion of said wire forming a bump on said elongated metal pad and said bump being collapsed after completion of the wedge-bonding and including a non-collapsed wire portion of said portion of said wire, and disconnecting said wire from said portion of said wire by moving a clamping means for clamping said wire upward.
Claim 10
Dependent Claim
89 words
A bump forming method, comprising the steps of: wedge-bonding under pressure a portion of a wire to an elongated metal pad located on a wafer by means of a wedge with an ultrasonic horn, said portion of said wire forming a bump on said elongated metal pad and said bump being collapsed after completion of the wedge-bonding and including a non-collapsed wire portion of said portion of said wire, and disconnecting said wire from said portion of said wire by moving a clamping means for clamping said wire upward.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-22 | 1997-05-24 | 1997-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-22 | 2001-05-24 | 2001-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-22 | 2005-05-24 | 2005-11-23 | $7700.00 | Window Closed / Lapsed |