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US5260596A
Expired / Lapsed
US
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Monolithic circuit with integrated bulk structure resonator
Assignee: NXP USA Inc
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Filing: 1991-04-08
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Granted: 1993-11-09
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Expires: 2011-04-08
Abstract
Abstract A structure is provided to integrate bulk structure resonators into a monolithic integrated circuit chip. The chip also contains the remaining circuit components (17, 21, 24) required for the desired system function. Micromachining techniques are used to fabricate both support and a cavity (11, 27, 28) which allows mechanical vibration without interference. Alternative embodiments incorporate the use of non-piezoelectric mechanical resonators (14), quartz crystal resonators (18) and thin film piezoelectric resonators (22). Each type of resonator is used for the range of frequencies to which it is suited, providing a family of monolithic resonators capable of being used with integrated circuits having operating frequencies from a few hundred hertz to over 500 Mhz.
Inventors
- 👤 William C. Dunn
- 👤 H. Ming Liaw
- 👤 Ljubisa Ristic
- 👤 Raymond M. Roop
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:27
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/15; H03H9/17; H03H9/171; H03H9/172; H03H9/173; H03H9/02; H03H9/05; H03H9/0538; H03H9/0542; H03H9/24; H03H9/2405; H03H9/2426; H03H9/2447; H03H9/2457; H10; H10N; H10N39/00
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
77 words
A monolithic circuit with integrated bulk structure resonator, comprising: a semiconductor substrate; a plurality of integrated circuit components fabricated as part of the semiconductor substrate; a mass supported by a spring directly mounted on the semiconductor substrate; exciting means for applying a varying electrostatic force to the mass in such a way as to induce a mechanical vibration in the mass; and a cavity fabricated on the semiconducting substrate providing room for the mechanical vibration to occur.
Claim 2
Dependent Claim
77 words
A monolithic circuit with integrated bulk structure resonator, comprising: a semiconductor substrate; a plurality of integrated circuit components fabricated as part of the semiconductor substrate; a mass supported by a spring directly mounted on the semiconductor substrate; exciting means for applying a varying electrostatic force to the mass in such a way as to induce a mechanical vibration in the mass; and a cavity fabricated on the semiconducting substrate providing room for the mechanical vibration to occur.
Claim 3
Dependent Claim
18 words
The monolithic circuit with integrated bulk structure resonator of claim 1 wherein the semiconducting substrate material is silicon.
Claim 4
Dependent Claim
21 words
The monolithic circuit with integrated bulk structure resonator of claim 1 wherein the semiconducting substrate material is a III-IV compound semiconductor.
Claim 5
Dependent Claim
34 words
A monolithic circuit with integrated bulk structure resonator, comprising: a semiconducting substrate; a plurality of integrated circuit components fabricated on the semiconducting substrate; a plurality of integrated circuit components fabricated on the semiconducting substrate;
Claim 6
Dependent Claim
34 words
A monolithic circuit with integrated bulk structure resonator, comprising: a semiconducting substrate; a plurality of integrated circuit components fabricated on the semiconducting substrate; a plurality of integrated circuit components fabricated on the semiconducting substrate;
Claim 7
Dependent Claim
100 words
A monolithic circuit with integrated bulk structure resonator, comprising: a semiconducting substrate; a plurality of integrated circuit components fabricated on the semiconducting substrate; a quartz crystal resonator bonded to the semiconducting substrate by means of a plurality of solder bumps, wherein the solder bumps are sufficiently large to provide room between the quartz crystal resonator and the silicon substrate for a bulk structure vibration to occur within the quartz crystal resonator without interferance; means for applying electrical energy to the quartz crystal resonator in such a way as to piezoelectrically induce a bulk structure vibration in the quartz crystal resonator.
Claim 8
Dependent Claim
100 words
A monolithic circuit with integrated bulk structure resonator, comprising: a semiconducting substrate; a plurality of integrated circuit components fabricated on the semiconducting substrate; a quartz crystal resonator bonded to the semiconducting substrate by means of a plurality of solder bumps, wherein the solder bumps are sufficiently large to provide room between the quartz crystal resonator and the silicon substrate for a bulk structure vibration to occur within the quartz crystal resonator without interferance; means for applying electrical energy to the quartz crystal resonator in such a way as to piezoelectrically induce a bulk structure vibration in the quartz crystal resonator.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-08 | 1997-05-10 | 1997-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-08 | 2001-05-10 | 2001-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-08 | 2005-05-10 | 2005-11-09 | $7700.00 | Window Closed / Lapsed |